Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Internally annular and externally discrete double-electrode distributed micro-gyroscope and preparation method thereof

A micro gyroscope, distributed technology, applied in gyroscope/steering sensing equipment, gyro effect for speed measurement, instrument and other directions, can solve the problem of different electrode distribution schemes of various micro gyroscopes, to increase the number of electrodes, Achieve full-angle control and improve the effect of detection accuracy

Active Publication Date: 2017-01-04
SHANGHAI JIAO TONG UNIV
View PDF5 Cites 9 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] However, the above-mentioned patents only provide the structural scheme of the miniature hemispherical gyroscope with internal discrete electrodes and external discrete electrodes, and cannot provide different electrode distribution schemes for various miniature gyroscopes.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Internally annular and externally discrete double-electrode distributed micro-gyroscope and preparation method thereof
  • Internally annular and externally discrete double-electrode distributed micro-gyroscope and preparation method thereof
  • Internally annular and externally discrete double-electrode distributed micro-gyroscope and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0045] Such as Figure 1(a)-Figure 1(c) As shown, this embodiment provides a two-electrode distributed micro-hemispherical resonant gyroscope structure with an inner ring and an outer discrete structure, including:

[0046] A hemispherical miniature harmonic oscillator 1;

[0047] Sixteen uniformly distributed external electrodes 2;

[0048] A ring-shaped integrated inner electrode 3;

[0049] A monocrystalline silicon substrate 4;

[0050] a glass substrate 5;

[0051] A central fixed support column 6; wherein:

[0052] One end of the central fixed support column 6 is connected to the monocrystalline silicon substrate 4, and the other end of the central fixed support column 6 is connected to the micro-resonator 1 (as shown in FIG. 1(a));

[0053] Sixteen uniformly distributed external electrodes 2 are arranged on the surface of the glass substrate 5 (as shown in Figure 1(b)), and are evenly distributed on the periphery of the micro-resonator 1 (as shown in Figure 1(c) )); ...

Embodiment 2

[0065] Such as Figure 2(a)-Figure 2(c) As shown, this embodiment provides a two-electrode distributed micro-cup resonator structure with an inner ring and an outer discrete structure, including:

[0066] A cup-shaped micro-resonator 1;

[0067] Sixteen uniformly distributed external electrodes 2;

[0068] A ring-shaped integrated inner electrode 3;

[0069] A monocrystalline silicon substrate 4;

[0070] a glass substrate 5;

[0071] A central fixed support column 6; wherein:

[0072] One end of the central fixed support column 6 is connected to the monocrystalline silicon substrate 4, and the other end of the central fixed support column 6 is connected to the micro-resonator 1 (as shown in Figure 2(a)); 16 One of the uniformly distributed external electrodes 2 is arranged on the surface of the single crystal silicon substrate 4, and is evenly distributed on the periphery of the micro-resonator 1 (as shown in Figure 2 (a)); The internal electrode 3 is arranged on the su...

Embodiment 3

[0082] Such as Figure 3(a)-Figure 3(g) As shown, this embodiment provides a method for preparing a two-electrode distributed micro-hemispherical resonant gyroscope with an inner discrete outer ring, including the following steps:

[0083] The first step, as shown in Figure 3(a), is to perform cleaning, glue coating, photolithography, development, boron ion implantation, sputtering, and glue removal processes on the single crystal silicon substrate 4 to obtain a single crystal silicon substrate 1 An external electrode 2 of boron ion-doped silicon material with a thickness of 10 μm-50 μm;

[0084] The second step, as shown in Figure 3 (b), is to carry out gluing, photolithography, development, silicon isotropic etching, and deglue on the single crystal silicon substrate to obtain a radius of 300μm-700μm hemispherical groove;

[0085] The third step, as shown in Figure 3(c), is to deposit silicon dioxide with a thickness of 1 μm-5 μm on the single crystal silicon substrate to ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
Thicknessaaaaaaaaaa
Radiusaaaaaaaaaa
Thicknessaaaaaaaaaa
Login to View More

Abstract

The invention provides an internally annular and externally discrete double-electrode distributed micro-gyroscope and a preparation method thereof. The internally annular and externally discrete double-electrode distributed micro-gyroscope comprises a monocrystalline silicon substrate, a central fixed support pillar, a minitype harmonic oscillator, external electrodes, an internal electrode and a glass substrate. The preparation is carried out through combining an MEMS (Micro Electro Mechanical Systems) bulk silicon processing technology and a surface silicon processing technology; the internally annular and externally discrete double-electrode distributed micro-gyroscope provided by the invention can provide different drive and detection methods and different working modes, can work in a system requiring complex control, and can utilize the internal electrode and the external electrodes to drive and detect respectively, so that a stray capacitance between a drive electrode and a detection electrode is reduced, and the detection accuracy is improved.

Description

technical field [0001] The invention relates to a micro gyroscope in the field of micro-electromechanical technology, in particular to a distributed micro gyroscope with two electrodes separated on the inner ring and outer ring and a preparation method thereof. Background technique [0002] Gyroscope is an inertial device that can detect the angle or angular velocity of the carrier, and it plays a very important role in the fields of attitude control, navigation and positioning. With the development of national defense technology and aviation and aerospace industries, the requirements of inertial navigation systems for gyroscopes are also developing in the direction of low cost, small size, high precision, multi-axis detection, high reliability, and adaptability to various harsh environments. Therefore, the importance of MEMS micro-gyro is self-evident. In particular, the micro-hemispherical resonant gyroscope, as an important research direction of the MEMS micro-gyroscope,...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
IPC IPC(8): G01C19/5691
CPCG01C19/5691
Inventor 张卫平欧彬刘朝阳唐健孙殿竣邢亚亮王晨阳周岁寻之宇崔峰
Owner SHANGHAI JIAO TONG UNIV
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com