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Adjacent-face-double-discrete-electrode distributed micro gyroscope and preparing method thereof

A technology of micro gyroscopes and adjacent electrodes, which is applied to gyroscope/steering sensing equipment, gyro effects for speed measurement, instruments, etc., can solve the problems of different electrode distribution schemes for various micro gyroscopes, and increase the number of electrodes , reduce parasitic capacitance, and achieve the effect of full angle control

Active Publication Date: 2016-12-21
SHANGHAI JIAO TONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] However, the above-mentioned patents only provide the structural scheme of the miniature hemispherical gyroscope with internal discrete electrodes and external discrete electrodes, and cannot provide different electrode distribution schemes for various miniature gyroscopes.

Method used

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  • Adjacent-face-double-discrete-electrode distributed micro gyroscope and preparing method thereof
  • Adjacent-face-double-discrete-electrode distributed micro gyroscope and preparing method thereof
  • Adjacent-face-double-discrete-electrode distributed micro gyroscope and preparing method thereof

Examples

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Effect test

Embodiment 1

[0051] Such as Figure 1(a)-Figure 1(c) As shown, the present embodiment provides a miniature hemispherical resonant gyroscope with two discrete electrodes distributed on adjacent surfaces, including:

[0052] A hemispherical miniature harmonic oscillator 1;

[0053] Sixteen evenly distributed side electrodes 2;

[0054] Sixteen uniformly distributed adjacent electrodes 3;

[0055] A monocrystalline silicon substrate 4;

[0056] a glass substrate 5;

[0057] A central fixed support column 6; wherein:

[0058] One end of the central fixed support column 6 is connected to the monocrystalline silicon substrate 4, and the other end of the central fixed support column 6 is connected to the micro-resonator 1 (as shown in FIG. 1(a));

[0059] Sixteen of the uniformly distributed side electrodes 2 are arranged on the surface of the glass substrate 5 (as shown in FIG. As shown in c)); sixteen uniformly distributed adjacent electrodes 3 are arranged on the surface of the single cry...

Embodiment 2

[0071] Such as Figure 2(a)-Figure 2(c) As shown, the present embodiment provides a miniature ring resonant gyroscope with two discrete electrodes distributed on adjacent surfaces, including:

[0072] A ring-shaped micro-resonator 1;

[0073] Sixteen evenly distributed side electrodes 2;

[0074] Sixteen uniformly distributed adjacent electrodes 3;

[0075] A monocrystalline silicon substrate 4;

[0076] a glass substrate 5;

[0077] A central fixed support column 6; wherein:

[0078] One end of the central fixed support column 6 is connected to the monocrystalline silicon substrate 4, and the other end of the central fixed support column 6 is connected to the micro-resonator 1 (as shown in Figure 2(a)); 16 The uniformly distributed side electrodes 2 are arranged on the surface of the single crystal silicon substrate 4, and are evenly distributed on the outside of the micro-resonator 1 (as shown in FIG. 2(a)); sixteen of the described Evenly distributed adjacent electrod...

Embodiment 3

[0086] Such as Figure 3(a)-Figure 3(c) As shown, the present embodiment provides a miniature disk resonator gyroscope with two discrete electrodes distributed on adjacent surfaces, including:

[0087] A disk-shaped micro-resonator 1;

[0088] Sixteen evenly distributed side electrodes 2;

[0089] Sixteen uniformly distributed adjacent electrodes 3;

[0090] A monocrystalline silicon substrate 4;

[0091] a glass substrate 5;

[0092] A central fixed support column 6; wherein:

[0093] One end of the central fixed support column 6 is connected to the monocrystalline silicon substrate 4, and the other end of the central fixed support column 6 is connected to the micro-resonator 1 (as shown in Figure 3(a)); 16 The uniformly distributed side electrodes 2 are arranged on the surface of the single crystal silicon substrate 4, and are evenly distributed on the outside of the micro-resonator 1 (as shown in FIG. 3(a)); sixteen of the described Evenly distributed adjacent electro...

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Abstract

The invention provides an adjacent-face-double-discrete-electrode distributed micro gyroscope and a preparing method thereof. The adjacent-face-double-discrete-electrode distributed micro gyroscope comprises a single crystal silicon substrate, a center fixing supporting column, a micro harmonic oscillator, side electrodes, adjacent electrodes and a glass substrate. The multiple side electrodes are evenly distributed on one side face of the micro harmonic oscillator, and the side electrodes evenly distributed are formed; the multiple adjacent electrodes are evenly distributed on one adjacent face of the micro harmonic oscillator, and in this way, the adjacent electrodes evenly distributed are formed. According to the adjacent-face double-discrete-electrode distributed micro gyroscope and the preparing method thereof, the MEMS bulk silicon processing technology and the surface silicon processing technology are combined to make; different driving and detection modes and different working modes are provided, and the adjacent-face double-discrete-electrode distributed micro gyroscope can work in a system needing to be complexly controlled; driving and detecting are carried out through the adjacent electrodes and the side electrodes respectively, stray capacitance between the driving electrodes and the detecting electrodes is reduced, and the detecting accuracy is increased.

Description

technical field [0001] The invention relates to a micro gyroscope in the field of micro-electromechanical technology, in particular to a micro gyroscope with two discrete electrodes distributed on adjacent surfaces and a preparation method thereof. Background technique [0002] Gyroscope is an inertial device that can detect the angle or angular velocity of the carrier, and it plays a very important role in the fields of attitude control, navigation and positioning. With the development of national defense technology and aviation and aerospace industries, the requirements of inertial navigation systems for gyroscopes are also developing in the direction of low cost, small size, high precision, multi-axis detection, high reliability, and adaptability to various harsh environments. Therefore, the importance of MEMS micro-gyro is self-evident. In particular, the micro-hemispherical resonant gyroscope, as an important research direction of the MEMS micro-gyroscope, has become a...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C19/5691
CPCG01C19/5691
Inventor 张卫平欧彬刘朝阳唐健孙殿竣邢亚亮魏志方崔峰赵万良成宇翔刘瑞鑫
Owner SHANGHAI JIAO TONG UNIV
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