All-angle control signal detection system of piezoelectric hemispherical resonator gyroscope

Abstract

The invention provides an all-angle control signal detection system of a piezoelectric hemispherical resonator gyroscope. The all-angle control signal detection system comprises the hemispherical resonator gyroscope, two phase-locked loops, a demodulator module, a parameter calculator module, a PI controller module and a modulator module. The X axis and the Y axis of the hemispherical resonator gyroscope are a 0-degree electrode axis and a 45-degree electrode axis respectively. The 0-degree electrode axis and the 45-degree electrode axis are connected with the phase-locked loops respectively. The phase-locked loops are connected with the demodulator module which demodulates same-direction and orthogonal reference signals output by the two phase-locked loops. The parameter calculator module is connected with the demodulator module. The PI controller is connected with a parameter calculator. The modulator is connected with the PI controller and the hemispherical resonator gyroscope. By designing and controlling a closed-loop circuit of the hemispherical resonator gyroscope, all-angle detection and control of the hemispherical resonator gyroscope are achieved.

Description

technical field [0001] The present invention relates to the technical field of micro-electro-mechanical systems, in particular to a full-angle control signal detection system of a piezoelectric hemispherical resonant gyroscope. Background technique [0002] Micro-mechanical electronic systems (MEMS) mainly include micro-mechanisms, micro-sensors, micro-actuators and related circuits. MEMS is a new type of interdisciplinary technology developed in recent years, which has had a huge and far-reaching impact on human beings in the 21st century. [0003] The hemispherical resonant micro gyroscope adopts piezoelectric material as the main part and adopts full-angle control technology. It has the advantages of high stability, strong impact resistance, high precision, and small error. It is used in aerospace, inertial navigation, and civil consumer electronics. have broad application prospects. This kind of gyroscope uses the phase-locked loop module and parameter calculation modu...

AI Technical Summary

Problems solved by technology

However, the working method described in the literature does not give a specific circuit implementation plan, and this method cannot track the frequency and phase of the hemispherical resonant gyroscope, and the detection accuracy of the mode shape precession angle is not very high

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