Method for quickly preparing synthetic glass microlens having adjustable curvature through excimer laser rotary etching

Abstract

The invention relates to a method for quickly preparing a synthetic glass microlens having adjustable curvature through excimer laser rotary etching, and belongs to the field of micro-optical devices and laser advanced manufacturing technology. A machining system is mainly composed of a computer, a laser, a laser homogenizer, a mask layer, a mask layer, a mask layer exchanging platform, a focusing object lens, a coaxial observation system, a rotating platform and a micromotion workbench. A synthetic glass PMMA is machined through a mask layer projection rotary etching method to make a microlens having good circularity, after mask layer design, preparation of optical paths a machining system and calibration of an axle center of the rotating platform, the shape and the size of a hole in mask layer is determined according to parameters of a microlens to be machined. The method can be used for making a microlens or a microlens array, and the method is low in heat effect influence and cost, high in efficiency and precision, good in repeatability without contact and having adjustable curvature.

Description

technical field [0001] The invention relates to a method for rapidly manufacturing organic glass microlenses with adjustable curvature radius by using excimer laser and mask projection rotary etching, and belongs to the technical field of micro-optical devices and laser advanced manufacturing. Background technique [0002] In the field of modern micro-optical systems, micro-lenses have the characteristics of miniaturization compared with traditional optical lenses, making micro-lenses can replace traditional optical systems in many fields, especially in the field of opto-mechanical integration, optical fiber connectors and optical fibers in the field of optoelectronics. Collimator, optical switch, optical information storage and other devices, input and output ports and connectors of various sensors and detectors in the field of optical sensing, secondary micro-manufacturing in the field of micro-manufacturing, and micro-lenses have increasingly broad applications. Applicati...

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Problems solved by technology

[0003] Traditional microlens processing methods mainly include compression molding, plastic molding, grinding, photolithography hot-melt molding, grayscale masking, LCVD, inkjet, etc. Most of the processing methods have low processing efficiency and low manufacturing efficiency. ...

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