MEMS gyroscope

Abstract

The invention provides an MEMS gyroscope which comprises an annular structure, a first coupling structure connected to the annular structure, mass blocks connected to the first coupling structure, anchor points connected with the mass blocks, second coupling structures connected between the adjacent mass blocks and transduction assemblies connected to the annular structure and the mass blocks. The MEMS gyroscope comprises 4N mass blocks arranged around the center of the annular structure at equal angles, N is an integer larger than or equal to 2, each mass block comprises a main body connected with the first coupling structure and provided with a containing groove and an elastic structure connected to the main body and located in the containing groove, and the anchor points are arranged in the containing grooves and connected with the elastic structures. According to the scheme, the area utilization rate of the chip region can be improved, the sensitivity is increased, the bias stability is improved, the detection performance is improved, and the mechanical noise is reduced.

Description

【Technical field】 [0001] The invention belongs to the technical field of gyroscopes, in particular to MEMS gyroscopes. 【Background technique】 [0002] Micro-mechanical gyroscopes, namely MEMS (Micro Electro Mechanical systems) gyroscopes, are a typical angular velocity microsensor. Due to their small size, low power consumption and convenient processing, they are widely used in the consumer electronics market. In recent years, with the gradual improvement of the performance of MEMS gyroscopes, they are widely used in automotive, industrial, virtual reality and other fields. [0003] MEMS gyroscopes can be divided into two types: linear vibration tuning fork gyroscopes and disk-shaped gyroscopes. Among them, the driving mode shape and detection mode shape of the disk-shaped gyroscope are degenerate, with high sensitivity and simple structure. Gradually become a more practical high-performance gyroscope. However, the disc-shaped gyroscope is limited in structure and space la...

AI Technical Summary

Problems solved by technology

However, the disc-shaped gyroscope is limited in structure and space layout, such as the patent of the traditional Disc gyroscope with the patent number US7581443B2, and referring to the attached Figure 4 In the normalized displacement map of the traditional Dsic gyro, some areas are not or less involved in vibration and sensitivity, and the chip area utilization rate is low, resulting in low sensitivity and low bias stability, which affects its detection performance

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