Internally-discrete and externally-annular dual-electrode distribution micro-gyroscope and manufacturing method thereof

A micro gyroscope, distributed technology, applied in gyroscope/steering sensing equipment, gyro effect for speed measurement, instrument and other directions, can solve the problem of different electrode distribution schemes of various micro gyroscopes, to increase the number of electrodes, Achieve full-angle control and improve the effect of detection accuracy

Active Publication Date: 2017-01-11
SHANGHAI JIAO TONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] However, the above-mentioned patents only provide the structural scheme of the miniature hemispherical gyroscope with internal discrete electrodes and external discrete electrodes, and cannot provide different electrode distribution schemes for various miniature gyroscopes.

Method used

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  • Internally-discrete and externally-annular dual-electrode distribution micro-gyroscope and manufacturing method thereof
  • Internally-discrete and externally-annular dual-electrode distribution micro-gyroscope and manufacturing method thereof
  • Internally-discrete and externally-annular dual-electrode distribution micro-gyroscope and manufacturing method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0046] Such as Figure 1(a)-Figure 1(c) As shown, this embodiment provides a dual-electrode distributed miniature hemispherical resonant gyroscope with discrete inner ring and outer ring, including:

[0047] A hemispherical miniature harmonic oscillator 1;

[0048] A ring-shaped integrated external electrode 2;

[0049] Sixteen uniformly distributed internal electrodes 3;

[0050] A monocrystalline silicon substrate 4;

[0051] a glass substrate 5;

[0052] A central fixed support column 6; wherein:

[0053] One end of the central fixed support column 6 is connected to the monocrystalline silicon substrate 4, and the other end of the central fixed support column 6 is connected to the hemispherical micro-resonator 1 (as shown in Figure 1 (a)); The ring-shaped integrated external electrode 2 is arranged on the surface of the glass substrate 5 (as shown in Figure 1 (b)), and is distributed on the periphery of the hemispherical micro-resonator 1 (as shown in Figure 1 (c)); six...

Embodiment 2

[0066] Such as Figure 2(a)-Figure 2(c) As shown, the present embodiment provides a two-electrode distributed miniature ring resonant gyroscope with discrete inner ring and outer ring, including:

[0067] A ring-shaped micro-resonator 1;

[0068] A ring-shaped integrated external electrode 2;

[0069] Sixteen uniformly distributed internal electrodes 3;

[0070] A monocrystalline silicon substrate 4;

[0071] a glass substrate 5;

[0072] A central fixed support column 6; wherein:

[0073] One end of the central fixed support column 6 is connected to the monocrystalline silicon substrate 4, and the other end of the central fixed support column 6 is connected to the ring-shaped micro-resonator 1 (as shown in Figure 2 (a)); The integrated external electrodes 2 are arranged on the surface of the single crystal silicon substrate 4, and are distributed on the periphery of the annular micro-resonator 1 (as shown in FIG. 2(a)); the sixteen uniformly distributed internal electrod...

Embodiment 3

[0081] Such as Figure 3(a)-Figure 3(c) As shown, this embodiment provides a two-electrode distributed miniature cup-shaped resonant gyroscope with discrete inner ring and outer ring, including:

[0082] A cup-shaped micro-resonator 1;

[0083] A ring-shaped integrated external electrode 2;

[0084] Sixteen uniformly distributed internal electrodes 3;

[0085] A monocrystalline silicon substrate 4;

[0086] a glass substrate 5;

[0087] A central fixed support column 6; wherein:

[0088] One end of the central fixed support column 6 is connected to the monocrystalline silicon substrate 4, and the other end of the central fixed support column 6 is connected to the cup-shaped micro-resonator 1 (as shown in Figure 3 (a)); The ring-shaped integrated external electrode 2 is arranged on the surface of the single crystal silicon substrate 4, and is distributed on the periphery of the cup-shaped micro-resonator 1 (as shown in FIG. 3(a)); sixteen uniformly distributed internal ele...

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Abstract

The invention provides an internally-discrete and externally-annular dual-electrode distribution micro-gyroscope and a manufacturing method thereof. One end of a central fixation supporting column is connected with a monocrystalline silicon substrate, and the other end of the central fixation supporting column is connected with a micro harmonic oscillator; an external electrode is arranged on the surface of the monocrystalline silicon substrate or a glass substrate; an internal electrode is arranged on the surface of the monocrystalline silicon substrate or the glass substrate; the monocrystalline silicon substrate and the glass substrate are bonded. Manufacturing is performed with the combination of MEMS bulk silicon machining and surface silicon machining technologies, different driving and detection modes and different working modes can be provided, and the micro-gyroscope can work in a system needing complex control; driving and detection can be performed by means of the internal electrode and the annular integrated external electrode respectively, the stray capacitance between the driving electrode and the detection electrode can be lowered, and the detection precision can be improved.

Description

technical field [0001] The invention relates to a micro gyroscope in the field of micro-electromechanical technology, in particular to a two-electrode distributed micro gyroscope with discrete inner and outer annular rings and a preparation method thereof. Background technique [0002] Gyroscope is an inertial device that can detect the angle or angular velocity of the carrier, and it plays a very important role in the fields of attitude control, navigation and positioning. With the development of national defense technology and aviation and aerospace industries, the requirements of inertial navigation systems for gyroscopes are also developing in the direction of low cost, small size, high precision, multi-axis detection, high reliability, and adaptability to various harsh environments. Therefore, the importance of MEMS micro-gyro is self-evident. In particular, the micro-hemispherical resonant gyroscope, as an important research direction of the MEMS micro-gyroscope, has ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C19/5691
CPCG01C19/5691
Inventor 张卫平欧彬刘朝阳唐健孙殿竣邢亚亮寻之宇崔峰赵万良成宇翔刘瑞鑫
Owner SHANGHAI JIAO TONG UNIV
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