Integrated micro-hemispherical resonator gyro and processing and packaging method thereof

Abstract

The invention discloses an integrated micro-hemispherical resonator gyro and a processing and packaging method thereof. The integrated micro-hemispherical resonator gyro comprises a hemispherical resonator, a supporting handle, an upper glass substrate, a lower glass substrate, a middle silicon substrate, peripheral anchor point structures, electrodes, first electrode holes, bonding pads, a metalmask layer, a metal lead and a second electrode hole, wherein the upper glass substrate, the middle silicon substrate and the lower glass substrate are sequentially arranged from top to bottom, the peripheral anchor point structures are arranged on the periphery of the middle silicon substrate, the hemispherical resonator is arranged in the middle silicon substrate, the electrodes are evenly distributed on the periphery of the hemispherical resonator, the upper glass substrate is provided with the first electrode holes, the first electrode holes are provided with the bonding pads, the second electrode hole is formed in the center of the lower glass substrate, and the bottom end of the metal mask layer is connected with the second electrode hole through the metal lead. The integrated micro-hemispherical resonator gyro is small in size, good in structural integrity, high in precision and sensitivity and long in service life; the processing and packaging method can shorten the productioncycle and is suitable for batch production.

Description

technical field [0001] The invention relates to the field of micro-electromechanical and inertial navigation, in particular to an integral micro-hemispheric resonant gyroscope and a processing and packaging method thereof. Background technique [0002] The hemispherical resonant gyroscope is a kind of Gothic vibrating gyroscope that uses the radial vibration standing wave precession effect of the lip of the hemispherical shell to sense the rotation of the base. It has high measurement accuracy, super stability and reliability. , Good shock resistance, vibration resistance and temperature performance, and especially has a unique shutdown radiation resistance. The life expectancy of the hemispherical resonant gyroscope is as high as 15 years. It is a key component in the continuous inertial navigation system and has a very broad development prospect. [0003] In 2014, Doruk Senkal of the University of California, Irvine, et al. introduced a wine glass resonant gyroscope made ...

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Problems solved by technology

[0003] In 2014, Doruk Senkal of the University of California, Irvine, et al. introduced a wine glass resonant gyroscope made by blowing bubbles in their paper. Its quality factor is as high as one million and its center resonant frequency is 105kHz. Up to 7mm in diameter, oversized

In the market, hemispherical shell resonators are mainly made of quartz or glass, and the release process is difficult to grasp. It is necessary to select appropriate reaction conditions, release process and time to form a uniform hemispherical shell, otherwise the gyroscope produced Performance will be degraded by excessive surface roughness of the resonator

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