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35results about "Three-component magnetometers" patented technology

Magnetic field sensor and multi-axis magnetic field sensor

PendingEP4756467A1Magnetic field offset compensationMagnetic field measurement using galvano-magnetic devices
The present application provides a magnetic field sensor and a multi-axis magnetic field sensor, and relates to the field of magnetic field measurement technology. The magnetic field sensor comprises: a magnetic flux conversion module, a magnetic induction module, and a differential detection module. The magnetic flux conversion module comprises: a magnetic field input area, a magnetic field output area, a magnetic flux direction conversion area, and a magnetic flux path connection area. The magnetic flux conversion module concentrates and amplifies a magnetic field to be measured in the magnetic field induction direction and converts it into a magnetic field component in a spatial solid angle direction with an angle of 0-90 degrees with the direction of the magnetic field to be measured. The magnetic induction module senses the magnetic field at the air gap of the magnetic flux conversion module, generates a differential voltage signal, and forms an output electrical signal to be measured through the differential detection module. This enables the conversion of the magnetic field to be measured into a magnetic field component in the opposite direction at the air gap, thereby realizing differential detection of a push-pull bridge structure using magnetic induction modules with the same sensitivity direction. It can be manufactured in an integrated manner, leading to a simple process and good sensitivity consistency, and it is easy to produce.
Owner:MULTIDIMENSION TECH CO LTD

Signal processing methods and systems for biomagnetic field imaging

ActiveUS12648726B2Magnetic field measurement using flux-gate principleMagnetic field measurement using magneto-optic devicesFilter (signal processing)Noise reduction
A computer system receives a plurality of signals corresponding to first time-series magnetic data generated from a plurality of unshielded magnetometers proximate to the human subject. The first time-series magnetic data corresponds to magnetic fields generated from the human subject. The plurality of signals includes contributions from a biomagnetic field from at least a portion of the subject's organ and a background magnetic field. The computer system synchronizes the first time-series magnetic data to a common clock to generate synchronized time-series magnetic data. The computer system applies one or more filters to the synchronized time-series magnetic data to obtain filtered data. The computer system applies one or more noise reduction techniques to the filtered data to generate updated time-series magnetic data.
Owner:SB TECH INC

Method and device for detecting low frequency electromagnetic field of moon

ActiveCN121878839BResistance/reactance/impedenceElectric/magnetic detectionElectric field sensorPotential measurement
The present application belongs to the field of deep space exploration and geophysical exploration, and particularly relates to a method and device for detecting lunar low-frequency electromagnetic field, aiming at solving the problem of unstable potential measurement in the lunar surface rare plasma environment. The present application comprises: deploying first, second and third electric field sensor probes in an orthogonal configuration on the lunar surface; applying a controllable bias current to each probe to actively adjust and stabilize the particle exchange process between the probe and the surrounding plasma, so that it works at a stable working point which is not sensitive to environmental disturbance, thereby reliably obtaining the accurate potential at the position of each probe; finally, by calculating the potential difference between the first probe and the second probe, and between the first probe and the third probe, the first and second electric field components which are orthogonal to each other are determined respectively. The present application overcomes the interference of the special lunar surface environment on potential measurement, and realizes stable and reliable detection of the lunar low-frequency electric field.
Owner:INSTITUTE OF GEOLOGY AND GEOPHYSICS CHINESE ACADEMY OF SCIENCES

Using a magnetic recording for authentication

PendingEP4758394A1Navigation by terrestrial meansNavigation by speed/acceleration measurements
In one embodiment, a method includes accessing a first series of first magnetic values that represents a first magnetic recording that includes a first set of first magnetic measurements. Each of the first magnetic values represents one of the first magnetic measurements. The method includes accessing a second series of second magnetic values that represents a second magnetic recording that includes a second set of second magnetic measurements. Each of the second magnetic values represents one of the second magnetic measurements. The method includes approximately aligning the first and second series with each other; calculating a difference between the first and second series as aligned with each other; and determining a similarity between the first and second series based on the difference.
Owner:ASTRA NAVIGATION INC

