The invention provides a micro machinery 
magnetic field sensor and a preparation method thereof, which belong to the field of a micro electro 
mechanical system. A sacrifice layer with a 
contact hole is deposited on a structural layer of a device, a 
metal coil is prepared on the sacrifice layer, then the sacrifice layer is corroded, and finally 
dry etching is used to manufacture a device structure, and the device structure is released to form a 
resonance oscillator so as to form the 
metal coil to hang on the micro machinery 
magnetic field sensor above the 
resonance oscillator. The 
resonance oscillator of the micro machinery 
magnetic field sensor works in an extension module, so that induced 
electromotive force produced by each small section of 
metal cutting magnetic induction lines on the metal coil can be overlapped, strength of output signals is strengthened, and contact surface between the metal coil and the resonance oscillator is reduced to solve the problem of 
signal crosstalk in 
high frequency. In addition, the micro machinery magnetic field sensor has the advantages of being low in 
power consumption, simple in driving-detection circuit, small in temperature influence, simple in process and the like.