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48 results about "MEMS magnetic field sensor" patented technology

A MEMS magnetic field sensor is a small-scale microelectromechanical systems (MEMS) device for detecting and measuring magnetic fields (Magnetometer). Many of these operate by detecting effects of the Lorentz force: a change in voltage or resonant frequency may be measured electronically, or a mechanical displacement may be measured optically. Compensation for temperature effects is necessary. Its use as a miniaturized compass may be one such simple example application.

Self-compensating magnetoelastic torque sensor system

An improved magnetic torque transducer arrangement for self-compensating effects of external magnetic sources and temperature offset comprises a shaft with at least one magnetized zone, at least one active magnetic field sensor and at least one passive magnetic field sensor disposed in such a way that active field sensor always in a position with higher magnetic field strength arise from applied torque than that of passive sensor. Passive field sensors may also be placed in both sides of the active field sensor, or on one side of active field sensor only. The transducer output is obtained by subtract the output of passive field sensors from that of active field sensor thus cancel out the effect of interfering magnetic field flux and temperature offset on the torque transducer, and partially filter out temperature sensitivity drift and rotational dependant signal. The sensitivity of active and passive field sensors can also be electrically matched by calibrating them in a uniform magnetic field, thus a completely common mode rejection can be achieved. The sensor arrangements may also be utilized in other type of sensors that extract changes in magnetic fields to indirectly detect direction, speed, presence, force, linear position, or angle to cancel out interfering magnetic field and temperature offset effect.
Owner:WENG WENSHENG

Position detection system, guidance system, position detection method, medical device, and medical magnetic-induction and position-detection system

There are provided a position detection system, a guidance system, and a position detection method which obviate the need for frequency adjustment of an alternating magnetic field used in position detection of a device and which allow the device to be made more compact and less expensive. There are included a device (capsule endoscope 20 ) provided with a magnetic induction coil, a drive coil 51 for generating an alternating magnetic field, a plurality of magnetic sensors 52 for detecting an induced magnetic field, a frequency determining section 50 B for determining a position calculating frequency based on a resonance frequency of the magnetic induction coil, and a position analyzing unit 50 A for calculating, at the position calculating frequency, at least one of the position and the orientation of the device 20 based on the difference between outputs from the magnetic sensors 52 when only the alternating magnetic field is applied and outputs from the magnetic sensors 52 when the alternating magnetic field and the induced magnetic field are applied; and at least one of a frequency range of the alternating magnetic field and an output frequency range of the magnetic field sensors is limited based on the position calculating frequency.
Owner:OLYMPUS CORP

Resonance micro electromechanical system magnetic field sensor and measuring method thereof

The invention relates to a resonance micro electromechanical system magnetic field sensor and a measuring method thereof, having the advantages of low power consumption, simple structure, rapid respondency and good reliability. The magnetic field sensor comprises an anchorage (1), a metal wire (2), a contilever plate (3) and a substrate (4). The metal wire (2) plated on the contilever plate (3) drives the contilever plate (3) under the action of lorentz force to generate vibration; excitation is respectively used for producing resonance having the same excitation frequency as first order and second order of the contilever plate; when the first order and the second order are in resonance, the structure has the directions with the difference of 90 degrees; the different displacements of a p point are measured by measuring the displacement of the p point on the contilever plate after the magnetic field directions of the first order and the second order are changed, thus the measurement of the magnetic field directions can be realized. The invention aims at providing a micro electromechanical system magnetic field sensor which has low power consumption, high sensitivity and precision and simple structure, and is seldom influenced by temperature.
Owner:SOUTHEAST UNIV

An integrated low-power consumption tri-axial magnetic field sensor with high Z-direction resolving force

ActiveCN107894576AImprove resolutionImprove three-axis orthogonalityMagnetic measurementsHysteresisMEMS magnetic field sensor
The invention provides an integrated low-power consumption tri-axial magnetic field sensor with high Z-direction resolving force. The integrated low-power consumption tri-axial magnetic field sensor comprises an insulation substrate, an orbit transfer soft magnetic block and four magnetic measuring units. The four magnetic measuring units are arranged on the surface of the insulation substrate incentral symmetry; the orbit transfer soft magnetic block is placed on the four magnetic measuring units in central symmetry with respect to the center points of the four magnetic measuring units; onepart of each magnetic measuring unit is located right under the orbit transfer soft magnetic block. In order to solve the problem of insufficient Z-direction resolving force and low compensation efficiency in the prior art, the orbit transfer soft magnetic block and the four centrally-symmetrical magnetic measuring units achieve high-efficiency orbit transfer of Z-direction magnetic fields, gathering, amplification and planar measurement of tri-axial magnetic fields can be achieved, the tri-axial orthogonality and the Z-direction magnetic field resolving force are effectively improved, and high-resolving force measuring for weak tri-axial magnetic field signals and high efficiency compensation for hysteresis can be achieved. The integrated low-power consumption tri-axial magnetic field sensor has the advantages of low energy consumption and low cost.
Owner:NAT UNIV OF DEFENSE TECH

