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30results about How to "Novel processing technology" patented technology

Internal-external double-electrode type miniature hemispherical resonance gyroscope and preparation method thereof

The invention provides an internal-external double-electrode type miniature hemispherical resonance gyroscope and a preparation method thereof. The internal-external double-electrode type miniature hemispherical resonance gyroscope comprises a single-crystal silicon substrate, a central fixed supporting column, a miniature hemispherical resonator, external electrodes, external-electrode metal welding plates, a glass substrate, metal leads, round welding wire discs, external-electrode metal connecting columns, internal electrodes and a seed layer. The internal-external double-electrode type miniature hemispherical resonance gyroscope and the preparation method provided by the invention have the beneficial effects that an MEMS bulk silicon processing process and a surface silicon processing process are combined for manufacture; different driving and detection modes and different working modes can be provided, and the working in a system needing complex control can be achieved; the internal electrodes and the external electrodes can be utilized for respectively carrying out driving and detection, the parasitic capacitance between a driving electrode and a detection electrode can be reduced and the detection accuracy can be improved; and the metal leads and the round welding wire discs are provided for the internal electrodes and the outer electrode so as to bring convenience for signal application and signal extraction.
Owner:SHANGHAI JIAO TONG UNIV

Piezoelectric driven and detected miniature hemispherical resonant gyroscope and manufacturing method thereof

The invention provides a piezoelectric driven and detected miniature hemispherical resonant gyroscope and a manufacturing method thereof. The gyroscope comprises a monocrystalline silicon base, a center-fixed supporting column, a miniature hemispherical resonator, a common electrode, eight film piezoelectrics and eight uniformly-distributed signal electrodes, wherein the monocrystalline silicon base and the miniature hemispherical resonator are connected through the center-fixed supporting column; the common electrode has the same shape as that of the miniature hemispherical resonator and is located between the miniature hemispherical resonator and the piezoelectrics; the piezoelectrics have the same shapes as those of the signal electrodes and are located between the common electrode and the signal electrodes. The miniature hemispherical resonator is excited to work by adopting a piezoelectric driven manner, and a drive mode and a detection mode are matched with each other. The gyroscope is manufactured by combining an MEMS (Micro-Electromechanical Systems) bulk silicon processing process and a surface silicon processing process. According to the piezoelectric driven and detected miniature hemispherical resonant gyroscope and the manufacturing method thereof, the miniature gyroscope is driven and detected by using the inverse piezoelectric effect and the piezoelectric effect, so that the gyroscope has the characteristics of high degree of integration, low power consumption, convenience in mass production, and the like.
Owner:SHANGHAI JIAO TONG UNIV

Double-hemisphere-structured miniature resonant gyroscope and manufacturing method thereof

The invention provides a double-hemisphere-structured miniature resonant gyroscope and a manufacturing method thereof. The gyroscope comprises a monocrystalline silicon base, sixteen uniformly-distributed electrodes, two symmetrical miniature hemispherical resonators and a center-fixed supporting column, wherein the upper and lower ends of the center-fixed supporting column are respectively connected with the two miniature hemispherical resonators, and eight electrodes are uniformly distributed around each miniature hemispherical resonator; the two miniature hemispherical resonators have the same central shaft, are independent of each other and do not affect each other. The two miniature hemispherical resonators are respectively excited to work by adopting an electrostatic driven manner, and a drive mode and a detection mode are respectively matched with each other. The gyroscope is manufactured by combining an MEMS (Micro-Electromechanical Systems) bulk silicon processing process and a surface silicon processing process. According to the double-hemisphere-structured miniature resonant gyroscope and the manufacturing method thereof, influence caused by factors, such as centrifugal force, centripetal force, common-mode noise, quadratic nonlinear terms and the like is reduced in a differential processing manner; performance indexes, such as high bandwidth, high resolution, high sensitivity, high dynamic range and the like, are simultaneously achieved on a single device.
Owner:SHANGHAI JIAO TONG UNIV

