The invention relates to a
semiconductor structure and a preparation method thereof, and the method comprises the steps: providing a substrate, and forming an injection layer on the substrate; forming a buffer layer and a drift layer on the injection layer, and performing
laser annealing on the buffer layer and the drift layer from one side away from the substrate; a plurality of
conductive channel units arranged at intervals are formed on the upper
surface layer of the drift layer,
laser annealing is conducted on the
conductive channel units from the side away from the substrate, and each
conductive channel unit comprises a well region, an emitter region and a
contact region, forming a gate structure above the well region; removing the substrate to
expose the injection layer;
laser annealing is carried out on the injection layer from the side, away from the buffer layer, of the injection layer, and laser wavelengths used in
laser annealing of the buffer layer, the drift layer, the conductive channel unit and the injection layer are selected based on light absorption characteristic parameters of the injection layer, the buffer layer and the drift layer. According to the
semiconductor structure and the preparation method thereof, the formation of
parasitic capacitance is reduced, and the device performance is improved.