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Dual-electrode distribution type micro gyroscope with side separated electrodes and circular adjacent electrodes and preparation method thereof

A technology of side electrodes and adjacent electrodes, which is applied to gyroscope/steering sensing equipment, gyro effect for speed measurement, instruments and other directions, can solve the problem of different electrode distribution schemes of various micro gyroscopes, and achieve the purpose of increasing the number of electrodes, Effect of reducing parasitic capacitance and improving detection accuracy

Active Publication Date: 2017-01-11
SHANGHAI JIAO TONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] However, the above-mentioned patents only provide the structural scheme of the miniature hemispherical gyroscope with internal discrete electrodes and external discrete electrodes, and cannot provide different electrode distribution schemes for various miniature gyroscopes.

Method used

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  • Dual-electrode distribution type micro gyroscope with side separated electrodes and circular adjacent electrodes and preparation method thereof
  • Dual-electrode distribution type micro gyroscope with side separated electrodes and circular adjacent electrodes and preparation method thereof
  • Dual-electrode distribution type micro gyroscope with side separated electrodes and circular adjacent electrodes and preparation method thereof

Examples

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Embodiment 1

[0057] Such as Figure 1(a)-Figure 1(c) As shown, this embodiment provides a two-electrode distributed micro hemispherical resonator gyroscope with side discrete adjacent surfaces, including: a hemispherical micro resonator 1; sixteen uniformly distributed side electrodes 2; a ring integrated Formula adjacent electrode 3; a single crystal silicon substrate 4; a glass substrate 5; a central fixed support column 6; wherein:

[0058] One end of the central fixed support column 6 is connected to the monocrystalline silicon substrate 4, and the other end of the central fixed support column 6 is connected to the micro-resonator 1 (as shown in Figure 1(a)); 16 The uniformly distributed side electrodes 2 are arranged on the surface of the single crystal silicon substrate 4 (as shown in Figure 1(b)), and are evenly distributed on the upper side of the micro-resonator 1 (as shown in Figure 1(b) c) ); one annular integral adjacent electrode 3 is disposed on the surface of the glass subst...

Embodiment 2

[0070] Such as Figure 2(a)-Figure 2(c) As shown, the present embodiment provides a two-electrode distributed micro-ring resonator gyroscope with side-discrete adjacent surfaces ring, including: a ring-shaped micro-resonator 1; sixteen uniformly distributed side electrodes 2; a ring-shaped integrated Adjacent electrode 3; a single crystal silicon substrate 4; a glass substrate 5; a central fixed support column 6; wherein:

[0071] One end of the central fixed support column 6 is connected to the monocrystalline silicon substrate 4, and the other end of the central fixed support column 6 is connected to the micro-resonator 1 (as shown in Figure 2(a)); 16 One of the uniformly distributed side electrodes 2 is arranged on the surface of the single crystal silicon substrate 4, and is evenly distributed on the outside of the micro-resonator 1 (as shown in FIG. 2(a)); one of the rings is integrated Adjacent electrodes 3 are arranged on the surface of the glass substrate 5 (as shown ...

Embodiment 3

[0079] Such as Figure 3(a)-Figure 3(c) As shown, the present embodiment provides a two-electrode distributed micro-disk resonator gyroscope with side-discrete adjacent surfaces, including: a disc-shaped micro-resonator 1; sixteen uniformly distributed side electrodes 2; An annular one-piece adjacent electrode 3; a single crystal silicon substrate 4; a glass substrate 5; a central fixed support column 6; wherein:

[0080] One end of the central fixed support column 6 is connected to the monocrystalline silicon substrate 4, and the other end of the central fixed support column 6 is connected to the micro-resonator 1 (as shown in Figure 3(a)); 16 One of the uniformly distributed side electrodes 2 is arranged on the surface of the single crystal silicon substrate 4, and is evenly distributed on the outside of the micro-resonator 1 (as shown in FIG. 3(a)); one of the rings is integrated Adjacent electrodes 3 are arranged on the surface of the glass substrate 5 (as shown in Figure...

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Abstract

The invention provides a dual-electrode distribution type micro gyroscope with side separated electrodes and circular adjacent electrodes and a preparation method thereof. One end of a center fixed support column is connected with a monocrystalline silicon substrate, the other end of the center fixed support column is connected with a micro harmonic oscillator; side electrodes are arranged on the surface of the monocrystalline silicon substrate or a glass substrate; adjacent electrodes are arranged on the surface of the monocrystalline silicon substrate or the glass substrate; the monocrystalline silicon substrate and the glass substrate are bonded. The preparation of the dual-electrode distribution type micro gyroscope with side separated electrodes and circular adjacent electrodes is conducted by the combination of MEMS bulk silicon processing and surface silicon processing; the dual-electrode distribution type micro gyroscope with side separated electrodes and circular adjacent electrodes can provide different drive and detection modes and different work modes, can work in the system requiring a complex control; the adjacent electrode is used for driving and the side electrodes are used for detection, the parasitic capacitance between a driving electrode and a detecting electrode is reduced, and the detection accuracy is improved.

Description

technical field [0001] The invention relates to a micro-gyroscope in the field of micro-electro-mechanical technology, in particular to a two-electrode distributed micro-gyroscope with side-discrete adjacent surfaces ring-shaped and a preparation method thereof. Background technique [0002] Gyroscope is an inertial device that can detect the angle or angular velocity of the carrier, and it plays a very important role in the fields of attitude control, navigation and positioning. With the development of national defense technology and aviation and aerospace industries, the requirements of inertial navigation systems for gyroscopes are also developing in the direction of low cost, small size, high precision, multi-axis detection, high reliability, and adaptability to various harsh environments. Therefore, the importance of MEMS micro-gyro is self-evident. In particular, the micro-hemispherical resonant gyroscope, as an important research direction of the MEMS micro-gyroscope...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C19/5684G01C19/5691
CPCG01C19/5684G01C19/5691
Inventor 张卫平欧彬刘朝阳唐健孙殿竣邢亚亮寻之宇崔峰成宇翔赵万良刘瑞鑫
Owner SHANGHAI JIAO TONG UNIV
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