The invention relates to the technical field of
magnetic field measurement and
plasma diagnosis, in particular to an anti-
sputtering telescopic and deformable vacuum three-dimensional array
magnetic field monitoring device and method. According to the technical scheme, the device comprises a
power transmission device module, a rotating device module, a probe device module, a base and a
signal transmission module, the
power transmission device module is located in the base and is in nested connection with the rotating device module, the rotating device module is fixedly connected with the probe device module, and the
signal transmission module is connected with the base; the
power transmission device module is used for controlling the probe device module to move in the vertical or horizontal direction. According to the invention, the full-dimensional precise measurement of the three-dimensional
magnetic field in the vacuum environment is realized, the measurement position and angle can be finely adjusted without moving the base, the measurement flexibility and the coverage range are greatly improved, good vacuum sealing performance and
sputtering resistance are achieved, the operation is convenient, the positioning is precise, and the measurement efficiency and the
data consistency are effectively improved.