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Micro electro-mechanical system magnetic field sensor and measuring method

A magnetic field sensor, micro-electromechanical system technology, applied in the size/direction of the magnetic field, components of TV systems, piezoelectric/electrostrictive/magnetostrictive devices, etc. The resonator has problems such as high power consumption and low sensitivity, so as to achieve the effect of small temperature influence, high precision, high sensitivity and high precision

Inactive Publication Date: 2008-12-10
SOUTHEAST UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Vincent Beroulle of France proposed a magnetic field sensor with a cantilever beam structure [1] , the piezoresistive effect is used to measure the deformation of the cantilever beam due to the magnetic field force, but the piezoresistive effect is greatly affected by the temperature
Another MEMS magnetic field sensor with comb structure [2] , this structure is more convenient to measure, but the structure is complicated, the manufacturing process is high, and the power consumption required to make the comb resonator move is relatively large, and the sensitivity is not very high.

Method used

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Embodiment 1

[0032] A micro-electromechanical system magnetic field sensor, including a substrate 4, and also includes an E-shaped cantilever beam 3 and an induced metal wire 2. The E-shaped cantilever beam 3 is arranged on the substrate 4 in parallel, and the induced metal wire 2 is arranged on the E-shaped cantilever beam. on the cantilever beam 3, and can move synchronously with the E-shaped cantilever beam 3. In this embodiment, the induction metal wire 2 can be plated on the upper surface of the E-shaped cantilever beam 3 by evaporation or electroplating, and the metal wire can also be arranged on the above-mentioned position by sputtering. When the electrostatic excitation method is used to vibrate the cantilever beam, an insulating layer needs to be provided between the induction metal wire 2 and the E-shaped cantilever beam 3, and an electrode corresponding to the E-shaped cantilever beam 3 needs to be set on the substrate, so that there is Conducive to adding electrostatic load. ...

Embodiment 2

[0035] A method of measuring using the MEMS magnetic field sensor described in Embodiment 1. First, an external excitation is applied to cause the E-shaped cantilever beam 3 to vibrate, and the induction metal wire 2 that moves synchronously with the E-shaped cantilever beam 3 moves to cut the magnetic force line and sense The strength of the ambient magnetic field can be obtained by generating an induced voltage and then measuring the induced voltage.

[0036] The external excitation can be an external excitation source such as piezoelectric ceramics to make it vibrate; another scheme is: the E-type cantilever 3 is insulated from the substrate 4, and the substrate 4 is correspondingly provided with an E-type cantilever The electrodes parallel to the beam 3, the method of external excitation is: add an AC voltage signal between the E-shaped cantilever beam 3 and the electrodes to make it vibrate, that is, apply electrostatic force to it to vibrate, and apply electrostatic force...

Embodiment 3

[0039] The invention is a MEMS magnetic field sensor for measuring magnetic field, which is composed of a measuring anchor area 1, an induction metal wire 2, an E-shaped cantilever beam 3 and a substrate 4. The sensor takes the substrate 4 as the plane, on the substrate 4 is provided with a sensor structure composed of the induction metal wire 2, the E-shaped cantilever beam 3, and the anchor area 1, which is symmetrical to the center line from left to right, and the induction metal wire 2 can follow the The vibration of the E-shaped cantilever beam 3 moves.

[0040] The induction metal line 2 can be made of Al, Au, etc., and the induction metal line 2 and the measurement anchor area 1 are obtained by etching. The value of the voltage is measured on the induction metal wire 2, and the change of the voltage depends on the magnitude of the magnetic field and the velocity of the cutting magnetic force line of the induction metal wire. The speed can be measured, so the information...

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Abstract

A micro-electro-mechanical system magnetic field sensor and a measuring method relates to a magnetic field sensor and a measuring method, which have low energy consumption, simple structure, quick response and high reliability. The sensor is composed of an anchor area (1), induced metal wires (2), an E-type cantilever beam (3) and a substrate (4); wherein, the E-type cantilever beam is actuated by the static or driven by the Lorentz force, and is forced to generate the vibration; the cantilever beam generates the resonance under the action of a certain frequency; the induced metal wires (2) which are plated on the E-type cantilever beam (3) can move along with the vibration of the E-type cantilever beam (3). The induced metal wires (2) make the movement of cutting the magnetic lines of force in the magnetic field; thus induced voltage can be induced in the metal wires; the induced voltage in the induced metal wires (3) are measured to achieve the purpose of measuring the magnetic field.

Description

technical field [0001] The present invention relates to a magnetic field sensor and a preparation method thereof, in particular to a microelectromechanical system magnetic field sensor and a measurement method thereof. Specifically, the E-beam structure magnetic field sensor adopts a process compatible with CMOS (Complementary Metal-oxide Semiconductor) , can realize the monolithic integration of excitation and detection circuits, and its principle is to detect the magnetic field strength based on the induced voltage. Background technique [0002] The magnetic field sensor senses the existence and strength of a magnetic field, and is a widely used sensor. The application of magnetic field sensors has a long history. From the compass, one of China's four great inventions, to electronic navigators, security systems, and medical instruments for precise positioning, they have been widely used in all aspects of life. [0003] The development of MEMS (Micro-Electro-Mechanical Sys...

Claims

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Application Information

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IPC IPC(8): G01R33/02B81B7/02B81C1/00
Inventor 陈洁黄庆安秦明赵桂林
Owner SOUTHEAST UNIV
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