405 results about "Advanced manufacturing" patented technology

A mechanistic nested topological design optimization method for using Convolution-Hierarchical Deep-learning Neural Network Tensor Decomposition (C-HiDeNN-TD) comprises (1) obtaining at least one design variable and at least one design requirement; (2) decomposing the at least one design variable into at least one equation in each of at least two directions; (3) solving the at least one design variable in each of the at least two directions using a C-HiDeNN-TD solver to obtain at least one part design; and (4) outputting an optimal design based on the at least one part design when the optimal design meets the least one design requirement.

The invention relates to an electrostatic chuck power supply capable of realizing rapid inversion of output polarity and arbitrary waveform output, and the power supply comprises a DC high-voltage module which is used for providing an output bus voltage; the HVCT power supply module is used for providing midpoint reference voltage required by the driving voltage of the electrostatic chuck; the main power supply output module is used for outputting voltage of any value required by the electrostatic chuck and realizing rapid inversion of output polarity; and the control module is used for receiving a control demand from the control panel or the remote control port and generating a control signal for controlling other modules according to the control demand. The electrostatic chuck power supply realized by the invention can output an electrostatic chuck driving voltage waveform with any waveform, and quickly inverts the output polarity in a short time, so that the requirement of a semiconductor advanced manufacturing process on the electrostatic chuck driving power supply is met.

The invention provides a complex curved surface-oriented array structure silk-screen printing device and a control method thereof, and belongs to the technical field of advanced manufacturing. The printing device comprises a bed body module, a movement module, a silk-screen printing module and a control module, the posture position of a workpiece can be adjusted in the printing process, and the bed body module has five degrees of freedom and can adjust the posture of the workpiece in any curved surface shape. In the silk-screen printing process, the control module executes a professional numerical control G code program generated through path planning software, and the accuracy of the printing position can be guaranteed. The silk-screen printing equipment part moves a silk-screen printing module to a designated position to start printing on the basis of five-axis movement. Multi-material, high-precision, high-efficiency and damage-free manufacturing of the array structure can be realized, and the method has the characteristics of full-process automation, high forming speed, high efficiency and the like of silk-screen printing manufacturing, and has a good application prospect in the fields of precision machining, micro-nano machining and the like.

The invention discloses an automatic discharging device of a welding line, belongs to the technical field of advanced manufacturing, and aims to solve the problems that an existing device is low in installation efficiency, and the safety risk of a working place is increased due to reduction of the suction force of a suction cup. The automatic discharging device of the welding line comprises a vertical frame, a conveying belt is arranged on the vertical frame, a transferring device is arranged on the vertical frame in a sliding mode, a driving mechanism can drive the transferring device to move in the transverse axis direction of the vertical frame, the transferring device is located above the conveying belt and the containing platform, and a controller is arranged in the transferring device. Assembling and disassembling can be rapidly completed, the overhauling efficiency and the working efficiency are improved, meanwhile, air can be compressed to blow the surfaces of products, fine dust particles on the surfaces of the products are effectively removed, it is ensured that the suction cups and the surfaces of the products are well sealed, and then the adsorption effect is improved.

The invention discloses a series of inorganic polymeric adhesives and repair application thereof, the inorganic polymeric adhesives are oligomer structures formed by reaction of inorganic cation precursors and inorganic anions in the presence of capping agents, and the oligomer structures can be cured to form an inorganic polymeric network. The formula of the adhesive can be subjected to ion level regulation and control according to the specific composition of a to-be-repaired inorganic material product, ionic bond reconstruction between the adhesive and a base material is achieved in the heat treatment process, an inorganic interface bonding layer which is compact in structure, matched in crystal form and coordinated in thermal expansion is formed, and the adhesive has the advantages of being high in continuity, free of weak bonding areas, free of obvious pores and the like. The problems of thermal aging, falling, chromatic aberration and the like of a traditional binder can be effectively avoided, the service life of a repaired structure is prolonged, and the environmental stability is improved. The method has popularization and application potentials in the fields of aerospace, weaponry, advanced manufacturing, consumer electronics, medical health, cultural relic repair, jade repair, decorative art and the like.

