Spectral confocal-based hemispherical resonator gyroscope precision assembly device and adjustment method thereof

Abstract

The invention relates to a hemispherical resonator gyroscope precision assembly device based on spectral confocal and an adjusting method thereof, the relative position relation between a base and a resonator is detected through a color confocal sensor according to the position relation between the base and the resonator, the device is constructed to adjust the X axis, the Y axis and the Z axis of the device, and meanwhile, the detection method of the device is formed according to the debugging process. Submicron-level precision accurate measurement and adjustment of the gap between the harmonic oscillator and the base electrode of the hemispherical resonator gyroscope are realized, the development requirement of the high-precision hemispherical resonator gyroscope is met, and development of novel inertial devices and weaponry in China is promoted. Through detection of a color confocal sensor, gaps between the harmonic oscillator and the base electrode in the X-axis direction, the Y-axis direction and the Z-axis direction can be detected and adjusted, gyroscope assembly efficiency is improved, and gap consistency adjustment precision is not affected by positioning precision of a displacement table. The device belongs to an optical non-contact measurement method, and a problem that the surface of a workpiece is scratched or polluted in a contact measurement method is solved.

Description

technical field [0001] The invention belongs to the technical field of inertial measurement sensors, in particular to a spectral confocal-based hemispherical resonant gyro precision assembly device and an adjustment method thereof. Background technique [0002] The hemispherical resonant gyroscope is a new type of inertial solid gyroscope, which has unique advantages such as high precision, small size, strong impact resistance, long life and high reliability, and has obvious advantages in military applications. The hemispherical resonator gyroscope is mainly composed of two core functional components, the hemispherical resonator and the base electrode. Generally, electrostatic excitation and capacitance detection are used to realize the control and detection of the standing wave in the resonator. The uneven gap between the resonator and the base electrodes during assembly will not only lead to inconsistent capacitance values ​​between the electrodes of the gyroscope, but als...

AI Technical Summary

Problems solved by technology

Since both the resonator and the base are spherical, and the gap between the two is small and the gap consistency is high, it cannot be measured by traditional contact measurement methods

Both the resonator and the base are plated with gold, and the gap cannot be directly measured by optical measurement.

In addition, due to the technical blockade, there are currently no

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