512 results about "Metal nanoparticles" patented technology

The invention discloses a composite negative electrode material and a preparation method thereof and a lithium battery, the composite negative electrode material provided by the invention comprises a three-dimensional porous carbon material, and a lithium-loving metal and a lithium metal which are loaded on a three-dimensional porous carbon skeleton, and the three-dimensional porous carbon material is prepared by taking a ZIFs precursor as a raw material. The three-dimensional porous carbon material prepared by taking the ZIFs precursor as a raw material has a Zn / N-containing double-doped three-dimensional porous carbon skeleton, so that the problems of poor conductivity, insufficient lithium storage aperture and the like of the existing carbon skeleton are solved; a plurality of lithium-loving metal nanoparticles are loaded on the surface of the carbon skeleton, so that the lithium-loving property and the electron conductivity of the carbon skeleton are further enhanced, the uniform deposition of lithium is facilitated, and the growth of dendrites is inhibited; the porous carbon skeleton limits the lithium deposition space, the doped nanoparticles provide lithium-loving sites to guide uniform nucleation, the dual mechanisms synergistically inhibit dendritic crystal growth, and the safety of the lithium metal negative electrode is improved.

The invention provides a compound disinfectant for preventing and treating aquaculture virus diseases and a preparation method thereof. The composite disinfectant is prepared by introducing polyhexamethylene guanidine or a salt thereof, a quaternary ammonium salt compound, metal nanoparticles and an auxiliary agent into a water system as main raw materials, and is prepared by the following steps: adding a quaternary ammonium salt compound solution and a penetrating agent into a polyhexamethylene guanidine or salt solution thereof, and uniformly stirring and mixing to obtain a mixed solution A; slowly dropwise adding the metal nanoparticle dispersion liquid into the mixed solution A, starting ultrasonic treatment at the same time, and uniformly stirring and mixing to obtain a mixed solution B; dropwise adding the pH regulator solution into the mixed solution B, regulating the pH, adding the preservative solution, supplementing water, uniformly mixing, standing and curing to obtain the composite disinfectant. The compound disinfectant aims at achieving synergistic interaction, finally achieves the comprehensive prevention and treatment effects of being efficient, low in toxicity, broad in spectrum and not prone to inducing drug resistance, and particularly achieves efficient and safe prevention and control on fish, shrimp and crab virus diseases so as to meet the urgent requirement for healthy aquaculture.

The invention discloses a negative electrode composite current collector of a non-negative electrode lithium battery and a preparation method of the negative electrode composite current collector. The preparation method comprises the following steps: preparing a metal nanoparticle-metal organic framework composite material MNP-MOF-NH2 by adopting a solvothermal method; the preparation method comprises the following steps: adding MNP-coated MOF-NH2, a conductive agent and a binder into a solvent, mixing and uniformly stirring to obtain a negative electrode coating slurry, coating the surface of a negative electrode current collector foil with the negative electrode coating slurry to form a first coating, placing the first coating in a reaction chamber of atomic layer deposition equipment, introducing a metal source and gas in an alternate feeding deposition mode to generate a layer of compact lithium-loving metal oxide, and carrying out vacuum drying to obtain the lithium-loving metal oxide negative electrode. And drying to obtain a double-gradient composite protective layer, namely the negative electrode composite current collector of the non-negative electrode lithium battery. According to the invention, a double-layer structure of a compact lithium-loving layer, a porous metal organic framework and a metal particle composite layer is constructed, and the upper lithium-loving metal oxide induces uniform nucleation of lithium, so that the deposition barrier is reduced. The network structure of the lower layer MOF provides a space limiting effect to accommodate and separate lithium deposition, in addition, polar groups contained in the MOF promote desolvation and transport of Li +, and metal nanoparticles accelerate ion / electron transport.

The invention relates to a method and a system for reversibly regenerating an inactivated carbon dioxide reduction electrode based on electro-catalysis, which comprises the following steps: firstly, controllably removing pollutants on the surface of the electrode by reversely applying an oxidation potential, and then introducing an electroplating solution containing metal ions and applying a dynamic reduction potential; metal nanoparticles are deposited on active sites on the surface of the catalyst in situ, and the active sites are reconstructed and optimized. According to the method, the initial catalytic performance of the electrode can be basically recovered, the catalytic activity can be recovered, the operation process is compatible with the continuous production requirement, and a core guarantee is provided for efficient and continuous industrial application of the electrocatalytic carbon dioxide reduction technology.

