The invention provides a
silicon micro-resonant mode
pressure sensor based on a
differential motion structure with a
coupling beam, relating to a sensor. The
silicon micro-resonant mode
pressure sensor is provided with a
harmonic oscillator, a rectangular
silicon island, a rectangular
pressure sensitive diaphragm, a silicon frame and a lower layer of glass, wherein the
harmonic oscillator is provided with supporting beams, the
coupling beam, a movable comb exciting
electrode, a movable comb detection
electrode, a fixed comb exciting
electrode, a fixed comb detection electrode and a vibration
mass block; the rectangular
pressure sensitive diaphragm is fixed in the silicon frame; the rectangular silicon island is arranged at the position where the stress
deflection angle of the rectangular
pressure sensitive diaphragm is maximum; the
harmonic oscillator is suspended on the surface of the rectangular pressure sensitive diaphragm by the rectangular silicon island through the supporting beams and the supporting beams are connected with the rectangular silicon island; a lead wire electrode is connected with the
harmonic oscillator through a flexible beam; the supporting beams are arranged at four corners of the
harmonic oscillator; the vibration
mass block is connected with the rectangular silicon island and a mechanical
coupling beam arranged at the middle part of the
harmonic oscillator is used for connecting the vibration
mass block; the vibration mass block and the
coupling beam are both in suspended states and the vibration mass block is provided with a hole; and the lower layer of glass is arranged at the bottom of the silicon frame.