Nested annular MEMS oscillation gyro with period distribution type concentrated mass blocks

Abstract

The invention provides a nested annular MEMS oscillation gyro with period distribution type concentrated mass blocks. The gyro comprises a nested annular harmonic oscillator with the period distribution type concentrated mass blocks, and an electrode which is arranged inside/outside the nested annular harmonic oscillator; the nested annular harmonic oscillator comprises a nested annular flexible frame, the mass blocks arranged on the nested annular flexible frame, and anchors for fixing the oscillator; the whole harmonic oscillator is fixedly anchored with a base by the anchor on the center of the harmonic oscillator; the nested annular flexible frame comprises nested rings and spoke-shaped supporting beams; the mass blocks can be additionally arranged on the nested annular flexible frame in a plurality of kinds of manners; and the electrode can be arranged inside/outside the harmonic oscillator, or the electrodes are arranged inside and outside the harmonic oscillator. The gyro has the relatively high thermo-elastic property Q value, relatively large resonance oscillation mass, and relatively large driving amplitude; and as the design of the internal electrode is adopted or the design of the internal and external electrodes is adopted, the gyro also has the advantages that the capacitance detection area is large, the number of detection and control electrodes is large and the like.

Description

technical field [0001] The invention relates to a microelectromechanical gyroscope, and in particular to a MEMS vibrating gyroscope. Background technique [0002] The gyroscope is a sensor that measures the rotational motion of the carrier relative to the inertial space. It is the core device in the fields of motion measurement, inertial navigation, guidance and control, etc. It plays a very important role in high-end industrial equipment and precision strike weapons such as aerospace, intelligent robots, and guided munitions. Value. Traditional gyroscopes include mechanical rotor gyroscopes, electrostatic gyroscopes, hemispherical resonant gyroscopes, laser gyroscopes, fiber optic gyroscopes, dynamic tuning gyroscopes, etc. Although they have high precision, they are difficult to meet the requirements in terms of size, power consumption, and price. MEMS gyroscopes based on micro-electromechanical system technology have the characteristics of small size, low power consumpti...

AI Technical Summary

Problems solved by technology

Although the structure has a high Q value and a large resonant mass, the small driving amplitude limits the improvement of its performance

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