The invention relates to a preparation method and application of a two-dimensional ultrathin porous nitrogen-doped carbon composite material. According to the invention, a metal salt nitrate ion mediation method is adopted, and the ultrathin porous carbon nanosheet loaded with metal single atoms and metal nanoparticles is successfully prepared through decomposition of a prepolymerized dopamine-metal salt precursor. By changing the type of metal salt ligand anions, accurate regulation and control between a non-porous structure and a porous structure can be realized. Endogenous multi-scale pore defects are introduced into the surface of the carbon nanosheet, so that the impedance matching of the prepared carbon nanosheet system is effectively improved, and meanwhile, high conductivity is kept. According to the prepared material, the dielectric constant is improved by introducing a porous structure, impedance matching is optimized, and the electromagnetic wave absorption capacity is improved.

The invention provides a refractive index sensor based on surface lattice resonance, belongs to the technical field of micro-nano sensors, and aims to solve the problem that the sensitivity and quality factor are low when the environmental refractive index is detected. The structure of the refractive index sensor sequentially comprises a substrate, a metal layer, a dielectric layer and a periodic structure layer from bottom to top, the periodic structure layer is an array formed by periodically arranging metal nanoparticles according to a rule, and the metal nanoparticles are hemispherical metal nanoparticles. The sensor device provided by the invention can realize high refractive index sensitivity and high quality factor, the refractive index sensitivity reaches 562.42 nm / RIU, the quality factor (FOM) is 54.38 RIU-1, and the sensor device is very suitable for biomedical sensing application.

Disclosed is a photodetector, preferably a mid-infrared photodetector, composition comprising semiconductor particles (101) comprising a band gap of less than 1.5 eV, preferably less than 1eV, and metal nanoparticles (103), wherein the semiconductor particles are interconnected via electrically conducting bridges (102) comprising the metal nanoparticles thereby forming an electrically conductive network. A photodetector comprising the composition and a method of manufacturing the composition are also described.

The application discloses a metal organic framework reference solid-state electrolyte and a preparation method and application thereof, the electrolyte takes a commercial diaphragm as a base, takes a metal organic framework as a carrier, and has metal nanoparticles deposited on the base; wherein the metal nanoparticles provide nucleation sites for the metal organic framework on the base; the thickness of the metal organic framework layer of the electrolyte is 0.2-30 microns, and the mass of the electrolyte is 0.2-30 mg / cm 2 The application has the following advantages: (1) the electrolyte can construct a high specific energy lithium metal battery; (2) the electrolyte has excellent mechanical stability, and can still maintain structural stability even after experiencing hundreds of electrochemical cycles; (3) the electrolyte has good compatibility with lithium metal, and can significantly improve the cycle life of the lithium metal battery; and (4) a soft package battery of LiNi 0.8 Co 0.15 Al 0.05 O2 / / Li (NCA / / Li, 3-35 mg cm ‑2 NCA loading) has an energy density of 200-450 Wh / kg and stable electrochemical performance (50-1000 cycle life, 60-95% capacity retention rate).

The invention relates to the technical field of phase-change materials, and discloses a light-operated composite phase-change material catalyst and a preparation method and application thereof, and a light-operated phase-change composite material is a paraffin-encapsulated metal M / halloysite / sodium alginate composite phase-change material; according to the metal M / halloysite / sodium alginate composite phase change material for packaging the paraffin, halloysite / sodium alginate aerogel loaded by metal M nanoparticles is used as a supporting material, and the paraffin is packaged in the metal M / halloysite / sodium alginate composite phase change material. According to the invention, the metal M / halloysite / sodium alginate composite phase change material for packaging paraffin is prepared by using the halloysite nanotube, the aerogel in the invention has a relatively large paraffin encapsulation amount, the encapsulation efficiency can reach up to 86%, and the phase change material can still maintain good mechanical and chemical stability after multiple heat absorption and release cycles. The melting and solidification of paraffin in the composite phase change material are controlled by turning on and turning off the light source, and the exposure and shielding of active sites are realized, so that the catalytic reaction is accurately started and stopped, and the complete starting and pausing of the reaction are realized.

The application provides a temperature self-compensation strain sensor sensitive layer composite material and a preparation method thereof, and belongs to the technical field of functional materials. The composite material is prepared from raw materials including the following mass percentages: metal nanoparticles 25-35%, insulating oxide nanoparticles 2-3%, dispersing agent 0.1-0.5%, and the balance solvent; the metal nanoparticles have a positive temperature coefficient of resistance; and the insulating oxide nanoparticles include aluminum oxide nanoparticles, silicon oxide nanoparticles, zirconium oxide nanoparticles or chromium oxide nanoparticles. The composite material provided by the application can be used as a sensitive layer of a temperature self-compensation strain sensor, can avoid strain signal disturbance caused by environmental temperature changes, can make the strain sensor have a temperature self-compensation function, and can further simplify the system of the strain sensor without using an external circuit and without changing the size and structure of the strain sensor.