The invention discloses a biological functional scaffold system driven by dual-mode printing, relates to the technical field of biomedicine, and is used for providing more accurate control on the aspects of porosity, cell attachment and surface modification. By integrating two advanced manufacturing technologies of 3D printing and aerosol spraying, the porosity and surface characteristics of the stent can be accurately controlled in the same printing process, and the cell attachment and proliferation environment is optimized. The cooperative working mechanism greatly improves the biocompatibility and mechanical strength of the biological scaffold, and further effectively promotes the tissue regeneration and repair efficiency. The whole manufacturing process is more efficient and accurate due to introduction of the control unit. The control unit automatically adjusts the printing speed and the spraying pressure based on real-time monitoring feedback, the uniformity and stability of the support are ensured, the error rate in the production process is reduced, and therefore the consistency and reliability of products are improved.

The invention relates to the technical field of advanced manufacturing, and discloses a patterned multilayer structure construction method based on immiscible phase auxiliary filling. The construction method of the patterned multilayer structure comprises the following steps: S1, dispersing assembly units in a curable water phase to obtain a pre-assembly liquid; s2, the pre-assembly liquid is added to the bottom layer of an assembly cavity, an insoluble phase is added to the upper layer to be flush with the upper edge of the assembly cavity, standing waves are applied, the assembly units form patterns in the pre-assembly liquid, the pre-assembly liquid is cured, and a first structural layer is obtained; s3, removing the immiscible phase, adding the assembling liquid to the surface of the first structural layer, adding the immiscible phase again until the immiscible phase is flush with the upper edge of the assembling cavity, applying standing waves to enable the assembling units in the pre-assembling liquid to form patterns, and solidifying the pre-assembling liquid to obtain a second structural layer; and S4, repeating the step S3 to obtain the patterned multilayer structure.

The invention provides a measurement and jet printing integrated device and method for a complex curved surface, and belongs to the field of advanced manufacturing, and the device comprises a motion module, a jet printing and measurement module, an integrated control module, a voltage control module and an air pressure control module. And the motion module can move independently, so that the functions of measuring and jet printing function switching and jet printing height adjustment according to the measured height are realized. The jet printing and measuring module is used for achieving the functions of pattern jet printing and jet printing height detection in the technological process. According to the method, the mode that the actual height of the jet printing needle and the surface of the workpiece is measured multiple times in the jet printing process and the height of the spray head is adjusted is adopted, the height change of the spray head in the complex curved surface jet printing process is reduced, the defects caused by inaccurate digital analog in the complex curved surface jet printing machining process are reduced, and the production efficiency is improved. The problems that in a complex curved surface application scene, the jet printing height of an existing jet printing method cannot be changed according to the curved surface height, so that the jet printing quality is low, and defects are serious are solved, and the jet printing quality is improved.

The invention belongs to the technical field of advanced manufacturing and intelligent design, and provides a topological optimization method and system for a liquid cooling plate of a lithium ion battery pack, and the method comprises the steps: building a parameterized simulation model of a battery pack liquid cooling system, constructing a multi-dimensional design variable space of the liquid cooling plate, and formally defining a multi-objective optimization problem; on the basis of the initial training data set, independently constructing a probabilistic agent model capable of predicting a target value and quantifying uncertainty for each optimization target function; performing quantum behavior enhanced multi-universe optimizer iterative optimization on the constructed agent model, selecting new sample points from a multi-dimensional design variable space of the liquid cooling plate according to a set criterion after a set number of iterations is completed, performing high-fidelity CFD simulation to obtain real data, supplementing the real data to a data set, and updating or reconstructing the agent model; and judging whether an iterative optimization condition is met or not, and if so, screening and outputting a final Pareto optimal solution set from all samples subjected to high-fidelity simulation verification. And efficient multi-objective optimal design of the liquid cooling plate is realized.

