The invention provides a
single chip difference free layer push-pull type
magnetic field sensor electric bridge and a preparation method thereof. The
magnetic field sensor electric bridge comprises a substrate, a staggered soft
magnetic flux concentrator array and a GMR
spin valve or a TMR magnetic
resistor sensor unit array which is placed on the substrate and has an X-direction magnetic sensitive direction. Each soft
magnetic flux concentrator comprises edges parallel to the X axis, edges parallel to the Y axis and four corners, and the four corners are sequentially marked as A, B, C and D from the upper left position in the
clockwise direction. Magnetic
resistor sensor units are placed at the gaps between the soft
magnetic flux concentrators. Meanwhile, the magnetic
resistor sensor units corresponding to the corners A and the corners C of the soft magnetic flux concentrators and the magnetic resistor sensor units corresponding to the corners B and the corners D are defined as push magnetic resistor sensor units and pull magnetic resistor sensor units respectively. The push magnetic resistor sensor units are electrically connected to form one or more push arms, the pull magnetic sensor units are electrically connected to form one or more pull arms, and the push arms and the pull arms are electrically connected to form a push-pull type sensor bridge. According to the
single chip difference free layer push-pull type
magnetic field sensor electric bridge and the preparation method therefore, the
power consumption is low, the magnetic field sensitivity is high, and a magnetic field in the Y direction can be measured.