A piezoelectric driven and detected miniature hemispherical resonant gyroscope and its preparation method

Abstract

The invention provides a piezoelectric driven and detected miniature hemispherical resonant gyroscope and a manufacturing method thereof. The gyroscope comprises a monocrystalline silicon base, a center-fixed supporting column, a miniature hemispherical resonator, a common electrode, eight film piezoelectrics and eight uniformly-distributed signal electrodes, wherein the monocrystalline silicon base and the miniature hemispherical resonator are connected through the center-fixed supporting column; the common electrode has the same shape as that of the miniature hemispherical resonator and is located between the miniature hemispherical resonator and the piezoelectrics; the piezoelectrics have the same shapes as those of the signal electrodes and are located between the common electrode and the signal electrodes. The miniature hemispherical resonator is excited to work by adopting a piezoelectric driven manner, and a drive mode and a detection mode are matched with each other. The gyroscope is manufactured by combining an MEMS (Micro-Electromechanical Systems) bulk silicon processing process and a surface silicon processing process. According to the piezoelectric driven and detected miniature hemispherical resonant gyroscope and the manufacturing method thereof, the miniature gyroscope is driven and detected by using the inverse piezoelectric effect and the piezoelectric effect, so that the gyroscope has the characteristics of high degree of integration, low power consumption, convenience in mass production, and the like.

Description

technical field

[0001] The invention relates to a hemispherical resonant gyroscope in the field of micro-electromechanical technology, in particular to a piezoelectrically driven and detected micro hemispherical resonant gyroscope and a preparation method thereof. Background technique

[0002] Gyroscope is an inertial device that can detect the angle or angular velocity of the carrier, and it plays a very important role in the fields of attitude control, navigation and positioning. With the development of national defense technology and aviation and aerospace industries, the requirements of inertial navigation systems for gyroscopes are also developing in the direction of low cost, small size, high precision, multi-axis detection, high reliability, and adaptability to various harsh environments. Therefore, the importance of MEMS gyroscope is self-evident. In particular, as an important research direction of MEMS gyroscopes, micro-resonant gyroscopes have become a research h...

Images