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Online laser trimming system and method for micro-hemispherical resonator gyroscope with frequency measurement function

A hemispherical resonant gyroscope and frequency measurement technology, which can be applied to measurement devices, instruments, etc., can solve the problems of reducing the capacitance area and affecting the test of micro-hemispherical gyroscopes, and achieve the effect of improving efficiency

Active Publication Date: 2021-10-26
NAT UNIV OF DEFENSE TECH
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  • Summary
  • Abstract
  • Description
  • Claims
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Problems solved by technology

[0006] The femtosecond laser technology used in the prior art adjusts the frequency of the micro-hemispheric resonant gyroscope. Quality, thus reducing the actual capacitor area, affecting the later testing of micro-hemispherical gyroscopes

Method used

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  • Online laser trimming system and method for micro-hemispherical resonator gyroscope with frequency measurement function
  • Online laser trimming system and method for micro-hemispherical resonator gyroscope with frequency measurement function
  • Online laser trimming system and method for micro-hemispherical resonator gyroscope with frequency measurement function

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Embodiment Construction

[0073] Next, the technical solutions in the embodiments of the present invention will be described in the following examples, and the described embodiments are merely, not all of the embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained without creative labor are not made in the premise of creative labor.

[0074] It should be noted that all directional instructions (such as above, lower, left, right, front, and post, ...) are only used in a particular attitude (as shown in the accompanying drawings). The relative positional relationship, movement conditions, etc., if the specific posture changes, the directional indication is also changed accordingly.

[0075] Further, as described in the present invention, as described in the description of "first", "second", etc., is only used to describe purposes, and cannot be understood as an indication or implies its relative importance or implicitting the number of technique...

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Abstract

The invention discloses an online laser trimming system and method for a micro-hemispherical resonator gyroscope with a frequency measurement function. The system comprises a laser processing module, a frequency measurement module, a supporting module and a control module, the micro-hemispherical resonator gyroscope is arranged on the supporting module and has degrees of freedom of multi-directional movement and rotation; the frequency measurement module comprises a vibration element and a laser vibration meter, the vibration element is fixedly connected to the micro-hemispherical resonator gyroscope, and the laser vibration meter faces the side part of the micro-hemispherical resonator gyroscope; the control module is in communication connection with the frequency measurement module so as to obtain the trimming opening depth and diameter required by the micro-hemispherical resonator gyroscope; and the laser processing module is located around the micro-hemispherical resonator gyroscope so as to complete trimming of the micro-hemispherical resonator gyroscope based on the needed trimming opening depth and diameter. The system is applied to the technical field of vibrating gyroscopes, the depth of removal mass is controlled in the trimming process, meanwhile, online frequency measurement can be achieved, the trimming effect can be observed in time, and the trimming efficiency is greatly improved.

Description

Technical field [0001] The present invention relates to a vibrating gyroscope technical field, particularly having a micro hemispherical resonator gyro frequency measurement function Laser trim system and method. Background technique [0002] Micro hemispherical vibrating gyroscope is a novel micro gyroscope, which inherited the traditional hemispherical gyroscope large dynamic range, high accuracy, long life, good impact performance advantages, and both small size, low cost, low power consumption and so on. Hemispherical micro gyroscope quality factor of the order of up to one million, geometrical and physical parameters are completely symmetrical, when operating at a rate integration mode, the measuring range is not limited, a microelectromechanical gyroscope is nearly achieve a large dynamic, high-precision angular velocity measurements (as in guided artillery shells in high-speed rotation of the application) the only option, these advantages make micro-gyroscope hemisphere ha...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C25/00
CPCG01C25/005
Inventor 吴学忠肖定邦席翔李斌石岩卢坤陈绎默段京保袁超聂豹
Owner NAT UNIV OF DEFENSE TECH
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