Crosstalk-resistant sensors

ActiveCN118259061Breduce contributionReduce crosstalk contributionMagnetic field offset compensationMagnetic field measurement using galvano-magnetic devicesElectrical conductorCurrent sensor
This disclosure describes a sensing capability resistant to crosstalk. A current sensor is provided for a target conductor among a plurality of conductors. The current sensor includes at least one magnetic sensor configured to provide two signals representing two different parameters of a field, the two different parameters being different components or their directional derivatives (e.g., gradients). The current sensor also includes a processor configured to derive a signal indicating a current based on a linear combination of a first signal and at least a second signal. At least one of these signals is weighted by coefficients that are constants selected based on the distance between the sensor and at least one of the plurality of conductors in at least a first or second direction. The coefficients are selected to reduce the contribution of parasitic magnetic fields to the signal indicating a current in the first conductor, wherein the parasitic magnetic field is generated by at least one other conductor.
Owner:MELEXIS ELECTRONIC TECH CO LTD

Wheatstone bridge manufacturing process

The invention relates to a method for manufacturing a Wheatstone bridge comprising the following steps: a step of supplying a first slice comprising: a first stack of layers including: a first magnetic layer, the first stack of layers being structured into a first half-Wheatstone bridge in which the magnetization of the first magnetic layer is oriented in a first direction; a step of supplying a second slice comprising: a second stack of layers, including: a third magnetic layer; a first step of structuring the second stack of layers into a second half-Wheatstone bridge in which the magnetization of the third magnetic layer is oriented in a second direction; a bonding step, in which the bonding step is carried out such that the first direction is different from the second direction. Figure for the abstract: Fig. 7
Owner:COMMISSARIAT A LENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES

Apparatus and method for tracking a device having a magnet

The present disclosure generally relates to an apparatus (100) and method for tracking a device (200) having a magnet (210). The apparatus (100) comprises magnetic sensors (110) arranged longitudinally and configured for measuring a magnetic field from the magnet (210) as the device (200) moves along a trajectory (220). A processor receives the magnetic field measurements of the magnet (210); determines, for each magnetic sensor (110), axial magnetic field components directed along mutually orthogonal axial directions; selects the axial magnetic field components that satisfy a threshold predefined for each axial direction; calculates a pose of the magnet (210) using the selected axial magnetic field components and predetermined magnetic moments for the magnetic sensors (110); and tracks the device (200) using the calculated poses of the magnet (210) as the device (200) moves along the trajectory (220).
Owner:SINGAPORE UNIVERSITY OF TECHNOLOGY AND DESIGN +1

Cross-shaped high-temperature three-dimensional hall sensor and preparation method thereof

ActiveCN116847720BSingle device manufacturingThree-component magnetometers
Cross type high temperature three-dimensional Hall sensor and preparation method thereof belong to the technical field of semiconductor devices. The technical scheme is that X column, Y column and Z column are all third generation semiconductor materials, X column, Y column and Z column are connected with each other perpendicularly in pairs, electrodes C1 and C2 are arranged at two ends of Z column, electrodes C3 and C4 are arranged on two sides of Y column, and electrodes C5 and C6 are arranged on two sides of X column. The beneficial effects are that the third generation semiconductor is used to make the sensor work in a high temperature environment, the new structure greatly reduces the volume compared with the traditional discrete device packaging combined Hall sensor, the sensor can work in a very small space, the performance of the new structure in each direction is consistent, which is beneficial to high temperature work and subsequent signal processing, and the high sensitivity Hall sensor made by the scheme is expected to be applied in various micro wearable, nuclear power station, medical, military, aerospace and other fields.
Owner:DALIAN UNIV OF TECH

Magnetic sensor device

PendingUS20260169103A1Magnetic field offset compensationMagnetic sensor geometrical arrangements
A magnetic sensor device includes at least one magnetic sensor and a support. A center of gravity of an element layout area of the at least one magnetic sensor is deviated from a center of gravity of a reference plane of the support. The at least one magnetic sensor includes four auxiliary resistor sections constituted by a plurality of magnetoresistive elements. The element layout area includes first to fourth areas for laying out the four auxiliary resistor sections, respectively. Two of the first to fourth areas are arranged so that at least parts of the respective two areas sandwich a reference axis therebetween, and other two of the first to fourth areas are arranged so that at least parts of the respective other two areas sandwich the reference axis therebetween.
Owner:TDK CORP

Method for producing a magnetic sensor

PendingUS20260153574A1Single device manufacturingThree-component magnetometersEngineering physicsMaterials science
A method for producing a magnetic sensor. The method includes: arranging a first material having a first etch rate on a substrate to form a first layer; arranging a second material having a second etch rate on the first layer to form a second layer, the first etch rate being smaller than the second; arranging a third material on the second layer to form a third layer; structuring the third layer to create a structure having at least one open window in the third layer; etching, isotropically, the second layer through the at least one open window, as a result of which the third layer is undercut; after the through-etching of the second layer, the first layer is etched to create at least one inclined surface in the etched first layer, forming a magnetic sensing element on the at least one inclined surface of the first layer.
Owner:ROBERT BOSCH GMBH

