The invention relates to a
resonance micro electromechanical
system magnetic field sensor and a measuring method thereof, having the advantages of low
power consumption, simple structure, rapid respondency and good reliability. The
magnetic field sensor comprises an anchorage (1), a
metal wire (2), a contilever plate (3) and a substrate (4). The
metal wire (2) plated on the contilever plate (3) drives the contilever plate (3) under the action of
lorentz force to generate vibration; excitation is respectively used for producing
resonance having the same excitation frequency as first order and second order of the contilever plate; when the first order and the second order are in
resonance, the structure has the directions with the difference of 90 degrees; the different displacements of a p point are measured by measuring the displacement of the p point on the contilever plate after the
magnetic field directions of the first order and the second order are changed, thus the measurement of the magnetic field directions can be realized. The invention aims at providing a micro electromechanical
system magnetic field sensor which has low
power consumption, high sensitivity and precision and simple structure, and is seldom influenced by temperature.