An actuator includes a twisted and coiled polymer fishing line and an untwisted resistance heating wire (TCPFLRHW) actuator and a coating on the TCPFLHRW actuator. The coating includes a mixture of carbon nanotubes, metal nanoparticles, and mesoporous carbon nanoparticles, and in some variations, the coating includes a polymer matrix with the carbon nanotubes, metal nanoparticles, and mesoporous carbon nanoparticles disposed in the polymer matrix. And the actuator exhibits enhanced actuator parameters such as actuator efficiency, hydrophobicity, power consumption, actuation frequency, dynamic actuation and cooling rate.

The present invention relates to a Ru-Ni bimetallic catalyst for the selective hydrogenation of a quinoline organic hydrogen storage carrier, and a preparation method therefor and the use thereof. In the catalyst, carbon nitride is used as a carrier, and metal nanoparticles Ru and Ni serve as active components and are jointly loaded on the carbon nitride carrier; and the carbon nitride is prepared by mixing carbon tetrachloride, ethidene diamine and nano-silica, reacting same to obtain a carbon nitride polymer, then calcining same at 750-850ºC, performing a desilicification treatment, and then filtering and drying same. The catalyst provided in the present application has good catalytic hydrogenation performance in the selective hydrogenation of the quinoline organic hydrogen storage carrier and can achieve the omission of a solvent in a reaction system; the reaction is simple, green and environmentally friendly, and the gravimetric hydrogen storage density of the system can be maximally ensured when a quinoline compound is used as an organic hydrogen carrier; moreover, the catalyst also has a good cycling stability.

The invention belongs to the technical field of polymer composite materials, and discloses a leather collagen fiber / polyurethane composite material and a preparation method thereof. The metal-polyphenol coordination network interface layer provided by the invention is accurately positioned on the surface of the leather collagen fiber and is between the fiber and a waterborne polyurethane matrix, and a three-stage structure of'fiber-interface layer-matrix 'is constructed. The interface layer forms a stable network through coordination of metal nanoparticles and polyphenol, and forms chemical bridging with a WPU matrix through secondary bonding. According to the structure, the tearing strength and the tensile capacity of the composite material are greatly improved, the limitation that reinforcement and toughening are difficult to consider in traditional physical blending modification is broken through, and a synergistic reinforcement effect is generated.

Disclosed are compositions comprising extracts of kale and a number of other plants in synergistic mixtures. Methods of forming metal nanoparticles and nanoparticles formed using the methods are disclosed.

The application provides a bifunctional composite film of multi-guest molecule synchronous gas phase coordination deposition, metal precursors and organic ligands are dissolved in an organic solvent, a porous inorganic substrate is immersed in the organic solvent, and a substrate loaded with a MOF layer is obtained through a hydrothermal reaction; the substrate loaded with the MOF layer, nitrogen-containing organic ligands and an organic metal compound are placed in a closed container, a MOF composite film with metal nanoparticles is obtained through gas phase deposition, and the MOF composite film is calcined at 160-240 DEG C for 1-4 hours to obtain the bifunctional composite film of multi-guest molecule synchronous gas phase coordination deposition; through molecular level design, the catalytic active center is firmly anchored in the separation matrix, and the problem that the active component is prone to loss is solved. The prepared composite film has excellent oil-water separation performance and efficient photo-Fenton catalytic degradation capacity, and provides an innovative material solution for advanced water treatment.

The invention relates to a composite diaphragm, a preparation method thereof and a lithium-sulfur battery, and the composite diaphragm comprises a base membrane and a functional coating arranged on at least one surface of the base membrane in the thickness direction; the functional coating comprises a carbon nanotube composite material, the carbon nanotube composite material comprises a carbon nanotube and metal nanoparticles encapsulated at one end of the carbon nanotube, and the other end of the carbon nanotube is of an opening structure; the mass ratio of the metal nanoparticles in the carbon nanotube composite material is 15%-25%. Therefore, the shuttle effect of polysulfide can be effectively inhibited, the utilization rate of the positive electrode material is improved, and the redox reaction kinetics of the battery is improved, so that the first coulombic efficiency, the discharge capacity and the rate capability of the battery can be remarkably improved. In addition, the functional coating can also improve the wettability of the electrolyte on the composite diaphragm, promote the transmission of lithium ions and improve the puncture resistance of the composite diaphragm, so that the internal resistance of the battery can be reduced, and the safety of the battery can be improved.

