Equilateral polygon discal MEMS resonant gyro

A regular polygon and resonant gyro technology, which is applied in the direction of gyro effect for speed measurement, gyroscope/steering sensing equipment, and measuring devices, can solve problems such as symmetry errors, improve sensitivity, increase detection capacitance, and improve structure. The effect of symmetry

Active Publication Date: 2018-10-02
SUZHOU WENZHIXIN MICRO SYST TECH
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  • Abstract
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Problems solved by technology

Therefore, for a central axisymmetric structure, this kind of cir

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  • Equilateral polygon discal MEMS resonant gyro
  • Equilateral polygon discal MEMS resonant gyro
  • Equilateral polygon discal MEMS resonant gyro

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Embodiment

[0035] The MEMS resonant gyroscope with regular polygonal disk shape of the present invention can have regular polygonal disk shape with 16 sides, 32 sides, 64 sides, and so on. Usually adopts regular hexagonal disk structure, such as figure 1 shown. Or a regular thirty-two-sided disc structure, such as figure 2 shown. The sensitive structure includes multiple harmonic oscillators and fixed anchor points 3, and the harmonic oscillators are made of a flexible frame. The flexible frame is composed of multiple concentric regular polygon resonant rings 1 and spokes 2 . The center of the concentric regular polygon resonant ring 1 coincides with the center of the fixed anchor point 3 . The spacing between adjacent concentric regular polygonal resonant rings 1 is the same, a plurality of concentric regular polygonal resonant rings 1 are radially distributed with the center of the fixed anchor point 3 as the center, and adjacent concentric regular polygonal resonant rings 1 and s...

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Abstract

The invention discloses an equilateral polygon discal MEMS resonant gyro which comprises a sensitive structure, wherein the sensitive structure includes a harmonic oscillator, fixed anchor points forfixing the entire harmonic oscillator are arranged in the center of the harmonic oscillator, the harmonic oscillator takes the shape of an equilateral polygon disc which is in axial symmetry entirely,the harmonic oscillator includes a plurality of concentric equilateral polygon resonant rings, the concentric equilateral polygon resonant rings are connected through spokes, the fixed anchor pointsare connected with adjacent concentric equilateral polygon resonant rings through the spokes, the plurality of concentric equilateral polygon resonant rings are radially distributed by taking centersof the fixed anchor points as centers, grooves are formed between adjacent equilateral polygon resonant rings and spokes, and electrodes are arranged in the grooves. The equilateral polygon structuresare entirely in line connection without arc line, thereby having a small edge error effect and a relatively smaller symmetry error. Therefore, the resonant frequency of two operating modes are smallin splitting.

Description

technical field [0001] The invention relates to a micro-electromechanical gyroscope, in particular to a regular polygonal disk-shaped MEMS resonant gyroscope. Background technique [0002] The gyroscope is a sensor that measures the rotational motion of the carrier relative to the inertial space, and is the core device in the fields of motion measurement, inertial navigation, guidance and control, etc. MEMS gyroscopes based on micro-electromechanical system technology have the characteristics of pure solid state, small size, low power consumption, long life, low cost, and easy integration. They have inherent advantages in large-volume, small-volume industrial and weaponry applications. [0003] MEMS vibrating gyroscopes based on the Coriolis effect are divided into two categories, one is the degenerate mode vibrating gyroscope, whose driving mode is the same as the detection mode, and the other is the orthogonal mode vibrating gyroscope, whose driving mode is the same as tha...

Claims

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Application Information

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IPC IPC(8): G01C19/5684
CPCG01C19/5684
Inventor 郭述文周铭
Owner SUZHOU WENZHIXIN MICRO SYST TECH
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