A method and system for nondestructive testing of steel based on multimodal data

ActiveCN121784150BMaterial analysis using acoustic emission techniquesMagnetic field measurement using flux-gate principleMultiscale decompositionMagnetic field gradient
This application provides a non-destructive testing method and system for steel based on multimodal data, relating to the field of materials testing technology. The method includes identifying the starting moment of the steel entering the plastic deformation stage based on the acoustic emission signal sequence during the stress process, and determining the time interval of the increasing activity of the acoustic emission signal; acquiring the metal magnetic memory signal and surface strain data within the time interval; further determining the location of the magnetic field gradient anomaly and the location of the strain concentration region of the steel; determining the spatial overlap region of the multimodal signals; performing multi-scale decomposition on the acoustic emission signals within the spatial overlap region of the multimodal signals, determining the cumulative degree of irreversible changes in the microstructure of the steel based on the abrupt change characteristics in the decomposed signals, and subsequently determining the test result of the steel. This application can realize dynamic monitoring of the transition of steel from the elastic stage to the plastic deformation stage during the stress process, accurately identifying changes in the internal microstructure of the steel and spatially locating them.
Owner:SHENZHEN TAIKE TEST

Multi-axis magnetic field sensor

PendingEP4756465A1Magnetic field offset compensationMagnetic sensor geometrical arrangements
A multi-axis magnetic field sensor. The multi-axis magnetic field sensor includes: a first magnetic conductor (1D) in a first direction, a second magnetic conductor (2D) located in the same plane as the first magnetic conductor (1D), a first magnetic induction unit (2Ya), and second magnetic induction units (2X, 2Xa, 2Xb, 2Xc, 2Xd). The first magnetic conductor (1D) has a first air gap in a second direction. The second magnetic conductor (2D) includes: magnetic field input regions (1A, 1B, 1Ax, 1Bx, 1Axa, 1Axb, 1Bxa, 1Bxb) located in the second direction and at two ends of the second magnetic conductor (2D) and magnetic field conversion regions (1Ca, 1Cb, 1Cc, 1Cd, 1Ce, 1Cf, 1Cg, 1Ch, 1Ea, 1Eb, 1Ec, 1Ed, 1Ee, 1Ef) located between the two ends of the second magnetic conductor (2D), in which the magnetic field conversion regions (1Ca, 1Cb, 1Cc, 1Cd, 1Ce, 1Cf, 1Cg, 1Ch, 1Ea, 1Eb, 1Ec, 1Ed, 1Ee, 1Ef) include a conversion magnetic circuit in the first direction, and the conversion magnetic circuit has a second air gap in the second direction. The projection of the first magnetic induction unit (2Ya) on the plane is located in a first air gap region. The projections of the second magnetic induction units (2X, 2Xa, 2Xb, 2Xc, 2Xd) on the plane are located in a second air gap region. The multi-axis magnetic field sensor can measure the magnetic flux intensity in the first direction and the second direction by means of the first magnetic induction unit (2Ya) and the second magnetic induction units (2X, 2Xa, 2Xb, 2Xc, 2Xd) having the same magnetic induction sensitivity direction, without rotating the magnetic induction units.
Owner:MULTIDIMENSION TECH CO LTD

Single-beam miniaturized three-axis serf atomic magnetometer

A single-beam miniaturized three-axis SERF atomic magnetometer, through a compact and reasonable internal optical path design, the incident light introduced by a single light source is divided into two mutually perpendicular and spatially separated pump lights through the designed combined polarization beam splitter prism, and then acts on different atomic ensembles through the same alkali metal cell, which can effectively improve the crosstalk problem of three-axis magnetic field simultaneous measurement, has the characteristics of low cost, high space utilization, high reliability, high stability, easy miniaturization and the like, characterized by comprising Y-axis circularly polarized pump light passing through the alkali metal cell along the Y-axis in the positive direction and Z-axis circularly polarized pump light passing through the alkali metal cell along the Z-axis in the negative direction, the Y-axis circularly polarized pump light and the Z-axis circularly polarized pump light are in a spatially separated state in the alkali metal cell.
Owner:BEIHANG UNIV

