Two-electrode distributed micro gyroscope with side-discrete adjacent ring and its preparation method

Abstract

The invention provides a dual-electrode distribution type micro gyroscope with side separated electrodes and circular adjacent electrodes and a preparation method thereof. One end of a center fixed support column is connected with a monocrystalline silicon substrate, the other end of the center fixed support column is connected with a micro harmonic oscillator; side electrodes are arranged on the surface of the monocrystalline silicon substrate or a glass substrate; adjacent electrodes are arranged on the surface of the monocrystalline silicon substrate or the glass substrate; the monocrystalline silicon substrate and the glass substrate are bonded. The preparation of the dual-electrode distribution type micro gyroscope with side separated electrodes and circular adjacent electrodes is conducted by the combination of MEMS bulk silicon processing and surface silicon processing; the dual-electrode distribution type micro gyroscope with side separated electrodes and circular adjacent electrodes can provide different drive and detection modes and different work modes, can work in the system requiring a complex control; the adjacent electrode is used for driving and the side electrodes are used for detection, the parasitic capacitance between a driving electrode and a detecting electrode is reduced, and the detection accuracy is improved.

Description

technical field

[0001] The invention relates to a micro-gyroscope in the field of micro-electro-mechanical technology, in particular to a two-electrode distributed micro-gyroscope with side-discrete adjacent surfaces ring-shaped and a preparation method thereof. Background technique

[0002] Gyroscope is an inertial device that can detect the angle or angular velocity of the carrier, and it plays a very important role in the fields of attitude control, navigation and positioning. With the development of national defense technology and aviation and aerospace industries, the requirements of inertial navigation systems for gyroscopes are also developing in the direction of low cost, small size, high precision, multi-axis detection, high reliability, and adaptability to various harsh environments. Therefore, the importance of MEMS micro-gyro is self-evident. In particular, the micro-hemispherical resonant gyroscope, as an important research direction of the MEMS micro-gyroscope...

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