210 results about "Sub micrometer" patented technology

Subtleties of advanced fabrication processes and nano-scale phenomena associated with integrated circuit miniaturization have exposed the insufficiencies of design rules. Such inadequacies have adverse impact on all parts of the integrated circuit creation flow where design rules are used. In addition, segregation of the various layout data modification steps required for deep sub-micrometer manufacturing are resulting in slack and inefficiencies. This invention describes methods to improve integrated circuit creation via the use of a unified model of fabrication processes and circuit elements that can complement or replace design rules. By capturing the interdependence among fabrication processes and circuit elements, the unified model enables efficient layout generation, resulting in better integrated circuits.

The invention discloses a closed loop planar linear motor which includes a stationary stator (or platen) of arbitrary extent, and a moving forcer which is a single rigid body that can move over the planar stator surface on an air bearing with high speed and high precision in two orthogonal translational directions and a small rotation (or combinations thereof). An important distinguishing feature is a monolithic position and orientation sensor based on alternating current (AC) magnetic techniques which is an integral part of the forcer and occupies otherwise unused space in the forcer body. Also incorporated within the forcer is a special electronic processing element which converts weak AC signals from the sensor into usable high precision position and orientation information relative to the stator surface. A unique controller which is part of the closed-loop linear motor acts to combine information from the AC magnetic sensor with input from a user to provide precise, high-performance closed-loop control of the forcer, thereby enabling the forcer to be positioned with sub-micrometer precision and oriented with sub-millidegree precision on the stator surface. Additionally, owing to its closed-loop nature, the forcer can maintain its position and orientation even in the presence of disturbance forces and torques, and can emulate the operation of a mechanical spring and damper.

The invention discloses a lithium-ion battery with fast charge property, which comprises an anode, a cathode, a diaphragm sandwiched between the anode and the cathode and an organic electrolyte, wherein, sub micrometer lithium titanate is used as the active substance of the cathode; one or several materials of lithium manganate (LiMn2O4), lithium iron phosphate (LiFePO4), lithium nickel cobalt oxide (LiNixCoyMzO2), ternary substance(LiNixMnxCo1-2xO2) are used as active materials of the anode, or a mixture of lithium cobalt (LiCoO2) and one of lithium manganate (LiMn2O4), lithium iron phosphate (LiFePO4), lithium nickel cobalt oxide (LiNixCoyMzO2), ternary substance(LiNixMnxCo1-2xO2) is adopted as the active materials of the anode; lithium hexafluorophosphate (LiPF6) is adopted as the electrolyte, and a multicomponent mixture of ethylene carbonate (EC), dimethylcarbonate(DMC), Ethyl Methyl Carbonate (EMC) is used as a solution. The invention also discloses a preparation method of the lithium-ion battery with fast charged property. The lithium-ion battery of the invention has excellent fast charging and discharging performance.

The invention discloses a method of preparing a micrometer and sub-micrometer needle array. The method adopts the self-assembly technology and integrates the filling, cutting and controllable corrosion technologies. First, the self-assembly technology is adopted to technically assemble the micrometer/sub-micrometer fiber; and then the polymeric compound is filled, finally the micrometer and sub-micrometer needle array is prepared by the cutting and the controllable corrosion technologies. The invention has the advantages of low cost, no need of complicate equipments and technologies, capability of quick batch production, large area of needle array, smooth needle surface, adjustable diameter, length and taper, etc., and is widely applicable in the detecting, sensing, optical, biology and medicine fields, etc.

A correlative evaluation of a sample using an x-ray computed tomography (CT) x-ray fluorescence (XRF) system and the method for analyzing a sample using x-ray CT and XRF is disclosed. The CT/XRF system includes an x-ray CT subsystem for acquisition of volume information and a confocal XRF subsystem for acquisition of elemental composition information. The CT/XRF system also includes a controller for managing the acquisitions by the x-ray CT subsystem and confocal XRF subsystem. Combining sub-micrometer spatial resolution 3-D imaging with elemental composition analysis in 3-D with ppm level sensitivity is important to elemental identification of precious metal grains in crushed and ground ores and floatation tailings in the mining industry.

The invention discloses a preparation method of a super-hydrophobic material. The preparation method includes firstly, etching to form a micrometer or sub-micrometer structure on the surface of a substrate by etching solution; secondly, forming a nano-coating layer on the surface of the substrate with the micrometer or sub-micrometer structure; and thirdly, preparing a low-surface energy substance layer on the nano-coating layer. The invention provides the super-hydrophobic material prepared by the preparation method. The super-hydrophobic material comprises a substrate with the surface having the micrometer or sub-micrometer structure, a nano-coating layer is formed on the surface of the substrate, and a low-surface energy substance layer is formed on the nano-coating layer. The preparation method with low cost is applicable to industrial production and glass surface processing, and the water contact angle of the super-hydrophobic material can be 150 degrees at least.