Magnetic field detection apparatus

PendingUS20260147067A1Magnetic field offset compensationMagnetic measurement environmental aspectsMechanical engineeringAtomic physics
The present application discloses a magnetic field detection apparatus, comprising: a detection module configured to generate a magnetic field detection signal; and a calibration module configured to generate a reference signal. The reference signal is used to calibrate the magnetic field detection signal, and the reference signal is independent of a uniform ambient magnetic field. When a value of the reference signal satisfies a first relationship with a first preset value, the magnetic field detection signal is amplified; or, when a value of the reference signal satisfies a second relationship with a second preset value, the magnetic field detection signal is attenuated. The magnetic field detection apparatus provided by the present application enables calibration of the magnetic field detection signal at a numerical level to eliminate linear errors, thereby avoiding issues such as detection range contraction caused by power consumption constraints.
Owner:SUZHOU NOVOSENSE MICROELECTRONICS CO LTD

Light detection element, receiving device, and light sensor device

ActiveUS12641914B2Substrate/intermediate layersSpin-exchange-coupled multilayersLight irradiationFacula
A light detection element includes: a plurality of magnetic elements, wherein each of the magnetic elements includes a first ferromagnetic layer that is irradiated with light and a second ferromagnetic layer and a spacer layer sandwiched between the first ferromagnetic layer and the second ferromagnetic layer, and wherein at least two of the magnetic elements are arranged to be inside a spot of the light applied to the first ferromagnetic layers of the at least two of the magnetic elements.
Owner:TDK CORP

Wireless charger and method of charging an electronic device

ActiveUS12658740B2Batteries circuit arrangementsMagnetic field offset compensation
A method for charging an electronic device and a wireless charger having a set of transmitter coils and a plurality of magnetic field sensors are disclosed. The method may comprise measuring magnetic fields in a predetermined charging region, detecting a change in the magnetic fields, and selecting the subset of the transmitter coils associated with the one of the magnetic field sensors. The method may further comprise energising each transmitter coil in the subset of the transmitter coils to transmit a predetermined maximum power output, selecting one transmitter coil from the subset of the transmitter coils, determining a first power output of said one transmitter coil, and energising said one transmitter coil to transmit at the first power output.
Owner:NOA THE BRAND PTY LTD

Device for performing a work operation

PendingEP4726332A3Welding/cutting auxillary devicesWelding monitoring devices
The invention relates to a device for carrying out a work operation, in particular a welding device, comprising: at least one actuator that performs the work operation; a magnetic field source attached to the actuator; at least one magnetic field sensor for detecting the position of the actuator, wherein the magnetic field sensor is configured to detect a first magnetic field strength in a first direction and a second magnetic field strength in a second direction perpendicular to the first direction;and a control and evaluation unit connected to the magnetic field sensor and configured to identify, based on a comparison metric relating the detected first magnetic field strength to the detected second magnetic field strength, whether the magnetic field detected by the magnetic field sensor is a magnetic field substantially generated by the magnetic field source, and, if this is the case, to determine the position of the actuator based on the detected first magnetic field strength and / or the detected second magnetic field strength, and to issue a control instruction based on the determined position of the actuator.
Owner:SICK AG

Determining positioning by measuring an oscillating magnetic field produced by non-orthogonal generators

PendingEP4754549A1Beacon systems using radio wavesElectric/magnetic position measurements
The invention relates to a method for determining at least one component of the positioning of a receiver (24) relative to a transmitter (22), the transmitter (22) comprising at least two magnetic generators (30, 32, 34), the method comprising the following steps: - measuring a resulting magnetic field; - demodulating the measurement signal so as to determine a plurality of candidate measurements; - applying, to each candidate measurement, a correction that aims to compensate for a directional orthogonality defect in the magnetic generators (30, 32, 34) so as to obtain a corresponding corrected measurement; - calculating a value representative of the likelihood that this candidate measurement reflects the actual contributions of each alternating magnetic field; - selecting a selected measurement corresponding to the highest likelihood; and - determining the at least one component of the positioning of the receiver (24).
Owner:SYSNAV +5

