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273results about "Electrodynamic magnetometers" patented technology

MEMS device with tandem flux concentrators and method of modulating flux

A microelectromechanical modulating magnetic sensor comprising a base; a magnetic transducer associated with the base that provides an output in response to a magnetic field; a pair of movable flux concentrators positioned to move relative to the magnetic transducer; the pair of movable flux concentrators having a region of high flux concentration between the pair of movable flux concentrators; the pair of flux concentrators moving together in tandem with the distance between the pair remaining substantially constant during movement; support structure for supporting the pair of movable flux concentrators; a power source for causing the movable flux concentrators to move at a frequency within a predetermined frequency range; whereby when the pair of movable flux concentrators is in a first position the region of high flux concentration is in a first location, and when the pair of movable flux concentrators is in a second position, the region of high flux concentration is in a second position; such that as the flux concentrators move from the first position to the second position the intensity of the flux sensed by the transducer is modulated as the region of high flux concentration approaches and recedes from the location of the transducer.
Owner:ARMY US SEC THE THE

Micro machinery magnetic field sensor and preparation method thereof

The invention provides a micro machinery magnetic field sensor and a preparation method thereof, which belong to the field of a micro electro mechanical system. A sacrifice layer with a contact hole is deposited on a structural layer of a device, a metal coil is prepared on the sacrifice layer, then the sacrifice layer is corroded, and finally dry etching is used to manufacture a device structure, and the device structure is released to form a resonance oscillator so as to form the metal coil to hang on the micro machinery magnetic field sensor above the resonance oscillator. The resonance oscillator of the micro machinery magnetic field sensor works in an extension module, so that induced electromotive force produced by each small section of metal cutting magnetic induction lines on the metal coil can be overlapped, strength of output signals is strengthened, and contact surface between the metal coil and the resonance oscillator is reduced to solve the problem of signal crosstalk in high frequency. In addition, the micro machinery magnetic field sensor has the advantages of being low in power consumption, simple in driving-detection circuit, small in temperature influence, simple in process and the like.
Owner:SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI

Micromechanical magnetic field sensor and application thereof

ActiveCN102914749AEliminate capacitively coupled signalsSimple magnetic field output signal detectionElectrodynamic magnetometersCapacitive couplingDifferential signaling
The invention provides a micromechanical magnetic field sensor and application thereof. The micromechanical magnetic field sensor at least comprises a resonant vibrator pair and insulating layers and metal coils, which are formed on the surface of the resonant vibrator pair in sequence. The micromechanical magnetic field sensor has the following beneficial effects: the micromechanical magnetic field sensor utilizes differential capacitor excitation and electromagnetic induction to measure the size of a magnetic field, wherein two resonant vibrator structures forming the resonant vibrator pair work in an inverse phase mode, the winding directions of the metal coils on the resonant vibrator structures are opposite, and the induced electromotive forces generated by the metal coils on the two resonant vibrator structures are connected with each other in parallel; as driving signals are differential signals, capacitive coupling signals in output signals are eliminated to obtain simple magnetic field output signals; meanwhile, the two resonant vibrator structures are coupled by a coupling structure so that the two resonant vibrator structures are connected and move as a whole; and furthermore, the micromechanical magnetic field sensor has simple structure, large output signals, high sensitivity and high detection accuracy, is slightly affected by temperature and is suitable for high working frequency.
Owner:SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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