Regular polygonal disc mems resonant gyroscope

A technology of regular polygon and resonant gyro, which is applied in the direction of gyro effect for speed measurement, gyroscope/steering sensing equipment, instruments, etc., can solve problems such as symmetry errors, improve sensitivity, improve gyro accuracy, and improve structural asymmetry Effect

Active Publication Date: 2022-02-22
SUZHOU WENZHIXIN MICRO SYST TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, for a central axisymmetric structure, this kind of circular arc with many jagged shapes may produce some symmetry errors

Method used

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  • Regular polygonal disc mems resonant gyroscope
  • Regular polygonal disc mems resonant gyroscope
  • Regular polygonal disc mems resonant gyroscope

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Embodiment

[0035] The MEMS resonant gyroscope with regular polygonal disk shape of the present invention can have regular polygonal disk shape with 16 sides, 32 sides, 64 sides, and so on. Usually adopts regular hexagonal disk structure, such as figure 1 shown. Or a regular thirty-two-sided disc structure, such as figure 2 shown. The sensitive structure includes multiple harmonic oscillators and fixed anchor points 3, and the harmonic oscillators are made of a flexible frame. The flexible frame is composed of multiple concentric regular polygon resonant rings 1 and spokes 2 . The center of the concentric regular polygon resonant ring 1 coincides with the center of the fixed anchor point 3 . The spacing between adjacent concentric regular polygonal resonant rings 1 is the same, a plurality of concentric regular polygonal resonant rings 1 are radially distributed with the center of the fixed anchor point 3 as the center, and adjacent concentric regular polygonal resonant rings 1 and ...

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Abstract

The invention discloses a regular polygonal disc-shaped MEMS resonant gyroscope, which includes a sensitive structure, the sensitive structure includes a harmonic oscillator, the center of the harmonic oscillator is provided with a fixed anchor point for fixing the entire harmonic oscillator, and the harmonic oscillator is a whole It is an axisymmetric regular polygonal disk, the resonator includes a plurality of concentric regular polygonal resonant rings, the concentric regular polygonal resonant rings are connected by spokes, and the fixed anchor point is connected to the adjacent concentric regular polygonal resonant rings through the spokes The plurality of concentric regular polygonal resonant rings are radially distributed with the center of the fixed anchor point as the center, and grooves are formed between adjacent regular polygonal resonant rings and spokes, and electrodes are arranged in the grooves. The regular polygonal structures are all connected by straight lines without circular arcs. Therefore, the edge error effect is small, and the symmetry error is relatively small, so the splitting of the resonance frequency of the two working modes is small.

Description

technical field [0001] The invention relates to a micro-electromechanical gyroscope, in particular to a regular polygonal disk-shaped MEMS resonant gyroscope. Background technique [0002] The gyroscope is a sensor that measures the rotational motion of the carrier relative to the inertial space, and is the core device in the fields of motion measurement, inertial navigation, guidance and control, etc. MEMS gyroscopes based on micro-electromechanical system technology have the characteristics of pure solid state, small size, low power consumption, long life, low cost, and easy integration. They have inherent advantages in large-volume, small-volume industrial and weaponry applications. [0003] MEMS vibrating gyroscopes based on the Coriolis effect are divided into two categories, one is the degenerate mode vibrating gyroscope, whose driving mode is the same as the detection mode, and the other is the orthogonal mode vibrating gyroscope, whose driving mode is the same as tha...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01C19/5684
CPCG01C19/5684
Inventor 郭述文周铭
Owner SUZHOU WENZHIXIN MICRO SYST TECH
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