Integrated micro-hemispherical resonator gyro and processing and packaging method thereof

A hemispherical resonant gyro and overall technology, applied in the field of micro-electromechanical and inertial navigation, can solve the problems of gyroscope performance such as large surface roughness, difficult release process, and large size, and achieve shortened production cycle, long service life, and small size Effect

Inactive Publication Date: 2018-02-02
SOUTHEAST UNIV
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Problems solved by technology

[0003] In 2014, Doruk Senkal of the University of California, Irvine, et al. introduced a wine glass resonant gyroscope made by blowing bubbles in their paper. Its quality factor is as high as one million and its center resonant frequency is 105kHz. Up to 7mm in diameter, oversized
In the market, hemispherical shell reso

Method used

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  • Integrated micro-hemispherical resonator gyro and processing and packaging method thereof
  • Integrated micro-hemispherical resonator gyro and processing and packaging method thereof
  • Integrated micro-hemispherical resonator gyro and processing and packaging method thereof

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Embodiment 1

[0031] Such as Figure 1-2 As shown, an integral micro-hemispherical resonant gyroscope includes a hemispherical shell resonator 1, a support handle 2, an upper glass substrate 3, a lower glass substrate 4, an intermediate silicon substrate 5, a peripheral anchor structure 6, electrodes 7, The first electrode hole 8, the pad 9, the metal mask layer 10, the metal lead 11 and the second electrode hole 12; the upper glass substrate 3, the intermediate silicon substrate 5 and the lower glass substrate 4 are from top to bottom Arranged in sequence, the peripheral anchor structure 6 is arranged on the outer periphery of the intermediate silicon substrate 5; the middle part of the intermediate silicon substrate 5 is a hollow cavity, and the hemispherical shell resonator 1 is arranged in the central part of the hollow cavity; the intermediate silicon substrate 5 Sixteen electrodes 7 are evenly arranged along the outer periphery of the hemispherical shell resonator 1; the upper glass s...

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Abstract

The invention discloses an integrated micro-hemispherical resonator gyro and a processing and packaging method thereof. The integrated micro-hemispherical resonator gyro comprises a hemispherical resonator, a supporting handle, an upper glass substrate, a lower glass substrate, a middle silicon substrate, peripheral anchor point structures, electrodes, first electrode holes, bonding pads, a metalmask layer, a metal lead and a second electrode hole, wherein the upper glass substrate, the middle silicon substrate and the lower glass substrate are sequentially arranged from top to bottom, the peripheral anchor point structures are arranged on the periphery of the middle silicon substrate, the hemispherical resonator is arranged in the middle silicon substrate, the electrodes are evenly distributed on the periphery of the hemispherical resonator, the upper glass substrate is provided with the first electrode holes, the first electrode holes are provided with the bonding pads, the second electrode hole is formed in the center of the lower glass substrate, and the bottom end of the metal mask layer is connected with the second electrode hole through the metal lead. The integrated micro-hemispherical resonator gyro is small in size, good in structural integrity, high in precision and sensitivity and long in service life; the processing and packaging method can shorten the productioncycle and is suitable for batch production.

Description

technical field [0001] The invention relates to the field of micro-electromechanical and inertial navigation, in particular to an integral micro-hemispheric resonant gyroscope and a processing and packaging method thereof. Background technique [0002] The hemispherical resonant gyroscope is a kind of Gothic vibrating gyroscope that uses the radial vibration standing wave precession effect of the lip of the hemispherical shell to sense the rotation of the base. It has high measurement accuracy, super stability and reliability. , Good shock resistance, vibration resistance and temperature performance, and especially has a unique shutdown radiation resistance. The life expectancy of the hemispherical resonant gyroscope is as high as 15 years. It is a key component in the continuous inertial navigation system and has a very broad development prospect. [0003] In 2014, Doruk Senkal of the University of California, Irvine, et al. introduced a wine glass resonant gyroscope made ...

Claims

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Application Information

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IPC IPC(8): G01C19/5691G01C19/5783
CPCG01C19/5691G01C19/5783
Inventor 夏敦柱宫旭亮徐磊
Owner SOUTHEAST UNIV
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