MEMS magnetic field sensor of folded beam structure and preparation method

A magnetic field sensor and beam structure technology, applied in the direction of the size/direction of the magnetic field, instruments, measuring magnetic variables, etc., can solve the problems of low sensitivity, complex manufacturing process, poor stability, etc., and achieve the effect of high applicability and high sensitivity

Active Publication Date: 2017-10-20
HEFEI UNIV OF TECH
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AI Technical Summary

Problems solved by technology

[0006] The object of the present invention is to provide a new MEMS magnetic field sensor structure for the defects of complex manufacturing process, poor stability, and low sensitivity existing in the existing magnetic field sensors, so as to realize high resolution, low power consumption, high sensitivity, and long life. Magnetic field sensor

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  • MEMS magnetic field sensor of folded beam structure and preparation method
  • MEMS magnetic field sensor of folded beam structure and preparation method
  • MEMS magnetic field sensor of folded beam structure and preparation method

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Embodiment Construction

[0049] The structural features and technical details of the present invention will now be described in detail in conjunction with the accompanying drawings.

[0050] see figure 1 , 3 And 4, a kind of MEMS magnetic field sensor of folded beam structure, is made up of folded beam structure and substrate; The electrodes of the beam structure and the electrodes on the substrate form a variable capacitance; an insulating layer is provided on the upper surface of the folded beam structure, and a metal coil is provided on the insulating layer; after the current is passed through the metal coil, it is subjected to Lorentz in the magnetic field. The force makes the folded beam structure bend and deform, thereby changing the electrode spacing between the folded beam structure and the substrate, and realizing the change of the capacitance value; the capacitance change trend at both ends of the folded beam structure is opposite, forming a differential capacitance; the magnetic field is o...

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Abstract

The invention relates to an MEMS magnetic field sensor of a folded beam structure and a preparation method. The sensor includes a metal T-shaped folded beam processed on a substrate and fixed in the center. An electrode formed by the folded beam and an electrode on the substrate form a variable capacitor. The principle of the MEMS magnetic field sensor of the folded beam structure is that a metal coil processed on the T-shaped folded beam structure is subjected to lorentz force after current is introduced, thus the beam bends and deforms, thereby changing an interval of the two electrodes, and realizing change of a capacitance value. The magnitude of a magnetic field can be measured through detection of capacitance variation. The folded beam structure can realize effective support for a movable polar plate, and provide a smaller equivalent elastic coefficient compared with a traditional structure, and compared with a traditional torsion beam structure, various residual stress in a sensor processing process can be reduced, sensitivity of the sensor can be improved, and power consumption can be reduced. Since the T-shaped folded beam structure of the sensor can achieve a function of releasing stress, the service life of the sensor is prolonged.

Description

technical field [0001] The invention relates to a structure and a manufacturing method of a torsional high-sensitivity MEMS magnetic field sensor, and the invention belongs to the fields of MEMS sensors and micro-nano processing. Background technique [0002] Magnetic field sensor is one of many sensors. Magnetic field sensors play an important role in the fields of physics, machinery and military affairs. The magnetic field sensor is placed in the magnetic field, and the sensor can identify the direction and strength of the magnetic field. When combined with permanent magnets, non-contact measurement of changes in current, speed, angle, etc. can be realized; magnetic field sensors can be used in industrial production for real-time detection and control of the manufacturing process; at the same time, in the development of mineral resources and medical electronics It is also widely used in other fields. [0003] MEMS magnetic field sensor is a new type of magnetic field se...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R33/02
CPCG01R33/0286
Inventor 张鉴徐雪祥戚昊琛徐冬雨王建吴宗泽
Owner HEFEI UNIV OF TECH
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