The application relates to a
semiconductor structure and a preparation method thereof, which comprises the following steps: providing a substrate containing a substrate, a
floating diffusion region and a source follower, a gate structure of the source follower is located on the upper surface of the substrate, and the
floating diffusion region is located on both sides of the gate structure in a first direction; forming an interlayer
dielectric layer covering the substrate and the gate structure; forming grooves located on both sides of the gate structure in the interlayer
dielectric layer, the bottom of the groove and the top of the gate structure are arranged in a second direction; forming a
mask layer covering the sidewall of the groove;
etching to form a first
contact hole, a second
contact hole and a connecting hole connecting the two holes based on the
mask layer, the bottom of the first
contact hole and the second contact hole respectively exposes the
floating diffusion region and the gate structure; forming a low
dielectric constant layer covering the sidewall of the first contact hole, the second contact hole and the connecting hole; and forming a connecting structure filling the first contact hole, the second contact hole and the connecting hole and covering the low dielectric constant layer. The
semiconductor structure and the preparation method thereof reduce the
contact resistance of the device and reduce the
parasitic capacitance.