Single chip difference free layer push-pull type magnetic field sensor electric bridge and preparation method thereof

Abstract

The invention provides a single chip difference free layer push-pull type magnetic field sensor electric bridge and a preparation method thereof. The magnetic field sensor electric bridge comprises a substrate, a staggered soft magnetic flux concentrator array and a GMR spin valve or a TMR magnetic resistor sensor unit array which is placed on the substrate and has an X-direction magnetic sensitive direction. Each soft magnetic flux concentrator comprises edges parallel to the X axis, edges parallel to the Y axis and four corners, and the four corners are sequentially marked as A, B, C and D from the upper left position in the clockwise direction. Magnetic resistor sensor units are placed at the gaps between the soft magnetic flux concentrators. Meanwhile, the magnetic resistor sensor units corresponding to the corners A and the corners C of the soft magnetic flux concentrators and the magnetic resistor sensor units corresponding to the corners B and the corners D are defined as push magnetic resistor sensor units and pull magnetic resistor sensor units respectively. The push magnetic resistor sensor units are electrically connected to form one or more push arms, the pull magnetic sensor units are electrically connected to form one or more pull arms, and the push arms and the pull arms are electrically connected to form a push-pull type sensor bridge. According to the single chip difference free layer push-pull type magnetic field sensor electric bridge and the preparation method therefore, the power consumption is low, the magnetic field sensitivity is high, and a magnetic field in the Y direction can be measured.

Description

technical field [0001] The invention relates to the field of magnetic sensors, in particular to a single-chip differential free layer push-pull magnetic field sensor bridge and a preparation method. Background technique [0002] In the design process of two-axis and three-axis magnetic compass chips, X-axis and Y-axis magnetic sensors need to be used at the same time. For magnetoresistive type sensing units, they generally have a single sensitive magnetic field direction, for example, they are sensitive to magnetic fields in the X direction. For the acquisition of magnetic field sensitivity in the Y direction, the magnetic field sensitive sensing unit in the X direction is generally rotated by 90 degrees to obtain the magnetic field sensitive unit in the Y direction. A pull bridge in which the push arm and the wrist arm are manufactured separately, that is, one of them is rotated 180 degrees relative to the other, so that the push arm and the wrist arm have opposite pinned l...

AI Technical Summary

Problems solved by technology

[0004] 1) When the X and Y axis magnetoresistive sensors are prepared on the same plane at the same time, since the X and Y axis magnetoresistance sensors are discrete components, integrated manufacturing cannot be realized, which increases the complexity of the process and affects the two-axis or three-axis Measuring Accuracy of Shaft Sensors

[0005] 2) The push arm and wrist arm cannot realize the integrated manufacturing process, and the process of connecting discrete slices with flying wires also increases the complexity of the process and affects the measurement accuracy of the sensor

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