The invention belongs to the technical field of advanced manufacturing technology intelligent information, and particularly relates to a knowledge graph embedding method and system for knowledge intelligent recommendation. S1, designing a complex knowledge intelligent recommendation framework; s2, constructing a complex knowledge graph model, defining storage forms of contents of different entity categories, storing part of the categories as entity nodes, storing part of the categories as entity attributes, and defining a relationship to associate the entity nodes; s3, fusing an attention mechanism and complex value embedding to propose a TransEx knowledge graph embedding algorithm, and when entity nodes and relationships in the knowledge graph are converted into vector sequences, retaining the structure and semantic relationships of the graph; and S4, outputting all entities and relationships in the knowledge graph constructed based on the complex knowledge graph model into a triple form, constructing a knowledge graph embedding algorithm verification data set, each piece of data being composed of a group of triads, verifying the superiority of the knowledge graph embedding method by using a link prediction method, and when the algorithm performance is evaluated, establishing a knowledge graph embedding algorithm verification data set. And adopting an average reciprocal ranking MRR and Hits (at) K as evaluation indexes.

The invention discloses a method for preparing a powder high-speed steel billet, the powder high-speed steel billet and application, and relates to the technical field of advanced manufacturing of metal materials. The powder high-speed steel billet is prepared through the high-frequency induction hot pressing sintering method, rapid manufacturing of the powder high-speed steel billet can be achieved, and the performance of the obtained product can reach the product level of traditional hot isostatic pressing sintering. And compared with a traditional hot isostatic pressing preparation method, the technological process is simple, the period is short, preparation of a sheath is avoided, the cost can be reduced, and the safety can be improved. The density of the prepared powder high-speed steel can reach 98.5%, the microhardness reaches 365 Hv, the tensile strength and the yield strength reach 723 MPa and 687 MPa correspondingly, short-process and low-cost preparation of the powder high-speed steel billet can be achieved, and the obtained powder high-speed steel billet can be used for manufacturing hardware knives and scissors, mechanical molds and the like.

The invention belongs to the technical field of advanced manufacturing, and particularly relates to a microtexture functional curved surface machining method based on a structured grinding tool, which comprises the following steps of: determining an artificial joint type and an artificial joint surface microtexture array form; a grinding wheel is selected according to the microtexture array form; the grinding wheel is provided with an upper convex part and a lower concave part; mounting the artificial joint and the grinding wheel on a five-axis numerical control ultra-precision machine tool; setting a moving track of a grinding wheel according to the artificial joint type; and polishing the surface of the artificial joint to form a micro-texture array. The micro-texture array is machined on the surface of the artificial joint in a structured grinding mode, and the method has the advantages of being high in machining efficiency, good in process continuity, low in cost and the like, and is wide in applicability and high in flexibility.

The capillary transfer technology presented here represents a powerful approach to transfer soft films from surface of liquid onto a solid substrate in a fast and defect-free manner. The fundamental theoretical model and transfer criteria validated with comprehensive experiments and finite element analyses, for the first time provides a quantitative guide and optimization for the choice of material systems, operating conditions and environments for scalable on-demand transfers with high yield. The intrinsically moderate capillary transfer force and externally selectable transfer direction offer robust capabilities for achieving deterministic assembly and surface properties of structures with complex layouts and patterns for potentially broad applications in the fabrication of flexible / stretchable electronics, surface wetting structures and optical devices. Integration of this technology with other advanced manufacturing technologies associated with material self-assembly, growth and layout alignment represents promising future topics and would help create emerging new manufacturing technologies that leverage unique fluidity of liquid environments.

The invention provides laser additive manufacturing of a FeCoNi-based soft magnetic high-entropy alloy multilayer alternate composite structure, and relates to the technical field of advanced manufacturing of soft magnetic high-entropy alloys. The laser additive manufacturing of the FeCoNi-based soft magnetic high-entropy alloy multi-layer alternate composite structure comprises the steps of respective preparation of three kinds of pre-alloyed powder, respective ball-milling preparation of two kinds of mixed powder, pretreatment of a base plate, argon protection in a forming bin and laser additive manufacturing. The FeCoNi-based soft magnetic high-entropy alloy multi-layer alternate composite structure is obtained through respective preparation of three kinds of pre-alloy powder, respective ball milling preparation of two kinds of mixed powder, pretreatment of a base plate, argon protection in a forming bin and laser additive manufacturing. The preparation method is simple and easy to operate, green and environment-friendly, low in cost, short in process, high in efficiency and beneficial to industrial large-scale production and popularization.

