Piezoelectric disc micromechanical gyroscope

Abstract

The invention discloses a piezoelectric disc micromechanical gyroscope which comprises a disc harmonic oscillator with a supporting column, three driving electrodes, three detecting electrodes, three monitoring electrodes and three balancing electrodes. The three driving electrodes, the three detecting electrodes, the three monitoring electrodes and the three balancing electrodes are distributed along a circle of the end face of the disc harmonic oscillator respectively. The piezoelectric disc micromechanical gyroscope utilizes a special vibration mode of the disc harmonic oscillator to work, alternating current voltage is applied to the three driving electrodes on the disc harmonic oscillator, and the disc harmonic oscillator vibrates in a driving mode due to inverse piezoelectric effect. When input angular velocity exists, a vibration mode of the disc harmonic oscillator is turned to a detecting mode. By means of sensitive signals generated through piezoelectric positive effect at detecting electrode positions, the input angular velocity is obtained after the sensitive signals are processed through a peripheral circuit. The piezoelectric disc micromechanical gyroscope has the advantages of being simple in structure and small in size, having high Q value and the like and does not need vacuum packaging.

Description

technical field [0001] The invention relates to a solid-wave gyroscope in the field of micro-electromechanical technology, specifically, it is a piezoelectric disc micro-mechanical gyroscope based on the solid-wave principle. Background technique [0002] Gyroscope is an inertial device that can be sensitive to the angle or angular velocity of the carrier, and it plays a very important role in the fields of attitude control, navigation and positioning. With the development of national defense technology and aviation and aerospace industries, the requirements of inertial navigation systems for gyroscopes are also developing in the direction of low cost, small size, high precision, multi-axis detection, high reliability, and adaptability to various harsh environments. The micro gyroscope based on MEMS technology is processed by micro-nano batch manufacturing technology, its cost, size, and power consumption are very low, and its environmental adaptability, working life, reliab...

AI Technical Summary

Problems solved by technology

[0005] This technology has the following disadvantages: the volume of the solid wave gyro cup-shaped resonator is too large, which limits its application in many conditions where the volume must be small; the piezoelectric electrodes of the cup-shaped vibrator chassis are bonded to the cup-shaped vibrator. There is a possibility of falling off under high-frequency vibration, and the reliability is not high; the processing technology of the gyroscope is relatively complicated, and the processing cost is high, so it is not suitable for mass production

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