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A kind of inner and outer double-electrode micro-hemispherical resonant gyroscope and its preparation method

A technology of hemispherical resonant gyroscope and hemispherical resonator, which is used in gyroscope/steering sensing equipment, gyroscopic effect for speed measurement, instruments, etc., can solve the problem of unfavorable signal application and signal extraction, no design of leads and wire pads, limited detection Accuracy and other issues, to achieve the effect of facilitating signal application and signal extraction, increasing the number of electrodes, and improving detection accuracy

Active Publication Date: 2017-02-15
SHANGHAI JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the gyroscope is only designed with eight external electrodes as driving, detecting and control electrodes, and the small number of electrodes limits its application in complex control systems; the eight external electrodes of the gyroscope are all located on the single crystal silicon substrate There is a certain parasitic capacitance and signal interference between the driving, detection and control electrodes, which limits the detection accuracy; the gyroscope is not designed with lead wires and bonding pads, which is not conducive to signal application and signal extraction

Method used

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  • A kind of inner and outer double-electrode micro-hemispherical resonant gyroscope and its preparation method
  • A kind of inner and outer double-electrode micro-hemispherical resonant gyroscope and its preparation method
  • A kind of inner and outer double-electrode micro-hemispherical resonant gyroscope and its preparation method

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Experimental program
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Embodiment 1

[0051] Such as Figure 2(a)-Figure 2(c) As shown, the present embodiment provides a kind of internal and external dual-electrode miniature hemispherical resonant gyroscope, comprising:

[0052] a single crystal silicon substrate 1;

[0053] a central fixed support column 2;

[0054] A miniature hemispherical harmonic oscillator 3;

[0055] Eight uniformly distributed external electrodes 4;

[0056] Eight external electrode metal welding plates 5;

[0057] a glass substrate 6;

[0058] Sixteen metal leads 7;

[0059] Sixteen round wire reels 8;

[0060] Eight external electrode metal connection columns 9;

[0061] Eight evenly distributed internal electrodes 10;

[0062] a seed layer 11;

[0063] Wherein: one end of the central fixed support column 2 is connected to the single crystal silicon substrate 1, and the other end is connected to the micro hemispherical resonator 3; the external electrode 4 is arranged on the lower surface of the single crystal silicon substra...

Embodiment 2

[0080] Such as Figure 1(a)-Figure 1(k) As shown, the present embodiment provides a method for preparing an internal and external dual-electrode miniature hemispherical resonant gyroscope, including the following steps:

[0081] The first step, as shown in Figure 1(a), is to perform cleaning, glue coating, photolithography, development, boron ion implantation, sputtering, and glue removal processes on the single crystal silicon substrate to obtain a thickness on the single crystal silicon substrate 1. An external electrode 4 made of boron ion-doped silicon material with a thickness of 10 μm-50 μm and an external electrode metal welding plate 5 made of chromium and copper materials with a thickness of 50 nm-300 nm;

[0082] The second step, as shown in Figure 1(b), is based on the first step of glue coating, photolithography, development, silicon isotropic etching, and glue removal to obtain a radius on the single crystal silicon substrate 1. 300μm-700μm hemispherical groove; ...

Embodiment 3

[0094] Basically the same as embodiment 1 and embodiment 2, the difference is:

[0095] As shown in Fig. 3(a) and Fig. 3(b), the micro gyroscope prepared in this embodiment: the internal electrode 10 is a ring-shaped integrated electrode.

[0096] In this embodiment, the inner electrode 10 in the micro gyroscope can only provide a single control signal, and cannot apply a driving signal and extract a detection signal.

[0097] In this embodiment, the micro gyroscope can apply a ring control signal to the inner electrode 10, so that the micro gyroscope can work in the full-angle mode and directly detect the magnitude of the applied rotation angle.

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Abstract

The invention provides an internal-external double-electrode type miniature hemispherical resonance gyroscope and a preparation method thereof. The internal-external double-electrode type miniature hemispherical resonance gyroscope comprises a single-crystal silicon substrate, a central fixed supporting column, a miniature hemispherical resonator, external electrodes, external-electrode metal welding plates, a glass substrate, metal leads, round welding wire discs, external-electrode metal connecting columns, internal electrodes and a seed layer. The internal-external double-electrode type miniature hemispherical resonance gyroscope and the preparation method provided by the invention have the beneficial effects that an MEMS bulk silicon processing process and a surface silicon processing process are combined for manufacture; different driving and detection modes and different working modes can be provided, and the working in a system needing complex control can be achieved; the internal electrodes and the external electrodes can be utilized for respectively carrying out driving and detection, the parasitic capacitance between a driving electrode and a detection electrode can be reduced and the detection accuracy can be improved; and the metal leads and the round welding wire discs are provided for the internal electrodes and the outer electrode so as to bring convenience for signal application and signal extraction.

Description

technical field [0001] The invention relates to a miniature hemispherical resonant gyroscope in the field of micro-electromechanical technology, in particular to an inner and outer double-electrode type miniature hemispherical resonant gyroscope and a preparation method thereof. Background technique [0002] Gyroscope is an inertial device that can detect the angle or angular velocity of the carrier, and it plays a very important role in the fields of attitude control, navigation and positioning. With the development of national defense technology and aviation and aerospace industries, the requirements of inertial navigation systems for gyroscopes are also developing in the direction of low cost, small size, high precision, multi-axis detection, high reliability, and adaptability to various harsh environments. Therefore, the importance of MEMS micro-gyro is self-evident. In particular, the micro-hemispherical resonant gyroscope, as an important research direction of the MEM...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01C19/5691
CPCG01C19/56
Inventor 张卫平唐健刘亚东汪濙海成宇翔孙殿竣邢亚亮陈文元
Owner SHANGHAI JIAOTONG UNIV
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