The invention provides a wafer positioning device and wafer grinding equipment thereof, and belongs to the technical field of wafer processing equipment.The wafer positioning device comprises a clamping positioning system, a vacuum rotary carrying table system, a control module and an image recognition system, and the clamping positioning system, the vacuum rotary carrying table system, the image recognition system and the control module cooperate to achieve the purpose of positioning the wafer. The problem that in the prior art, the flat edge and the notch angle of a wafer cannot be recognized is accurately solved, centering is achieved only through synchronous radial movement of a plurality of clamping jaws without an additional moving shaft, and after an image recognition system confirms that the wafer is coaxial with a fixed shaft, a control module directly controls a vacuum rotating carrying table system to adsorb the wafer and rotate, and the wafer is accurately positioned. The space requirement of a clean room is met, the precision is prevented from being influenced by displacement difference, the offset recalculation link is omitted, the efficiency is improved, and the high-precision grinding requirement of the advanced manufacturing process is met.

The invention is applicable to the field of advanced manufacturing of powder materials, and provides flash sintering equipment for high current and high pressure, which comprises a power supply module, a pressure generation module, a support frame, a high vacuum module, a jacking module, a sintering unit and a conveying module. The sintering unit is provided with a sintering platform, a floating die module and a floating lower punch module and is guided through an upper guide column and a lower guide column. The jacking module jacks the lower electrode through a lead screw to push the floating lower punch module and the floating die module to move upwards along a guide column to be separated from the platform, and floating butt joint is achieved; the pressure generation module drives the upper punch to press downwards through the upper electrode and applies pressure to the sample, and the power supply module applies sintering current at the same time. Through the design of the floating module in non-rigid connection, the pressing force is prevented from being transmitted to the sintering platform, the equipment is prevented from overturning, and the stability of the sintering process is improved; and the whole station switching of the sintering unit is realized in combination with the conveying module, so that the continuous automatic production capacity of the equipment is improved.

The invention relates to the technical field of advanced manufacturing and artificial intelligence, and discloses a reinforcement learning-based superfine tungsten filament drawing process intelligent optimization method, which comprises the following steps of: constructing a digital twinborn model in a tungsten filament drawing process; based on the model, a hierarchical reinforcement learning framework is adopted for strategy training, and the framework comprises a high-level strategy network responsible for inter-pass macro target planning and a low-level strategy network responsible for real-time fine regulation and control in the pass to achieve the macro target. Before the low-layer strategy network outputs the control action, the disconnection risk of the action is predicted, and the high-risk action is corrected or denied, so that safe exploration and optimization are realized. Through combination of digital twinning, hierarchical decision and safety constraint, intelligent control over the whole flow of the superfine tungsten wire drawing process is achieved, and the yield, production efficiency and quality consistency of superfine tungsten wires of 30 microns and below can be remarkably improved.

The invention belongs to the technical field of advanced manufacturing, and discloses a jet printing device and method for electrofluid with a complex curved surface and a multi-layer interconnection structure, and the device comprises a bed body module which meets the movement requirement in the jet printing process; the jet printing module is used for jet printing processing, distance measurement compensation, laser curing and monitoring; and the parameter control module is used for pattern laying, path planning, equipment driving and process parameter regulation and control. The control method comprises the following steps: firstly, preparing a conformal functional structure on the surface of the complex curved surface workpiece as a bottom functional structure layer; the material jet-printed on the bottom layer functional structure is subjected to laser in-situ curing and sintering to realize preparation of a spatial interconnection structure; jet printing a functional layer between the spatial interconnection structures; jet printing a top end functional structure; and repeating the above steps until the preparation of the multi-layer functional circuit structure is completed. The device disclosed by the invention solves the problems of multi-material, high-efficiency, damage-free, high-precision and integrated preparation of the conformal multilayer interconnection structure with the complex curved surface.