Phosphorous slag aerated concrete and preparation method thereof

The invention discloses a phosphorous slag aerated concrete. The concrete is characterized by consisting of a binding material, an exciting agent, an air entraining agent and water which are mixed, wherein the binding material consists of 60 to 100 weight percent of phosphorous slag and 0 to 40 weight percent of pulverized fuel ash; the exciting agent is water glass with modulus of 1.0 to 1.6; the water glass accounts for 5 to 8 weight percent of the binding material based on the weight of Na2O; the air entraining agent is aluminum powder or simple substance silicon; the using amount of the aluminum powder is 0.1 to 0.2 weight percent of the binding material; the using amount of the simple substance silicon is 0.05 to 0.1 weight percent of the binding material; and the weight ratio of theusing amount of the water to the using amount of the binding material is 0.28 to 0.32. The phosphorous slag aerated concrete product is prepared by taking the industrial waste slag such as the phosphorous slag and the like as the binding material and mixing the phosphorous slag, the exciting agent, the air entraining agent and the water. The phosphorous slag aerated concrete has the advantages that: the preparation process is simple without vapor-pressure process, so that the equipment investment can be greatly reduced; and the product is a sealed porous structure and has the characteristics of light weight, high strength, low thermal conductivity, good thermal insulation property and the like.
Owner:SOUTHWEAT UNIV OF SCI & TECH

Hemispheroid solid fluctuation micro-gyroscope and manufacturing method thereof

The invention provides a hemispheroid solid fluctuation micro-gyroscope and a manufacturing method of the hemispheroid solid fluctuation micro-gyroscope. The hemispheroid solid fluctuation micro-gyroscope comprises a monocrystalline silicon substrate, eight signal electrodes, eight shielding electrodes, a micro hemispheroid harmonic oscillator and a central fixing supporting column, wherein the micro hemispheroid harmonic oscillator is connected with the monocrystalline silicon substrate through the central fixing supporting column; the signal electrodes and the shielding electrodes are arranged on the upper surface of the monocrystalline silicon substrate and are alternately and uniformly distributed on the periphery of the micro hemispheroid harmonic oscillator; the distance from each signal electrode to the micro hemispheroid harmonic oscillator and the distance from each shielding electrode to the micro hemispheroid harmonic oscillator are equal. The microgyroscope is produced by integrating an MEMS bulk silicon processing technology and a surface silicon processing technology; large effective vibrator mass can be achieved, and the detection effect on a Coriolis effect can be enhanced; high operating mode vibration efficiency can be achieved, and the ambient noise and mechanical noise can be lowered; by adopting the shielding electrode, the crosstalk among the signal electrodes can be alleviated, and the influence of the stray capacitance in the detection process can be alleviated.
Owner:SHANGHAI JIAO TONG UNIV

Internally-externally discrete dual-electrode distributed micro-gyroscope and manufacturing method thereof

The invention provides an internally-externally discrete dual-electrode distributed micro-gyroscope and a manufacturing method thereof. The internally-externally discrete dual-electrode distributed micro-gyroscope comprises a monocrystalline silicon substrate, a central fixing supporting column, a miniature harmonic oscillator, multiple external electrodes, multiple internal electrodes and a glass substrate. The multiple external electrodes are evenly distributed on the outer side of the miniature harmonic oscillator to form evenly distributed external electrodes. The multiple internal electrodes are evenly distributed on the inner side of the miniature harmonic oscillator to form evenly distributed internal electrodes. The internally-externally discrete dual-electrode distributed micro-gyroscope is manufactured by combining an MEMS bulk silicon processing technology and a surface silicon processing technology, can provide different driving and detecting modes and different working modes and can work in a system needing complicated control. The internally-externally discrete dual-electrode distributed micro-gyroscope can utilize the internal electrodes and the external electrodes to respectively performed drive and detection, decrease the parasitic capacitance between a driving electrode and a detection electrode and improve the detection accuracy.
Owner:SHANGHAI JIAO TONG UNIV

Dual-electrode distribution type micro gyroscope with side separated electrodes and circular adjacent electrodes and preparation method thereof

