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Upper-discrete and lower-annular dual-electrode distributed micro-gyroscope and manufacturing method thereof

A micro gyroscope, distributed technology, applied in gyroscope/steering sensing equipment, gyro effect for speed measurement, instruments and other directions, can solve the problem of different electrode distribution schemes of various micro gyroscopes, etc. The effect of realizing full-angle control and improving detection accuracy

Active Publication Date: 2017-01-11
SHANGHAI JIAO TONG UNIV +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] However, the above-mentioned patents only provide the structural scheme of the miniature hemispherical gyroscope with internal discrete electrodes and external discrete electrodes, and cannot provide different electrode distribution schemes for various miniature gyroscopes.

Method used

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  • Upper-discrete and lower-annular dual-electrode distributed micro-gyroscope and manufacturing method thereof
  • Upper-discrete and lower-annular dual-electrode distributed micro-gyroscope and manufacturing method thereof
  • Upper-discrete and lower-annular dual-electrode distributed micro-gyroscope and manufacturing method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0047] Such as Figure 1(a)-Figure 1(c) As shown, this embodiment provides an upper discrete and lower ring-shaped dual-electrode distributed miniature disk resonator gyroscope, including:

[0048] A disk-shaped micro-resonator 1;

[0049] Sixteen evenly distributed upper electrodes 2;

[0050] A ring-shaped integrated lower electrode 3;

[0051] A monocrystalline silicon substrate 4;

[0052] a glass substrate 5;

[0053] A central fixed support column 6; wherein:

[0054] One end of the central fixed support column 6 is connected to the monocrystalline silicon substrate 4, and the other end of the central fixed support column 6 is connected to the micro-resonator 1 (as shown in FIG. 1(a));

[0055] Sixteen uniformly distributed upper electrodes 2 are arranged on the surface of the glass substrate 5 (as shown in FIG. 1(b)), and are evenly distributed on the upper side of the micro-resonator 1 (as shown in FIG. As shown in c) ); one of the ring-shaped integrated lower ele...

Embodiment 2

[0067] Such as Figure 2(a)-Figure 2(c) As shown, the present embodiment provides a two-electrode distributed miniature ring resonant gyroscope with an upper discrete ring and a lower ring, including:

[0068] A ring-shaped micro-resonator 1;

[0069] Sixteen evenly distributed upper electrodes 2;

[0070] A ring-shaped integrated lower electrode 3;

[0071] A monocrystalline silicon substrate 4;

[0072] a glass substrate 5;

[0073] A central fixed support column 6; wherein:

[0074] One end of the central fixed support column 6 is connected to the monocrystalline silicon substrate 4, and the other end of the central fixed support column 6 is connected to the micro-resonator 1 (as shown in Figure 2(a)); 16 The uniformly distributed upper electrodes 2 are arranged on the surface of the glass substrate 5 (as shown in Figure 2(b)), and are evenly distributed on the upper side of the micro-resonator 1 (as shown in Figure 2(c) shown); a ring-shaped integrated lower electrod...

Embodiment 3

[0082] Such as Figure 3(a)-Figure 3(c) As shown, the present embodiment provides a dual-electrode distributed miniature multi-ring resonant gyroscope with an upper discrete ring and a lower ring, including:

[0083] A multi-ring micro-resonator 1;

[0084] Sixteen evenly distributed upper electrodes 2;

[0085] A ring-shaped integrated lower electrode 3;

[0086] A monocrystalline silicon substrate 4;

[0087] a glass substrate 5;

[0088] A central fixed support column 6; wherein:

[0089] One end of the central fixed support column 6 is connected to the monocrystalline silicon substrate 4, and the other end of the central fixed support column 6 is connected to the micro-resonator 1 (as shown in Figure 3(a)); 16 The uniformly distributed upper electrodes 2 are arranged on the surface of the glass substrate 5 (as shown in Figure 3(b)), and are evenly distributed on the upper side of the micro-resonator 1 (as shown in Figure 3(c) shown); a ring-shaped integrated lower el...

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Abstract

The invention provides an upper-discrete and lower-annular dual-electrode distributed micro-gyroscope and a manufacturing method thereof. The micro-gyroscope comprises a monocrystalline silicon substrate, a central fixation supporting column, a micro harmonic oscillator, a plurality of upper electrodes, a lower electrode and a glass substrate. The multiple upper electrodes are uniformly distributed on the upper side of the micro harmonic oscillator, and the lower electrode is arranged on the lower side of the micro harmonic oscillator and is of an annular integrated mode so that the annular integrated lower electrode can be formed. Manufacturing is performed with the combination of MEMS bulk silicon machining and surface silicon machining technologies, different driving and detection modes and different working modes can be provided, and the micro-gyroscope can work in a system needing complex control; driving and detection can be performed by means of the lower electrode and the upper electrodes respectively, the stray capacitance between the driving electrode and the detection electrode can be lowered, and the detection precision can be improved.

Description

technical field [0001] The invention relates to a micro gyroscope in the field of micro-electromechanical technology, in particular to a two-electrode distributed micro gyroscope with a separate upper part and a ring-shaped lower part and a preparation method thereof. Background technique [0002] Gyroscope is an inertial device that can detect the angle or angular velocity of the carrier, and it plays a very important role in the fields of attitude control, navigation and positioning. With the development of national defense technology and aviation and aerospace industries, the requirements of inertial navigation systems for gyroscopes are also developing in the direction of low cost, small size, high precision, multi-axis detection, high reliability, and adaptability to various harsh environments. Therefore, the importance of MEMS micro-gyro is self-evident. In particular, the miniature disk resonant gyroscope, as an important research direction of the MEMS microgyroscope...

Claims

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Application Information

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IPC IPC(8): G01C19/5691
CPCG01C19/5691
Inventor 张卫平欧彬刘朝阳唐健孙殿竣邢亚亮陈畅崔峰赵万良成宇翔刘瑞鑫
Owner SHANGHAI JIAO TONG UNIV
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