The application belongs to the field of laser advanced manufacturing technology, and particularly relates to a method for connecting flat holes by pulse laser impact, a device thereof and application. The method for connecting flat holes by pulse laser impact comprises the following steps: placing bottom die, lower layer plate with sandglass-shaped through hole, upper layer plate, absorbing layer and constraint layer in sequence from bottom to top; clamping and fixing each layer by using a workpiece clamping system; placing the sandglass-shaped through hole region at the center of the pulse laser spot; under the pressure of the pulse laser impact wave, the upper layer plate is plastically deformed at high strain rate and impacts the upper inclined surface of the sandglass-shaped through hole of the lower layer plate, so that high-speed shear deformation occurs, thereby generating a metallurgical welding effect; with the continuous deformation of the upper layer plate, when the upper layer plate flows into the cavity of the sandglass-shaped through hole, an interlocking structure with small upper part and large bottom part is formed between the upper layer plate and the lower inclined surface of the sandglass-shaped through hole of the lower layer plate, thereby generating a mechanical riveting effect; the method provided by the application is used for welding and riveting of thicker or larger-thickness-difference plates.

The invention discloses a large and small model collaborative robot autonomous assembly method and system, and belongs to the field of advanced manufacturing technology intellectualization. The problems that traditional robot assembly depends on manual programming, adaptability is poor, and an algorithm cannot be optimized autonomously are solved. The method comprises the following steps: receiving an assembly project request submitted by a user in a natural language; the request is decoupled into a structured action primitive through an arrangement agent, and tasks are allocated; an algorithm design agent retrieves and adapts an algorithm from an open source library based on the action primitive, and completes training in a sandbox environment; the verification agent is responsible for automatic data acquisition and labeling, and carrying out overall performance test and iterative optimization on an integrated algorithm in a simulation environment; and finally generating an executable field control script. According to the method, the problems of algorithm autonomous design, simulation verification and closed-loop optimization when the robot faces a complex assembly task are solved, the development threshold and the deployment risk are reduced, and the intelligent level and the flexible adaptive capacity of an assembly system are remarkably improved.

The invention relates to the technical field of fabric spinning, in particular to a double-layer spinning structure of composite fiber and a spinning technology.The double-layer spinning structure comprises a composite fiber body, the composite fiber body comprises a deformation memory outer layer and a spinning inner layer, the deformation memory outer layer is made of thermally-induced deformation polyurethane memory materials, and the spinning inner layer is made of thermally-induced deformation polyurethane memory materials. The spinning inner layer is a cotton and polyester blended core; the glass transition temperature Tg of the thermally induced deformation polyurethane memory material is 35 + / -2 DEG C; the cotton accounts for 50-70% of the spinning inner layer, and the polyester accounts for 30-50% of the spinning inner layer; the deformation memory outer layer and the spinning inner layer are integrally formed through coaxial electrostatic spinning. Through reasonable design and an advanced manufacturing process, the fabric has various excellent performances such as temperature response, comfort and durability, and has a wide application prospect in the fields of spinning, clothing and the like.

The invention relates to a conductive slip ring surface microgroove machining device and method based on visual positioning, and belongs to the field of advanced manufacturing. The device comprises a visual detection module, an industrial personal computer, a laser range finder, a numerical control machine tool and a clamping tool. The industrial personal computer is used for communicating with the numerical control lathe, the laser range finder and the visual detection module, acquiring acquired information and transmitting a G code; the tool turret on the numerical control machine tool is used for installing the laser range finder, the visual detection module and the tool, the clamping tool is used for installing the conducting rod, and the tailstock should have the jacking pressure adjusting function; the laser range finder is installed on the tool turret through a screw and sends a displacement signal to the industrial personal computer to guide the industrial personal computer to judge the motion state of the machine tool. The device can efficiently and stably collect the surface picture of the microgroove of the conducting rod, replaces manual visual observation, improves the processing efficiency of the microgroove of the conducting rod, is also suitable for processing the microgrooves of various types of conducting rods, has better universality, and saves the design cost and the manufacturing cost.