The invention provides a dual-electrode distribution type micro gyroscope with side separated electrodes and circular adjacent electrodes and a preparation method thereof. One end of a center fixed support column is connected with a monocrystalline silicon substrate, the other end of the center fixed support column is connected with a micro harmonic oscillator; side electrodes are arranged on the surface of the monocrystalline silicon substrate or a glass substrate; adjacent electrodes are arranged on the surface of the monocrystalline silicon substrate or the glass substrate; the monocrystalline silicon substrate and the glass substrate are bonded. The preparation of the dual-electrode distribution type micro gyroscope with side separated electrodes and circular adjacent electrodes is conducted by the combination of MEMS bulk silicon processing and surface silicon processing; the dual-electrode distribution type micro gyroscope with side separated electrodes and circular adjacent electrodes can provide different drive and detection modes and different work modes, can work in the system requiring a complex control; the adjacent electrode is used for driving and the side electrodes are used for detection, the parasitic capacitance between a driving electrode and a detecting electrode is reduced, and the detection accuracy is improved.
Owner:SHANGHAI JIAO TONG UNIV

Phosphorous slag aerated concrete and preparation method thereof

The invention discloses a phosphorous slag aerated concrete. The concrete is characterized by consisting of a binding material, an exciting agent, an air entraining agent and water which are mixed, wherein the binding material consists of 60 to 100 weight percent of phosphorous slag and 0 to 40 weight percent of pulverized fuel ash; the exciting agent is water glass with modulus of 1.0 to 1.6; the water glass accounts for 5 to 8 weight percent of the binding material based on the weight of Na2O; the air entraining agent is aluminum powder or simple substance silicon; the using amount of the aluminum powder is 0.1 to 0.2 weight percent of the binding material; the using amount of the simple substance silicon is 0.05 to 0.1 weight percent of the binding material; and the weight ratio of theusing amount of the water to the using amount of the binding material is 0.28 to 0.32. The phosphorous slag aerated concrete product is prepared by taking the industrial waste slag such as the phosphorous slag and the like as the binding material and mixing the phosphorous slag, the exciting agent, the air entraining agent and the water. The phosphorous slag aerated concrete has the advantages that: the preparation process is simple without vapor-pressure process, so that the equipment investment can be greatly reduced; and the product is a sealed porous structure and has the characteristics of light weight, high strength, low thermal conductivity, good thermal insulation property and the like.
Owner:SOUTHWEAT UNIV OF SCI & TECH

Hemispherical solid-state wave micro-gyroscope and preparation method thereof

The invention provides a hemispheroid solid fluctuation micro-gyroscope and a manufacturing method of the hemispheroid solid fluctuation micro-gyroscope. The hemispheroid solid fluctuation micro-gyroscope comprises a monocrystalline silicon substrate, eight signal electrodes, eight shielding electrodes, a micro hemispheroid harmonic oscillator and a central fixing supporting column, wherein the micro hemispheroid harmonic oscillator is connected with the monocrystalline silicon substrate through the central fixing supporting column; the signal electrodes and the shielding electrodes are arranged on the upper surface of the monocrystalline silicon substrate and are alternately and uniformly distributed on the periphery of the micro hemispheroid harmonic oscillator; the distance from each signal electrode to the micro hemispheroid harmonic oscillator and the distance from each shielding electrode to the micro hemispheroid harmonic oscillator are equal. The microgyroscope is produced by integrating an MEMS bulk silicon processing technology and a surface silicon processing technology; large effective vibrator mass can be achieved, and the detection effect on a Coriolis effect can be enhanced; high operating mode vibration efficiency can be achieved, and the ambient noise and mechanical noise can be lowered; by adopting the shielding electrode, the crosstalk among the signal electrodes can be alleviated, and the influence of the stray capacitance in the detection process can be alleviated.
Owner:SHANGHAI JIAO TONG UNIV

Distributed micro-gyroscope with upper and lower separate electrodes and its preparation method

The invention provides a vertically-discrete dual-electrode distributed micro-gyroscope and a manufacturing method thereof. The micro-gyroscope comprises a monocrystalline silicon substrate, a central fixation supporting column, a micro harmonic oscillator, a plurality of upper electrodes, a plurality of lower electrodes and a glass substrate. The multiple upper electrodes are uniformly distributed on the upper side of the micro harmonic oscillator so that the uniformly-distributed upper electrodes can be formed; the multiple lower electrodes are uniformly distributed on the lower side of the micro harmonic oscillator so that the uniformly-distributed lower electrodes can be formed. Manufacturing is performed with the combination of MEMS bulk silicon machining and surface silicon machining technologies, different driving and detection modes and different working modes can be provided, and the micro-gyroscope can work in a system needing complex control; driving and detection can be performed by means of the lower electrodes and the upper electrodes respectively, the stray capacitance between the driving electrodes and the detection electrodes can be lowered, and the detection precision can be improved.
Owner:SHANGHAI JIAO TONG UNIV +1

