An integrated low-power consumption tri-axial magnetic field sensor with high Z-direction resolving force

Abstract

The invention provides an integrated low-power consumption tri-axial magnetic field sensor with high Z-direction resolving force. The integrated low-power consumption tri-axial magnetic field sensor comprises an insulation substrate, an orbit transfer soft magnetic block and four magnetic measuring units. The four magnetic measuring units are arranged on the surface of the insulation substrate incentral symmetry; the orbit transfer soft magnetic block is placed on the four magnetic measuring units in central symmetry with respect to the center points of the four magnetic measuring units; onepart of each magnetic measuring unit is located right under the orbit transfer soft magnetic block. In order to solve the problem of insufficient Z-direction resolving force and low compensation efficiency in the prior art, the orbit transfer soft magnetic block and the four centrally-symmetrical magnetic measuring units achieve high-efficiency orbit transfer of Z-direction magnetic fields, gathering, amplification and planar measurement of tri-axial magnetic fields can be achieved, the tri-axial orthogonality and the Z-direction magnetic field resolving force are effectively improved, and high-resolving force measuring for weak tri-axial magnetic field signals and high efficiency compensation for hysteresis can be achieved. The integrated low-power consumption tri-axial magnetic field sensor has the advantages of low energy consumption and low cost.

Description

technical field [0001] The invention relates to weak magnetic signal detection technology, in particular to an integrated low power consumption three-axis magnetic field sensor with high Z-direction resolution. Background technique [0002] The three-axis magnetic sensor can directly obtain the three-component information of the magnetic field, and is widely used in military and national economic fields such as target detection, geomagnetic navigation, geological exploration, and biomedicine. At the same time, with the continuous improvement of the requirements for weak magnetic field detection and miniaturization of the carrying platform, the magnetic sensor technology presents a development trend of high resolution, small size, and low power consumption. [0003] With the development of micro-electromechanical systems (MEMS) technology, the integrated three-axis magnetic sensor manufactured by MEMS technology has shown great advantages in terms of volume, weight, power con...

AI Technical Summary

Problems solved by technology

[0008] The technical problem to be solved by the present invention: Aiming at the problems of insufficient Z-direction resolution and low compensation efficiency in the existing solutions, a method is provided to realize the high Z-direction magnetic field by using track-changing soft magnetic blocks and four centrally symmetrical magnetic measurement units. Efficiency change track can realize the aggregation amplification and planar measurement of the three-axis magnetic field, which effectively improves the three-axis orthogonality and the resolution of the Z-direction magnetic field, and can realize high-resolution measurement of weak three-axis magnetic field signals, high-efficiency hysteresis compensation, Integrated low-power three-axis magnetic field sensor with low energy consumption and low cost and high Z-direction resolution

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