The invention provides a
liquid crystal cell thickness detection method, device, equipment and medium based on coherence
tomography, and the method comprises the following steps: generating an incident
light beam by using a wide-spectrum low-coherence
light source, and dividing the incident
light beam into reference light and sample light of which the propagation directions are perpendicular to each other by using a
beam splitter; the reference light is reflected back to the
beam splitter after being vertically incident to the reflective mirror, and is propagated to an acquisition end along an original propagation direction; enabling the sample light to vertically enter the to-be-detected
silicon-based
liquid crystal device, then reflecting the sample light back to the
beam splitter, changing the direction through the beam splitter, and propagating the sample light to an acquisition end; the interference signals of the reference light and the sample light are collected at the collection end, and the depth information of the to-be-measured
silicon-based
liquid crystal device is obtained after FFT
processing is carried out on the interference signals, so that the problem that the thickness of a small-size liquid
crystal box is difficult to accurately measure is solved.