A kind of inner and outer double-electrode micro-hemispherical resonant gyroscope and its preparation method

The invention provides an internal-external double-electrode type miniature hemispherical resonance gyroscope and a preparation method thereof. The internal-external double-electrode type miniature hemispherical resonance gyroscope comprises a single-crystal silicon substrate, a central fixed supporting column, a miniature hemispherical resonator, external electrodes, external-electrode metal welding plates, a glass substrate, metal leads, round welding wire discs, external-electrode metal connecting columns, internal electrodes and a seed layer. The internal-external double-electrode type miniature hemispherical resonance gyroscope and the preparation method provided by the invention have the beneficial effects that an MEMS bulk silicon processing process and a surface silicon processing process are combined for manufacture; different driving and detection modes and different working modes can be provided, and the working in a system needing complex control can be achieved; the internal electrodes and the external electrodes can be utilized for respectively carrying out driving and detection, the parasitic capacitance between a driving electrode and a detection electrode can be reduced and the detection accuracy can be improved; and the metal leads and the round welding wire discs are provided for the internal electrodes and the outer electrode so as to bring convenience for signal application and signal extraction.
Owner:SHANGHAI JIAOTONG UNIV

Two-electrode distributed micro-gyroscope separated inside and outside and its preparation method

The invention provides an internally-externally discrete dual-electrode distributed micro-gyroscope and a manufacturing method thereof. The internally-externally discrete dual-electrode distributed micro-gyroscope comprises a monocrystalline silicon substrate, a central fixing supporting column, a miniature harmonic oscillator, multiple external electrodes, multiple internal electrodes and a glass substrate. The multiple external electrodes are evenly distributed on the outer side of the miniature harmonic oscillator to form evenly distributed external electrodes. The multiple internal electrodes are evenly distributed on the inner side of the miniature harmonic oscillator to form evenly distributed internal electrodes. The internally-externally discrete dual-electrode distributed micro-gyroscope is manufactured by combining an MEMS bulk silicon processing technology and a surface silicon processing technology, can provide different driving and detecting modes and different working modes and can work in a system needing complicated control. The internally-externally discrete dual-electrode distributed micro-gyroscope can utilize the internal electrodes and the external electrodes to respectively performed drive and detection, decrease the parasitic capacitance between a driving electrode and a detection electrode and improve the detection accuracy.
Owner:SHANGHAI JIAOTONG UNIV

Internally-discrete and externally-annular dual-electrode distribution micro-gyroscope and manufacturing method thereof

The invention provides an internally-discrete and externally-annular dual-electrode distribution micro-gyroscope and a manufacturing method thereof. One end of a central fixation supporting column is connected with a monocrystalline silicon substrate, and the other end of the central fixation supporting column is connected with a micro harmonic oscillator; an external electrode is arranged on the surface of the monocrystalline silicon substrate or a glass substrate; an internal electrode is arranged on the surface of the monocrystalline silicon substrate or the glass substrate; the monocrystalline silicon substrate and the glass substrate are bonded. Manufacturing is performed with the combination of MEMS bulk silicon machining and surface silicon machining technologies, different driving and detection modes and different working modes can be provided, and the micro-gyroscope can work in a system needing complex control; driving and detection can be performed by means of the internal electrode and the annular integrated external electrode respectively, the stray capacitance between the driving electrode and the detection electrode can be lowered, and the detection precision can be improved.
Owner:SHANGHAI JIAO TONG UNIV

Two-electrode distributed micro gyroscope with side-discrete adjacent ring and its preparation method