The invention belongs to the technical field of advanced manufacturing, and particularly relates to a method for improving the fatigue performance of an additive structure. The method comprises the steps that the surface of a metal part for additive manufacturing is cleaned, and residual metal powder in the additive manufacturing process is removed; residual compressive stress is introduced to the surface of the part, the introduction process of the residual compressive stress is performed once or multiple times, and the compressive stress level can be adjusted according to the performance requirement of the part in the multiple-time introduction process; the part is placed in a high-temperature environment protected by vacuum or inert gas to be subjected to heat treatment; the residual compressive stress is introduced again, heat treatment is not carried out any more, and the strength of the residual compressive stress reaches the highest fatigue performance level of the material; and surface vibration finishing treatment is adopted, so that the surface roughness of the part is reduced. According to the method, the grain size of the surface of the structure is refined through a combination method, meanwhile, residual compressive stress is introduced between the surface and the subsurface of the part in a combined mode, and the fatigue resistance of the additive manufacturing part is improved by 30 MPa or above.

The present invention belongs to the field of advanced manufacturing technology, and discloses a device and method for printing an electric fluid with a complex curved multi-layer interconnected structure. The device includes a bed module that meets the motion requirements of the printing process; a printing module for printing processing, distance compensation, laser curing, and monitoring; and a parameter control module for graphic overlay, path planning, equipment driving, and process parameter regulation. The control method includes first preparing a conformal functional structure on the surface of a complex curved workpiece as a bottom functional structure layer; the material printed on the bottom functional structure is cured and sintered in situ by laser to achieve the preparation of a spatial interconnected structure; printing a functional layer between the spatial interconnected structures; printing a top functional structure; and repeating the above until the preparation of a multi-layer functional circuit structure is completed. The device of the present invention solves the problem of multi-material, high-efficiency, damage-free, high-precision, and integrated preparation of a conformal multi-layer interconnected structure with complex curved surfaces.

The invention relates to the technical field of advanced manufacturing of metal materials. A metallographic analysis method for detecting fine Laves phases in homogenized GH4169 alloy can clearly display the average particle size, the area proportion and the spatial distribution characteristics of the fine and dispersively distributed Laves phases by performing homogenizing heat treatment on as-cast GH4169 alloy and combining an optimized sample preparation process and an electrolytic corrosion technology. Compared with a traditional chemical erosion method, the method provided by the invention has higher detection precision, analysis efficiency, imaging quality and statistical reliability, and can realize accurate identification and quantitative analysis of trace Laves phases. The method is simple and convenient to operate, is suitable for evaluating the homogenization treatment effect and predicting the subsequent processing performance of the material, and provides a reliable basis for quality control and process optimization of the high-temperature alloy.

The invention relates to the technical field of hot isostatic pressing equipment, and provides rapid heating ultra-large type hot isostatic pressing equipment for powder metallurgy. The hot isostatic pressing equipment comprises a cylindrical high-pressure container, and a hollow interlayer is formed between the inner wall and the outer wall of the high-pressure container; the loading frame is arranged in the high-pressure container and is used for bearing powder metallurgy furnace charge; the composite heating coil is arranged in the hollow interlayer and comprises an outer-layer high-frequency coil which is spirally wound along the axial direction of the high-pressure container; and the middle-layer intermediate-frequency coils are crosswise arranged along the axial direction and the circumferential direction of the high-pressure container. Powder metallurgy is an advanced manufacturing technology for manufacturing parts through preparation, forming and sintering of metal powder, hot isostatic pressing equipment is a machine used for pressurizing and heating in the process, and the heating efficiency of powder metallurgy is improved through the accelerated heating ultra-large type hot isostatic pressing equipment.