Magnetic sensor device

PendingCN122109945ASingle device manufacturingThree-component magnetometersComputer hardwareGeneration process
A magnetic sensor device includes a first detection circuit, a second detection circuit, and a processor. The processor is configured to execute a first generation process of generating a first initial detection value, a second generation process of generating a second initial detection value, a first correction process, a second correction process, and a determination process. The first correction process is a process of correcting and updating the first initial detection value. The second correction process is a process of correcting and updating the second initial detection value. The processor executes the determination process after alternately executing the first correction process and the second correction process.
Owner:TDK CORP

sensor

PendingCN122238962AElectrical measurementsThree-component magnetometers
The magnetic sensor includes a first insulating layer and a second insulating layer, a metal layer disposed on the side of the first insulating layer opposite to the second insulating layer, and a sensor element. The functional layer of the sensor element is disposed on the side opposite to the first insulating layer, with reference to the second insulating layer. The second insulating layer has protrusions with inclined surfaces and flat portions. The first insulating layer contains a first insulating material. The second insulating layer contains a second insulating material. The breaking toughness of the second insulating material is greater than that of the metal layer.
Owner:TDK CORP

Characterizing and mapping of a magnetic field of a medical device

PendingUS20260147069A1Magnetic field offset compensationMagnetic gradient measurementsMagnetic sourceMedical device
A method of representing a magnetic field of a magnetic source of a medical device with a computer model of the magnetic field, comprising acquiring, for a plurality of locations, an amplitude value of the magnetic field and corresponding positional coordinates of each of the locations; acquiring a theoretical three-dimensional model of the magnetic field; estimating errors of amplitude between the default values of the theoretical three-dimensional model and the corresponding amplitude values of the plurality of magnetic field measurement entries based on the positional coordinates of the plurality of magnetic field measurement entries; and adjusting default values of the theoretical three-dimensional model based on the estimated errors, resulting in a real-world three-dimensional magnetic field model of the magnetic field of the magnetic source of the medical device from the theoretical three-dimensional model with adjusted amplitude values.
Owner:STARPAX BIOPHARMA INC

Method and apparatus for calibrating capacitive stylus mode, capacitive stylus, and storage medium

A method for calibrating a capacitive stylus mode includes: respectively obtaining a first magnetic field strength, a second magnetic field strength, a third magnetic field strength and a fourth magnetic field strength; respectively calculating, based on the magnetic field strength, a first angle value and a second angle value of the 3D Hall switch when the stylus cap is rotated to the first switch position and the second switch position; obtaining a first threshold angle and a second threshold angle; updating an angle range of the first mode, an angle range of the second mode and an angle range of the third mode.
Owner:MAXEYE SMART TECH CO LTD

sensor

ActiveCN115856730BMagnetic field offset compensationMagnetic sensor packagingCondensed matter physicsMaterials science
A magnetic sensor includes an insulating layer, a first MR element, and a second MR element. The insulating layer includes a first layer and a second layer, and has first and second inclined surfaces formed through the first and second layers. The first and second MR elements each include a magnetization fixed layer and a free layer. The magnetization fixed layer and the free layer of the first MR element are disposed on the first inclined surface. The magnetization fixed layer and the free layer of the second MR element are disposed on the second inclined surface.
Owner:TDK CORP

Spacecraft magnetic test sensor layout method and system based on near-field analysis method

ActiveCN116224177BMagnetic property measurementsMagnetic sensor geometrical arrangements
The application provides a spacecraft magnetic test sensor layout method and system based on a near-field analysis method, and comprises the following steps: a layout mode selection step: selecting a magnetic sensor layout mode based on a near-field analysis method according to actual requirements; and a magnetic sensor layout step: performing magnetic sensor layout according to the selected magnetic sensor layout mode. The "several special spacecraft magnetic test sensor layout modes in the near-field analysis method" can be applied to the magnetic moment test of seven unconventional spacecrafts, and is helpful to improve the magnetic test error factors and precision evaluation technology of similar unconventional spacecrafts.
Owner:SHANGHAI INST OF SATELLITE EQUIP

Installation tracking by measuring a perturbed oscillating magnetic field

PendingFR3169581A1Electrodynamic magnetometersElectric/magnetic detection
This method for tracking the pose of a receiver (24) relative to a transmitter (22) comprises obtaining a raw magnetic measurement, estimating the contribution of a disturbing element (90) to the raw magnetic measurement, calculating a refined magnetic measurement by subtracting the contribution of the disturbing element (90) from the raw magnetic measurement, and deducing a refined pose of the receiver (24) relative to the transmitter (22) from the refined magnetic measurement. The contribution of the disturbing element (90) is estimated from secondary current densities of eddy currents induced by the transmitter (22) in the disturbing element (90), said secondary current densities resulting from an interpolation of primary current density components of said eddy currents along different directions and at different points on a surface (94) of the disturbing element (90). Figure for the abstract: Fig. 1
Owner:SYSNAV