The invention provides a dual-electrode distribution type micro gyroscope with side separated electrodes and circular adjacent electrodes and a preparation method thereof. One end of a center fixed support column is connected with a monocrystalline silicon substrate, the other end of the center fixed support column is connected with a micro harmonic oscillator; side electrodes are arranged on the surface of the monocrystalline silicon substrate or a glass substrate; adjacent electrodes are arranged on the surface of the monocrystalline silicon substrate or the glass substrate; the monocrystalline silicon substrate and the glass substrate are bonded. The preparation of the dual-electrode distribution type micro gyroscope with side separated electrodes and circular adjacent electrodes is conducted by the combination of MEMS bulk silicon processing and surface silicon processing; the dual-electrode distribution type micro gyroscope with side separated electrodes and circular adjacent electrodes can provide different drive and detection modes and different work modes, can work in the system requiring a complex control; the adjacent electrode is used for driving and the side electrodes are used for detection, the parasitic capacitance between a driving electrode and a detecting electrode is reduced, and the detection accuracy is improved.
Owner:SHANGHAI JIAOTONG UNIV

Two-electrode distributed micro-gyroscope with discrete inner ring and outer ring and its preparation method

The invention provides an internally-discrete and externally-annular dual-electrode distribution micro-gyroscope and a manufacturing method thereof. One end of a central fixation supporting column is connected with a monocrystalline silicon substrate, and the other end of the central fixation supporting column is connected with a micro harmonic oscillator; an external electrode is arranged on the surface of the monocrystalline silicon substrate or a glass substrate; an internal electrode is arranged on the surface of the monocrystalline silicon substrate or the glass substrate; the monocrystalline silicon substrate and the glass substrate are bonded. Manufacturing is performed with the combination of MEMS bulk silicon machining and surface silicon machining technologies, different driving and detection modes and different working modes can be provided, and the micro-gyroscope can work in a system needing complex control; driving and detection can be performed by means of the internal electrode and the annular integrated external electrode respectively, the stray capacitance between the driving electrode and the detection electrode can be lowered, and the detection precision can be improved.
Owner:SHANGHAI JIAOTONG UNIV

Distributed micro gyroscope with double discrete electrodes on adjacent surfaces and its preparation method

The invention provides an adjacent-face-double-discrete-electrode distributed micro gyroscope and a preparing method thereof. The adjacent-face-double-discrete-electrode distributed micro gyroscope comprises a single crystal silicon substrate, a center fixing supporting column, a micro harmonic oscillator, side electrodes, adjacent electrodes and a glass substrate. The multiple side electrodes are evenly distributed on one side face of the micro harmonic oscillator, and the side electrodes evenly distributed are formed; the multiple adjacent electrodes are evenly distributed on one adjacent face of the micro harmonic oscillator, and in this way, the adjacent electrodes evenly distributed are formed. According to the adjacent-face double-discrete-electrode distributed micro gyroscope and the preparing method thereof, the MEMS bulk silicon processing technology and the surface silicon processing technology are combined to make; different driving and detection modes and different working modes are provided, and the adjacent-face double-discrete-electrode distributed micro gyroscope can work in a system needing to be complexly controlled; driving and detecting are carried out through the adjacent electrodes and the side electrodes respectively, stray capacitance between the driving electrodes and the detecting electrodes is reduced, and the detecting accuracy is increased.
Owner:SHANGHAI JIAO TONG UNIV

A dual hemispherical micro-resonant gyroscope and its preparation method

The invention provides a double-hemisphere-structured miniature resonant gyroscope and a manufacturing method thereof. The gyroscope comprises a monocrystalline silicon base, sixteen uniformly-distributed electrodes, two symmetrical miniature hemispherical resonators and a center-fixed supporting column, wherein the upper and lower ends of the center-fixed supporting column are respectively connected with the two miniature hemispherical resonators, and eight electrodes are uniformly distributed around each miniature hemispherical resonator; the two miniature hemispherical resonators have the same central shaft, are independent of each other and do not affect each other. The two miniature hemispherical resonators are respectively excited to work by adopting an electrostatic driven manner, and a drive mode and a detection mode are respectively matched with each other. The gyroscope is manufactured by combining an MEMS (Micro-Electromechanical Systems) bulk silicon processing process and a surface silicon processing process. According to the double-hemisphere-structured miniature resonant gyroscope and the manufacturing method thereof, influence caused by factors, such as centrifugal force, centripetal force, common-mode noise, quadratic nonlinear terms and the like is reduced in a differential processing manner; performance indexes, such as high bandwidth, high resolution, high sensitivity, high dynamic range and the like, are simultaneously achieved on a single device.
Owner:SHANGHAI JIAO TONG UNIV