MEMs Amplitude Modulator and MEMs Magnetic Field Sensor Including Same

ActiveUS20160211803A1Amount of variation in variableImproving sensing functionMagnetic field measurement using galvano-magnetic devicesAmplitude modulation with mechanical/acoustic driven partsCapacitanceMEMS magnetic field sensor
The present invention provides an amplitude modulator, which is disposed in an area through which a magnetic field flows so as to modulate amplitudes, comprising: a substrate; a first driving electrode which receives a first frequency signal and a second frequency signal supplied from the substrate and carries out resonant motion by the magnetic field; and a second driving electrode for receiving the second frequency signal and carries out resonant motion by the first driving electrode and the magnetic field, wherein a modulated signal is generated by modulating the amplitudes of the first and second frequency signals through the resonant motions of the first and second driving electrodes. Therefore, since the signal generated by modulating a carrier signal through mechanical resonance according to the magnetic field is outputted, amplitude modulation can be carried out without a complicated circuit configuration. In addition, since an MEMS device is a single structure that does not include an insulating layer, a single signal is applied to one structure, thereby simplifying driving, and all the driving electrodes of both ends thereof are driven so as to double a change in variable capacitance, thereby improving sensing ability.
Owner:LG INNOTEK CO LTD

Magnetic field sensor

The invention discloses a magnetic field sensor which comprises a shell which is in a cylindrical structure, a hollow skeleton which is a hollow columnar body, a segmented magnetic core, multiple sections of coils and an amplifying circuit, wherein the outer surface of the hollow skeleton is provided with a plurality of same annular grooves at equal spacings; the segmented magnetic core is arranged in a hollow part of the hollow skeleton and is formed by connecting multiple sections of magnetic core materials equal in length; the multiple coils respectively winds in the annular grooves of the hollow skeleton and are serially connected to the amplifying circuit; the amplifying circuit is arranged at one end in the shell and used for amplifying and outputting induction signals of the multiple coils. According to the magnetic field sensor disclosed by the invention, a working band is completely expanded and the influence of the sensor on magnetic field measurement is effectively reduced; moreover, the electric field interface of an environment surrounding is shielded and the accuracy of measuring magnetic field signals is guaranteed. The magnetic field sensor disclosed by the invention is small in volume, light in weight, and effectively applicable to engineering application of a ground transverse electric and magnetic field (TEM).
Owner:INST OF ELECTRONICS CHINESE ACAD OF SCI

Driving circuit of magnetic field sensor based on amorphous filler metal and application method of driving circuit

The invention discloses a driving circuit of a magnetic field sensor based on amorphous filler metal and an application method of the driving circuit. The driving circuit comprises a magnetic core motivation portion, a magnetic core replacement portion, a signal sampling and amplifying portion and a power source portion. A symmetric difference sampling circuit structure is adopted, and the charge injection effect brought by an analogue switch or a field effect transistor is eliminated. A current is exerted in metal receiving coils to replace magnetic cores, and therefore the magnetic-lag of the magnetic cores is removed; the even number of series-connection magnetic cores and a metal receiving coil structure in a symmetric winding manner are adopted, and therefore the inductive coupling effect between the magnetic cores and the receiving coils is eliminated, and the capacitive coupling effect of motivation current on the metal receiving coils is reduced, so that the signal-to-noise ratio and the linearity of output signals of the sensor are improved; each magnetic core is segmented into a plurality of isometric small segments, and the magnetic field detection range and the magnetic field sensitivity of the sensor can be conveniently controlled.
Owner:HEBERSON TECH (SHENZHEN) CO LTD

MEMS magnetic field sensor of folded beam structure and preparation method

ActiveCN107271930ALarge displacement degrees of freedomNot prone to fatigue fractureMagnitude/direction of magnetic fieldsCapacitancePower flow
The invention relates to an MEMS magnetic field sensor of a folded beam structure and a preparation method. The sensor includes a metal T-shaped folded beam processed on a substrate and fixed in the center. An electrode formed by the folded beam and an electrode on the substrate form a variable capacitor. The principle of the MEMS magnetic field sensor of the folded beam structure is that a metal coil processed on the T-shaped folded beam structure is subjected to lorentz force after current is introduced, thus the beam bends and deforms, thereby changing an interval of the two electrodes, and realizing change of a capacitance value. The magnitude of a magnetic field can be measured through detection of capacitance variation. The folded beam structure can realize effective support for a movable polar plate, and provide a smaller equivalent elastic coefficient compared with a traditional structure, and compared with a traditional torsion beam structure, various residual stress in a sensor processing process can be reduced, sensitivity of the sensor can be improved, and power consumption can be reduced. Since the T-shaped folded beam structure of the sensor can achieve a function of releasing stress, the service life of the sensor is prolonged.
Owner:HEFEI UNIV OF TECH
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