The invention relates to the technical field of materials for integrated circuit etching equipment, in particular to a silicon carbide material for integrated circuit etching equipment and a preparation method of the silicon carbide material. The preparation method comprises the following steps: selecting high-purity silicon powder and high-purity graphite micro powder, preparing slurry from the high-purity silicon powder and the high-purity graphite micro powder according to a weight ratio of 1: (1-1.5), mixing and drying; the prepared powder is synthesized at the high temperature, decarburization and secondary purification are sequentially carried out, and high-purity silicon carbide powder is obtained; the method comprises the following steps: carrying out isostatic pressing high-temperature sintering, cutting and surface sand blasting roughening treatment, and carrying out silicon carbide deposition on a roughened silicon carbide piece by utilizing a chemical vapor deposition method to obtain the silicon carbide material. The prepared silicon carbide material can meet the requirements of advanced manufacturing procedures for part materials, the machining and deposition cost can be greatly reduced, and therefore batch and large-scale production of the silicon carbide core part materials is achieved.

The invention provides a SiC wafer processing method, an MEMS pressure sensor and a preparation method thereof, and relates to the technical field of advanced manufacturing. The invention provides a SiC wafer processing method, which comprises the following steps of sequentially extending an n-type buffer layer, a p-type epitaxial layer and an n-type epitaxial layer on the surface of an original SiC wafer to form a SiC wafer with the n-type buffer layer, the p-type epitaxial layer and the n-type epitaxial layer laminated on the surface; and after a Si wafer and the n-type epitaxial layer are temporarily bonded, the other surface of the original SiC wafer is ground, thinned and polished, and the processed SiC wafer is obtained. According to the method, the original SiC wafer and the Si wafer are ground and thinned after being bonded, so that deep etching processing of the SiC wafer is avoided, and the production cost and difficulty of the SiC wafer are remarkably reduced; and the morphology uniformity of the surface of the SiC wafer is improved through polishing.

The semiconductor temperature control equipment comprises a liquid nitrogen supply unit, a heat exchange unit and an energy recovery unit, the liquid nitrogen supply unit is communicated with the heat exchange unit through a liquid nitrogen pipeline, the heat exchange unit is communicated with the energy recovery unit through a heat transfer fluid pipeline, and the liquid nitrogen supply unit comprises a liquid nitrogen storage tank with a liquid nitrogen outlet; the heat exchange unit comprises a copious cooling heat exchanger and a load heat exchange end, the copious cooling heat exchanger is provided with a shell, a nitrogen pipe and a heat transfer fluid heat exchanger, the nitrogen pipe and the heat transfer fluid heat exchanger are arranged in the shell, the heat transfer fluid heat exchanger exchanges heat with the dividing wall of the nitrogen pipe, the heat transfer fluid heat exchanger is arranged beside the nitrogen pipe, and the load heat exchange end is used for cooling a target load. The low-temperature heat transfer fluid is cooled through the indirect refrigerating system, and then the target load is cooled through the low-temperature heat transfer fluid to achieve accurate temperature control. The problems of thermal shock and large temperature fluctuation caused by direct cooling of liquid nitrogen are solved, and the ultra-low-temperature process requirements of advanced manufacturing procedures of 3nm and below can be met.

The invention discloses a composite material curved surface impact positioning method based on optical fiber sensors, and belongs to the field of composite material structure monitoring, and the method comprises the steps: embedding or attaching a plurality of optical fiber sensors in a composite material curved surface structure, selecting a fiber bragg grating sensor, and carrying out the design of a composite material. By means of finite element analysis software and in combination with engineering experience, key areas such as connection parts, load concentration areas and the like and possibly damaged areas are accurately determined, optimized layout is carried out according to area characteristics and mechanical requirements, two-dimensional or three-dimensional latticed distribution is formed, and full-coverage monitoring of the curved surface is achieved. According to the invention, the fiber Bragg grating sensors are optimally arranged in key and vulnerable areas of a composite material curved surface to form two-dimensional or three-dimensional latticed distribution, and special flexible packaging and an advanced manufacturing process are matched to adapt to a complex curved surface, realize full-coverage monitoring, avoid a monitoring blind area of a traditional sensor and accurately capture impact information.