Internally-externally discrete dual-electrode distributed micro-gyroscope and manufacturing method thereof

A micro-gyroscope, distributed technology, used in gyroscope/steering sensing equipment, gyro effect for speed measurement, instruments, etc. The effect of improving detection accuracy and reducing parasitic capacitance

Active Publication Date: 2016-11-23
SHANGHAI JIAO TONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] However, the above-mentioned patents only provide the structural scheme of the miniature hemispherical gyroscope with internal discrete electrodes and external discrete electrodes, and cannot provide different electrode distribution schemes for various miniature gyroscopes.

Method used

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  • Internally-externally discrete dual-electrode distributed micro-gyroscope and manufacturing method thereof
  • Internally-externally discrete dual-electrode distributed micro-gyroscope and manufacturing method thereof
  • Internally-externally discrete dual-electrode distributed micro-gyroscope and manufacturing method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0046] Such as Figure 1(a)-Figure 1(c) As shown, this embodiment provides a dual-electrode distributed micro-hemispherical resonant gyroscope structure with internal and external separation, including:

[0047] A hemispherical miniature harmonic oscillator 1;

[0048] Sixteen uniformly distributed external electrodes 2;

[0049] Sixteen uniformly distributed internal electrodes 3;

[0050] A monocrystalline silicon substrate 4;

[0051] a glass substrate 5;

[0052] A central fixed support column 6; wherein:

[0053] One end of the central fixed support column 6 is connected to the monocrystalline silicon substrate 4, and the other end of the central fixed support column 6 is connected to the micro-resonator 1 (as shown in FIG. 1(a));

[0054] Sixteen uniformly distributed external electrodes 2 are arranged on the surface of the glass substrate 5 (as shown in Figure 1(b)), and are evenly distributed on the periphery of the micro-resonator 1 (as shown in Figure 1(c) )); s...

Embodiment 2

[0066] Such as Figure 2(a)-Figure 2(c) As shown, the present embodiment provides a dual-electrode distributed miniature ring resonant gyroscope with internal and external separation, including:

[0067] A ring-shaped micro-resonator 1;

[0068] Sixteen uniformly distributed external electrodes 2;

[0069] Sixteen uniformly distributed internal electrodes 3;

[0070] A monocrystalline silicon substrate 4;

[0071] a glass substrate 5;

[0072] A central fixed support column 6; wherein:

[0073] One end of the central fixed support column 6 is connected to the monocrystalline silicon substrate 4, and the other end of the central fixed support column 6 is connected to the micro-resonator 1 (as shown in Figure 2(a)); 16 The uniformly distributed external electrodes 2 are arranged on the surface of the single crystal silicon substrate 4, and are uniformly distributed on the periphery of the micro-resonator 1 (as shown in FIG. 2(a)); sixteen uniformly Distributed internal ele...

Embodiment 3

[0081] Such as Figure 3(a)-Figure 3(c) As shown, the present embodiment provides a dual-electrode distributed miniature cup-shaped resonant gyroscope with internal and external separation, including:

[0082] A cup-shaped micro-resonator 1;

[0083] Sixteen uniformly distributed external electrodes 2;

[0084] Sixteen uniformly distributed internal electrodes 3;

[0085] A monocrystalline silicon substrate 4;

[0086] a glass substrate 5;

[0087] A central fixed support column 6; wherein:

[0088] One end of the central fixed support column 6 is connected to the monocrystalline silicon substrate 4, and the other end of the central fixed support column 6 is connected to the micro-resonator 1 (as shown in Figure 3(a)); 16 The uniformly distributed external electrodes 2 are arranged on the surface of the single crystal silicon substrate 4, and are uniformly distributed on the periphery of the micro-resonator 1 (as shown in FIG. 3(a)); sixteen uniformly Distributed interna...

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Abstract

The invention provides an internally-externally discrete dual-electrode distributed micro-gyroscope and a manufacturing method thereof. The internally-externally discrete dual-electrode distributed micro-gyroscope comprises a monocrystalline silicon substrate, a central fixing supporting column, a miniature harmonic oscillator, multiple external electrodes, multiple internal electrodes and a glass substrate. The multiple external electrodes are evenly distributed on the outer side of the miniature harmonic oscillator to form evenly distributed external electrodes. The multiple internal electrodes are evenly distributed on the inner side of the miniature harmonic oscillator to form evenly distributed internal electrodes. The internally-externally discrete dual-electrode distributed micro-gyroscope is manufactured by combining an MEMS bulk silicon processing technology and a surface silicon processing technology, can provide different driving and detecting modes and different working modes and can work in a system needing complicated control. The internally-externally discrete dual-electrode distributed micro-gyroscope can utilize the internal electrodes and the external electrodes to respectively performed drive and detection, decrease the parasitic capacitance between a driving electrode and a detection electrode and improve the detection accuracy.

Description

technical field [0001] The invention relates to a micro gyroscope in the field of micro-electromechanical technology, in particular to a two-electrode distributed micro gyroscope with internal and external separation and a preparation method thereof. Background technique [0002] Gyroscope is an inertial device that can detect the angle or angular velocity of the carrier, and it plays a very important role in the fields of attitude control, navigation and positioning. With the development of national defense technology and aviation and aerospace industries, the requirements of inertial navigation systems for gyroscopes are also developing in the direction of low cost, small size, high precision, multi-axis detection, high reliability, and adaptability to various harsh environments. Therefore, the importance of MEMS micro-gyro is self-evident. In particular, the micro-hemispherical resonant gyroscope, as an important research direction of the MEMS micro-gyroscope, has become...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C19/5684
CPCG01C19/5684
Inventor 张卫平欧彬唐健刘朝阳孙殿竣邢亚亮陈畅崔峰成宇翔赵万良刘瑞鑫
Owner SHANGHAI JIAO TONG UNIV
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