Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Two-electrode distributed micro-gyroscope with discrete inner ring and outer ring and its preparation method

A micro-gyroscope, distributed technology, used in gyroscope/steering sensing equipment, gyro effect for speed measurement, instruments, etc. The effect of reducing parasitic capacitance and improving detection accuracy

Active Publication Date: 2020-06-12
SHANGHAI JIAOTONG UNIV
View PDF3 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] However, the above-mentioned patents only provide the structural scheme of the miniature hemispherical gyroscope with internal discrete electrodes and external discrete electrodes, and cannot provide different electrode distribution schemes for various miniature gyroscopes.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Two-electrode distributed micro-gyroscope with discrete inner ring and outer ring and its preparation method
  • Two-electrode distributed micro-gyroscope with discrete inner ring and outer ring and its preparation method
  • Two-electrode distributed micro-gyroscope with discrete inner ring and outer ring and its preparation method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0046] Such as Figure 1(a)-Figure 1(c) As shown, this embodiment provides a dual-electrode distributed miniature hemispherical resonant gyroscope with discrete inner ring and outer ring, including:

[0047] A hemispherical miniature harmonic oscillator 1;

[0048] A ring-shaped integrated external electrode 2;

[0049] Sixteen uniformly distributed internal electrodes 3;

[0050] A monocrystalline silicon substrate 4;

[0051] a glass substrate 5;

[0052] A central fixed support column 6; wherein:

[0053] One end of the central fixed support column 6 is connected to the monocrystalline silicon substrate 4, and the other end of the central fixed support column 6 is connected to the hemispherical micro-resonator 1 (as shown in Figure 1 (a)); The ring-shaped integrated external electrode 2 is arranged on the surface of the glass substrate 5 (as shown in Figure 1 (b)), and is distributed on the periphery of the hemispherical micro-resonator 1 (as shown in Figure 1 (c)); six...

Embodiment 2

[0066] Such as Figure 2(a)-Figure 2(c) As shown, the present embodiment provides a two-electrode distributed miniature ring resonant gyroscope with discrete inner ring and outer ring, including:

[0067] A ring-shaped micro-resonator 1;

[0068] A ring-shaped integrated external electrode 2;

[0069] Sixteen uniformly distributed internal electrodes 3;

[0070] A monocrystalline silicon substrate 4;

[0071] a glass substrate 5;

[0072] A central fixed support column 6; wherein:

[0073] One end of the central fixed support column 6 is connected to the monocrystalline silicon substrate 4, and the other end of the central fixed support column 6 is connected to the ring-shaped micro-resonator 1 (as shown in Figure 2 (a)); The integrated external electrodes 2 are arranged on the surface of the single crystal silicon substrate 4, and are distributed on the periphery of the annular micro-resonator 1 (as shown in FIG. 2(a)); the sixteen uniformly distributed internal electrod...

Embodiment 3

[0081] Such as Figure 3(a)-Figure 3(c) As shown, this embodiment provides a two-electrode distributed miniature cup-shaped resonant gyroscope with discrete inner ring and outer ring, including:

[0082] A cup-shaped micro-resonator 1;

[0083] A ring-shaped integrated external electrode 2;

[0084] Sixteen uniformly distributed internal electrodes 3;

[0085] A monocrystalline silicon substrate 4;

[0086] a glass substrate 5;

[0087] A central fixed support column 6; wherein:

[0088] One end of the central fixed support column 6 is connected to the monocrystalline silicon substrate 4, and the other end of the central fixed support column 6 is connected to the cup-shaped micro-resonator 1 (as shown in Figure 3 (a)); The ring-shaped integrated external electrode 2 is arranged on the surface of the single crystal silicon substrate 4, and is distributed on the periphery of the cup-shaped micro-resonator 1 (as shown in FIG. 3(a)); sixteen uniformly distributed internal ele...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
thicknessaaaaaaaaaa
radiusaaaaaaaaaa
thicknessaaaaaaaaaa
Login to View More

Abstract

The invention provides an internally-discrete and externally-annular dual-electrode distribution micro-gyroscope and a manufacturing method thereof. One end of a central fixation supporting column is connected with a monocrystalline silicon substrate, and the other end of the central fixation supporting column is connected with a micro harmonic oscillator; an external electrode is arranged on the surface of the monocrystalline silicon substrate or a glass substrate; an internal electrode is arranged on the surface of the monocrystalline silicon substrate or the glass substrate; the monocrystalline silicon substrate and the glass substrate are bonded. Manufacturing is performed with the combination of MEMS bulk silicon machining and surface silicon machining technologies, different driving and detection modes and different working modes can be provided, and the micro-gyroscope can work in a system needing complex control; driving and detection can be performed by means of the internal electrode and the annular integrated external electrode respectively, the stray capacitance between the driving electrode and the detection electrode can be lowered, and the detection precision can be improved.

Description

technical field [0001] The invention relates to a micro gyroscope in the field of micro-electromechanical technology, in particular to a two-electrode distributed micro gyroscope with discrete inner and outer annular rings and a preparation method thereof. Background technique [0002] Gyroscope is an inertial device that can detect the angle or angular velocity of the carrier, and it plays a very important role in the fields of attitude control, navigation and positioning. With the development of national defense technology and aviation and aerospace industries, the requirements of inertial navigation systems for gyroscopes are also developing in the direction of low cost, small size, high precision, multi-axis detection, high reliability, and adaptability to various harsh environments. Therefore, the importance of MEMS micro-gyro is self-evident. In particular, the micro-hemispherical resonant gyroscope, as an important research direction of the MEMS micro-gyroscope, has ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): G01C19/5691
CPCG01C19/5691
Inventor 张卫平欧彬刘朝阳唐健孙殿竣邢亚亮寻之宇崔峰赵万良成宇翔刘瑞鑫
Owner SHANGHAI JIAOTONG UNIV
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com