A template, stamp or mold is fabricated by using a low-k material. The structure of the low-k material is transformed when it is baked in a novel heating process. Thus, the template is fabricated to obtain a high hardness and a high aspect-ratio with a low dose of electron beam lithography and an optimized baking process. Consequently, the residual; layer at photoresist bottom is reduced and the time for reactive ion etching is saved. In the end, the stability and the integrity is improved. Hence, the present invention is a solution for fabricating a template, stamp or mold with the feature size from sub-micrometer down to nanometer level.

The present invention provides method of particle size and concentration measurement that comprises the steps of: providing a focused, synthesized, non-Gaussian laser beam, causing the beam to interact with the particles, measuring the interaction signal and the number of interactions per unit time of the beam with the particles, and using algorithms to map the interaction signals to the particle size and the number of interactions per unit time to the concentration. The particles are fluid borne, airborne, or on a surface and have a size ranging from sub-micron to thousands of microns. In a preferred embodiment of the invention, the focused, synthesized, non-Gaussian laser beam is a dark beam. The non-Gaussian beam can be generated by employing a mask over a Gaussian laser beam or by directly modifying the laser cavity or by combining the beams from several lasers. The measurements can be made using the duration of interaction with a scanning beam, including dark field. The invention further provides a system for particle size and concentration measurement.

An MTPV thermophotovoltaic chip comprising a photovoltaic cell substrate, micron/sub-micron gap-spaced from a juxtaposed heat or infrared radiation-emitting substrate, with a radiation-transparent intermediate window substrate preferably compliantly adhered to the photovoltaic cell substrate and bounding the gap space therewith.

A method of fabricating a trench capacitor having high capacitance for ULSI technology below the sub-micrometer scale is provided. The method includes: form a trench on a semiconductor substrate. The trench has a bottom portion and at least one sidewall on the semiconductor substrate. Then, form a diffusion layer in the silicon substrate for circumscribing the bottom portion of the trench and a predetermined region of its sidewall. After that, form a first polysilicon layer on the bottom portion of the trench and in a manner that a portion of the first polysilicon layer does not contact with the sidewall. Then, form a first dielectric layer to completely cover the first polysilicon layer and the diffusion layer. Then, form an upper electrode layer on top of the trench to at least completely cover the first dielectric layer. Eventually, the contact area between the diffusion layer and the dielectric layer has been largely increased so as to maintain sufficient capacitance.

Passive water management techniques are provided in an air-breathing direct oxidation fuel cell system. A highly hydrophobic component with sub-micrometer wide pores is laminated to the catalyzed membrane electrolyte on the cathode side. This component blocks liquid water from traveling out of the cathode and instead causes the water to be driven through the polymer membrane electrolyte to the cell anode. The air-breathing direct oxidation fuel cell also includes a layer of cathode backing and additional cathode filter components on an exterior aspect of the cell cathode which lessen the water vapor escape rate from the cell cathode. The combination of the well laminated hydrophobic microporous layer, the thicker backing and the added filter layer, together defines a cathode structure of unique water management capacity, that enables to operate a DMFC with direct, controlled rate supply of neat (100%) methanol, without the need for any external supply or pumping of water. The cell anode is provided with a hydrophilic backing layer. When the water is driven through the polymer membrane electrolyte from the cell cathode to the cell anode chamber, it is available for the anodic reaction, and any excess water is carried out along CO₂ ventilation channels to the outside environment.

A method for separating a portion from a sheet glass element having a thickness of at least 2 millimeters along an intended separation line that divides the sheet glass element into the portion and a remaining main part is provided. The method includes producing filamentary damages comprising sub-micrometer hollow channels in a volume of the glass sheet element adjacently aligned along the separation line; and heating and/or cooling the glass sheet element to cause expansion and/or contraction so that the portion detaches from the main part along the separation line. The portion and the remaining main part each remain intact as a whole. The step of producing the filamentary damages includes generating a plasma within the volume with laser pulses of an ultrashort pulse laser; and displacing points of incidence of the laser pulses over a surface of the glass sheet element along the separation line.

The confirmation method for critical defect in semiconductor device of deep sub-micron comprises: step S101, using TEM to qualitative and local detect device sample to determine whether there is silicon crystal defect/dislocation defect and defect type; step S102, if there is defect, using SEM to detect sample, eroding with solution the sample; step S103, detecting sample section with SEM to confirm the film layer position of defect and whether it is fetal. Wherein, the SEM detecting sample erosion solution comprises HNO3, CH3COOH, HF and Cu(NO3)2.

