Internally-discrete and externally-annular dual-electrode distribution micro-gyroscope and manufacturing method thereof

A micro gyroscope, distributed technology, applied in gyroscope/steering sensing equipment, gyro effect for speed measurement, instrument and other directions, can solve the problem of different electrode distribution schemes of various micro gyroscopes, to increase the number of electrodes, Achieve full-angle control and improve the effect of detection accuracy
CN106323262AActive Publication Date: 2017-01-11SHANGHAI JIAO TONG UNIV
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
SHANGHAI JIAO TONG UNIV
Publication Date
2017-01-11

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Abstract

The invention provides an internally-discrete and externally-annular dual-electrode distribution micro-gyroscope and a manufacturing method thereof. One end of a central fixation supporting column is connected with a monocrystalline silicon substrate, and the other end of the central fixation supporting column is connected with a micro harmonic oscillator; an external electrode is arranged on the surface of the monocrystalline silicon substrate or a glass substrate; an internal electrode is arranged on the surface of the monocrystalline silicon substrate or the glass substrate; the monocrystalline silicon substrate and the glass substrate are bonded. Manufacturing is performed with the combination of MEMS bulk silicon machining and surface silicon machining technologies, different driving and detection modes and different working modes can be provided, and the micro-gyroscope can work in a system needing complex control; driving and detection can be performed by means of the internal electrode and the annular integrated external electrode respectively, the stray capacitance between the driving electrode and the detection electrode can be lowered, and the detection precision can be improved.
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Description

technical field

[0001] The invention relates to a micro gyroscope in the field of micro-electromechanical technology, in particular to a two-electrode distributed micro gyroscope with discrete inner and outer annular rings and a preparation method thereof. Background technique

[0002] Gyroscope is an inertial device that can detect the angle or angular velocity of the carrier, and it plays a very important role in the fields of attitude control, navigation and positioning. With the development of national defense technology and aviation and aerospace industries, the requirements of inertial navigation systems for gyroscopes are also developing in the direction of low cost, small size, high precision, multi-axis detection, high reliability, and adaptability to various harsh environments. Therefore, the importance of MEMS micro-gyro is self-evident. In particular, the micro-hemispherical resonant gyroscope, as an important research direction of the MEMS micro-gyroscope, has ...

Claims

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