A piezoelectric driven and detected miniature hemispherical resonant gyroscope and its preparation method

The invention provides a piezoelectric driven and detected miniature hemispherical resonant gyroscope and a manufacturing method thereof. The gyroscope comprises a monocrystalline silicon base, a center-fixed supporting column, a miniature hemispherical resonator, a common electrode, eight film piezoelectrics and eight uniformly-distributed signal electrodes, wherein the monocrystalline silicon base and the miniature hemispherical resonator are connected through the center-fixed supporting column; the common electrode has the same shape as that of the miniature hemispherical resonator and is located between the miniature hemispherical resonator and the piezoelectrics; the piezoelectrics have the same shapes as those of the signal electrodes and are located between the common electrode and the signal electrodes. The miniature hemispherical resonator is excited to work by adopting a piezoelectric driven manner, and a drive mode and a detection mode are matched with each other. The gyroscope is manufactured by combining an MEMS (Micro-Electromechanical Systems) bulk silicon processing process and a surface silicon processing process. According to the piezoelectric driven and detected miniature hemispherical resonant gyroscope and the manufacturing method thereof, the miniature gyroscope is driven and detected by using the inverse piezoelectric effect and the piezoelectric effect, so that the gyroscope has the characteristics of high degree of integration, low power consumption, convenience in mass production, and the like.
Owner:SHANGHAI JIAOTONG UNIV

Adjacent-face-double-discrete-electrode distributed micro gyroscope and preparing method thereof

The invention provides an adjacent-face-double-discrete-electrode distributed micro gyroscope and a preparing method thereof. The adjacent-face-double-discrete-electrode distributed micro gyroscope comprises a single crystal silicon substrate, a center fixing supporting column, a micro harmonic oscillator, side electrodes, adjacent electrodes and a glass substrate. The multiple side electrodes are evenly distributed on one side face of the micro harmonic oscillator, and the side electrodes evenly distributed are formed; the multiple adjacent electrodes are evenly distributed on one adjacent face of the micro harmonic oscillator, and in this way, the adjacent electrodes evenly distributed are formed. According to the adjacent-face double-discrete-electrode distributed micro gyroscope and the preparing method thereof, the MEMS bulk silicon processing technology and the surface silicon processing technology are combined to make; different driving and detection modes and different working modes are provided, and the adjacent-face double-discrete-electrode distributed micro gyroscope can work in a system needing to be complexly controlled; driving and detecting are carried out through the adjacent electrodes and the side electrodes respectively, stray capacitance between the driving electrodes and the detecting electrodes is reduced, and the detecting accuracy is increased.
Owner:SHANGHAI JIAO TONG UNIV

Vertically-discrete dual-electrode distributed micro-gyroscope and manufacturing method thereof

The invention provides a vertically-discrete dual-electrode distributed micro-gyroscope and a manufacturing method thereof. The micro-gyroscope comprises a monocrystalline silicon substrate, a central fixation supporting column, a micro harmonic oscillator, a plurality of upper electrodes, a plurality of lower electrodes and a glass substrate. The multiple upper electrodes are uniformly distributed on the upper side of the micro harmonic oscillator so that the uniformly-distributed upper electrodes can be formed; the multiple lower electrodes are uniformly distributed on the lower side of the micro harmonic oscillator so that the uniformly-distributed lower electrodes can be formed. Manufacturing is performed with the combination of MEMS bulk silicon machining and surface silicon machining technologies, different driving and detection modes and different working modes can be provided, and the micro-gyroscope can work in a system needing complex control; driving and detection can be performed by means of the lower electrodes and the upper electrodes respectively, the stray capacitance between the driving electrodes and the detection electrodes can be lowered, and the detection precision can be improved.
Owner:SHANGHAI JIAO TONG UNIV +1
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