The invention relates to a cavity-type film bulk acoustic resonator (FBAR), consisting of a silicon on insulator (SOI) substrate with a cavity and a piezoelectric thin film transducer arranged on the substrate. The FBAR is characterized in that the surface of the substratum silicon slice in the SOI substrate with the cavity is provided with a groove, substratum silicon slice and top-layer silicon are bonded to form a closed cavity structure; the upper of the top-layer silicon is provided with a transducer which is composed of a piezoelectric thin film and thin electrodes plated on the upper surface and the lower surface of the piezoelectric thin film; and a resonator can be tuned, and the thickness of the top-layer silicon can be regulated through controlling the etching time of the top-layer silicon on the upper of the cavity, thus the resonant frequency of the resonator can be regulated. As the preset cavity structure is used, in the invention, no sacrificial layer is needed, thus the chemical mechanical polishing process and the sacrificial layer release process in aboard patents and products, which are used for treating the sacrificial layer are not required; and meanwhile, in the invention, the advantages of small source parasitic capacitance, small drain parasitic capacitance, low voltage, low power consumption and the like of an SOI material are integrated, therefore, the FBAR can be compatible with an integrated circuit (IC), is easy to integrate, has simple process and is applicable to mass production.