Pose tracking by measuring a perturbed oscillating magnetic field

PCT designated stageWO2026124907A1Electrodynamic magnetometersElectric/magnetic detection
The invention relates to a method for tracking the pose of a receiver (24) relative to a transmitter (22), the method comprising obtaining a raw magnetic measurement, estimating a contribution of a perturbing element (90) to the raw magnetic measurement, calculating a refined magnetic measurement by subtracting the contribution of the perturbing element (90) from the raw magnetic measurement, and inferring a refined pose of the receiver (24) relative to the transmitter (22) from the refined magnetic measurement. The contribution of the perturbing element (90) is estimated from secondary current densities of eddy currents induced by the transmitter (22) in the perturbing element (90), the secondary current densities resulting from an interpolation of primary-current-density components of the eddy currents along different directions and at different points on a surface (94) of the perturbing element (90).
Owner:SYSNAV

magnetic sensor

PendingCN122109944ASingle device manufacturingMagnetic sensor arraysMechanical engineeringCondensed matter physics
A magnetic sensor according to the present application includes a substrate having a reference plane, a support member disposed on the substrate and having at least one inclined surface inclined with respect to the reference plane, at least one magnetic detection element disposed on the at least one inclined surface, and an insulating portion composed of an insulating material disposed on a portion of the at least one magnetic detection element.
Owner:TDK CORP

Z-axis magnetic field sensor and processing method therefor

PendingEP4756468A1Magnetic field offset compensationMagnetic field measurement using galvano-magnetic devices
The present application provides a Z-axis magnetic field sensor and a processing method therefor, which relates to the technical field of magnetic field measurement. The sensor comprises a substrate, a magnetic flux conversion module, a magnetic induction module, and an output module; a soft magnetic metal material having a high magnetic permeability that forms the magnetic flux conversion module is located in a groove formed by etching in the substrate or located above the substrate, and the magnetic flux conversion module comprises a first magnetic flux conversion unit and a second magnetic flux conversion unit; the first magnetic flux conversion unit and the second magnetic flux conversion unit comprise soft magnetic metal materials spaced apart from each other, which concentrate and amplify a magnetic field to be measured in the Z-axis direction, and then convert the magnetic field direction, thus generating an X-axis magnetic field component. The magnetic induction module senses the magnetic field of the magnetic flux conversion module and generates a differential voltage signal, and by means of the output module, an output signal of the magnetic field to be measured is formed. The Z-axis magnetic field sensor and processing method provided in the present application have the characteristics of high magnetic field conversion efficiency, a uniform magnetic field distribution, high sensitivity, good stability, low noise, and availability single-chip and small-size manufacturing.
Owner:MULTIDIMENSION TECH CO LTD

Battery diagnosis device and operating method thereof

A battery diagnosis device according to an embodiment disclosed in this document may include an interface configured to acquire a magnetic field image of a battery cell and one or more processors configured to generate magnetic field linear data corresponding to a magnetic field intensity at a specific location of the battery cell based on the magnetic field image and diagnose an abnormality of the battery cell based on the magnetic field linear data.
Owner:LG ENERGY SOLUTION LTD

Multi-axis magnetic field sensor and multi-axis magnetic field sensor chip

PendingEP4756469A1Magnetic field offset compensationMagnetic field measurement using galvano-magnetic devices
A multi-axis magnetic field sensor and a multi-axis magnetic field sensor chip. The multi-axis magnetic field sensor comprises: a first magnetizer (2z1), which is arranged on a first substrate (1a); a second magnetizer (2z3), which is arranged on a passivation layer (1c) or a second substrate (1b); a first air gap, which is formed on the basis of the first magnetizer (2z1) and the second magnetizer (2z3); a third magnetizer (2x1), which has a second air gap and is arranged on the substrate (1a or 1b) or the passivation layer (1c); a fourth magnetizer (2y1), which has a third air gap and is arranged on the substrate (1a or 1b) or the passivation layer (1c); and at least three magnetic induction units (at least one of 2x2a and 2x2c, at least one of 2y2a and 2y2b, and at least one of 2z2a, 2z2b, 2x2c, and 2z2d), which are respectively located in corresponding air gap regions, wherein the magnetic induction units in the passivation layer (1c) have the same magnetic induction sensitivity direction. Magnetic induction units in the same passivation layer of the multi-axis magnetic field sensor have the same magnetic induction sensitivity direction, such that the single-chip manufacturing of the multi-axis magnetic field sensor can be realized, and the manufactured multi-axis magnetic field sensor achieves better stability and higher precision.
Owner:MULTIDIMENSION TECH CO LTD