Ultra-precision freeform surfaces are important to the development of complex and micro-optical-electro-mechanical devices used in many photonics and telecommunication products such as F-theta lenses for laser printers. These surfaces are complex and large scale surface topologies with shapes that generally possesses no rotational symmetry. Due to the geometrical complexities of these ultra-precision freeform surfaces, it is difficult to characterize the form accuracy and surface quality of freeform optical surfaces. The method of this invention is based on feature-point pre-fixture, and iterative precision alignment algorithm, which can provide sufficient capability of form characterization for ultra-precision freeform surfaces with form accuracy down to below sub-micrometer range

An interferometric fiber optic encoder readhead for sensing the displacement of a scale grating is disclosed. The detector channels of the readhead are fiber optic detector channels having respective phase grating masks. The fiber optic encoder readhead is configured to detect the displacement of interference fringes arising from the scale grating. In various exemplary embodiments, the fiber optic readhead is constructed and operably positioned according to various design relationships that insure a compact mounting and a relatively ideal sinusoidal signal as a function of displacement. Accordingly, high levels of displacement signal interpolation may be achieved, allowing sub-micrometer displacement measurements. The fiber optic encoder readhead may be assembled in a particularly accurate and economical manner and may be provided in a package with dimensions on the order of 1-2 millimeters.

The invention provides a one-step wet black silicon preparation and surface treatment method, which comprises the steps of enabling a silicon wafer with a surface damage layer being removed to be immerged into a corrosive liquid so as to prepare black silicon through reaction, wherein the corrosive liquid is a mixed aqueous solution of a metal ion containing concentrated hydrofluoric acid, an oxidizing agent and a high-molecular polymer; and enabling the black silicon to be immerged into a surface treatment corrosive liquid so as to carry out surface optimization treatment, and acquiring a silicon wafer with a sub-micrometer structure and uniform texturing, wherein the surface treatment corrosive liquid is an additive containing mixed acid aqueous solution. The wet black silicon preparation method provided by the invention is simple in process and low in cost, the texturing surface of the black silicon after corrosion treatment is uniform and has no sharp boundary, and the reflectivity is 7-15%. The one-step wet black silicon preparation and surface treatment method greatly improves the absorption efficiency of a silicon cell for light, a solar cell prepared by using the black silicon prepared according to the method has low cell electric leakage rate, stable open-circuit voltage and high conversion efficiency.

The invention discloses a hydrophilic-underwater oleophobic polymer porous membrane, a preparation method and applications thereof. The hydrophilic-underwater oleophobic polymer porous membrane is a polymer matrix membrane. The membrane surface has a coarse micro-nano level porous structure. Nano level, micrometer level and/or sub-micrometer level tunnels are distributed in the membrane. The static contact angle between the membrane and water is less than 10 degrees, and the underwater static contact angle between the membrane and oil is greater than 130 degrees. The provided membrane can be used to separate and purify oil-water mixture and emulsified oil-water generated by chemical engineering production, daily life, crude oil leakage accidents, and the like, and has a very important application value and wide application range.

A precision tool holder for precisely positioning a single point cutting tool on 4-axis lathe, such that the center of the radius of the tool nose is aligned with the B-axis of the machine tool, so as to facilitate the machining of precision meso-scale components with complex three-dimensional shapes with sub-μm accuracy on a four-axis lathe. The device is designed to fit on a commercial diamond turning machine and can adjust the cutting tool position in three orthogonal directions with sub-micrometer resolution. In particular, the tool holder adjusts the tool position using three flexure-based mechanisms, with two flexure mechanisms adjusting the lateral position of the tool to align the tool with the B-axis, and a third flexure mechanism adjusting the height of the tool. Preferably, the flexures are driven by manual micrometer adjusters. In this manner, this tool holder simplifies the process of setting a tool with sub-μm accuracy, to substantially reduce the time required to set the tool.

A filtering method is directed to a wastewater of CMP process, which includes sub-micrometer particles suspended as colloid. The wastewater is filtered by a gel membrane formed on a surface of plastic filter. A coagulant or a pH adjuster is added to the wastewater so that the sub-micrometer particles are coagulated to form the gel membrane.

The method for preparation quinacridone pigment nanocrystals with sub micrometer to nanometer in average size comprising, supplying supercritical or semi-critical liquid, which dissolves quinacridone pigment, into a specimen tube (ST) composing a reactor possessing a filter of desired opening to the upper stream side and to the down stream side in which quinacridone pigment is set up, flowing out the supercritical or semi-critical liquid in which quinacridone pigment is dissolved from said reactor to a mixing apparatus to which coolant is supplied, and by selecting the kind of supercritical of semi-critical liquid and combination of conditions e.g. supplying speed of each liquids, temperature of the liquid and the reacting pressure.