Method for manufacturing a flexible strain sensor, comprising: Placing a flexible substrate on a movable stage in a working chamber, in which the movable stage, suitable for a desired movement according to a control signal, and a nozzle, suitable for spraying towards an upper surface of the movable stage, are installed, and with which a first pressure control unit, suitable for controlling an internal pressure of the working chamber, is combined; and preparing a printing material mixture, which comprises metal nanoparticles and carbon nanotubes (CNTs) in a powder form, which is to be introduced into a printing material tank, which is provided with an upper outlet that communicates with a nozzle via a first communication line, and a lower inlet, with which a second pressure control unit, suitable for controlling pressure, is combined. Control, by means of a control unit, a movement of the movable stage by providing a predetermined motion control signal to the movable stage in order to move the flexible substrate at a desired speed along a path which corresponds to a predetermined conductor pattern of a strain sensor, Forming a relatively low-pressure atmosphere within the working chamber by operating the first pressure control unit and simultaneously a relatively high-pressure atmosphere at a lower inlet of the pressure material tank by operating the second pressure control unit, In parallel with controlling the movement of the movable stage, the printing material mixture is forcibly transmitted in an aerosolized state through the first communication line from the printing material tank to be sprayed through the nozzle towards a surface of the flexible substrate by means of a compression wave, which is caused by a pressure difference between the low-pressure atmosphere and the high-pressure atmosphere. Direct printing of a predetermined conductor pattern of the strain sensor onto the flexible substrate by a process in which the printing material mixture, which is extruded through the nozzle, collides with the surface of the flexible substrate to create cracks on the surface, and the CNTs penetrate into the cracks and are mechanically anchored to the flexible substrate, and then the following metal nanoparticles and CNTs of the printing material mixture are deposited in a predetermined width and height on the surface of the flexible substrate. Connecting a first and a second lead wire, which extend electrically to protrude from the flexible substrate, to both ends of the predetermined conductor pattern of the strain sensor and Binding a flexible cover, which has the same size as the flexible substrate, to the surface of the flexible substrate on which the predetermined conductor pattern is printed, so that the predetermined conductor pattern is inserted between the flexible substrate and the flexible cover.

The invention belongs to the field of catalysts, and particularly relates to a self-pillared all-silicon molecular sieve supported catalyst as well as a preparation method and application thereof. The catalyst mainly comprises a nanoscale Silicalite-2 molecular sieve rich in silicon hydroxyl defect sites, an active metal component and an auxiliary agent metal component, wherein the carrier presents a self-pillared morphology formed by splicing and assembling rod-like microcrystals with the particle size of 10-40 nm, after the active metal is loaded by rich silicon hydroxyl defect sites on the surface of the carrier, the interaction between the metal and the carrier can be remarkably enhanced, and the obtained highly-dispersed active metal nanoparticles with the particle size of 1-5 nm are obtained. When the catalyst is applied to propane dehydrogenation reaction, the catalyst shows excellent catalytic activity, the propane conversion rate is 41% or above, the propylene selectivity is up to 97% or above, and good stability provides a new technical approach for developing a propane dehydrogenation fixed bed process which is low in operation cost, low in energy consumption and free of frequent regeneration.

The invention provides a composite silicon-carbon negative electrode and a preparation method and application thereof, and relates to the technical field of all-solid-state lithium ion batteries, the composite silicon-carbon negative electrode comprises: a silicon-carbon negative electrode matrix; the plurality of independent lithium-loving metal nanoparticles are arranged on the surface of the silicon-carbon negative electrode substrate; and the tough interface layer covers the surface of the silicon-carbon negative electrode substrate provided with the lithium-loving metal nanoparticles. The core of the invention is to provide a substrate modification-interface packaging composite structure, firstly, a discontinuous lithium-loving metal nano island array is created on a silicon carbon negative electrode substrate, and then, a complete tough interface layer is used for packaging and covering the discontinuous lithium-loving metal nano island array. According to the all-solid-state battery, the electrochemical performance of the all-solid-state battery can be effectively improved through the collaborative design of the discontinuous nano island and the tough packaging layer.

The application discloses a kind of multistage nano-reactor array base nano-channel and preparation method thereof;The application first prepares periodic mesoporous organosilicon Au-PMO loaded with gold nanoparticles, then adopts multi-element assembly strategy, constructs nano-reactor array layer on the surface of porous anodic aluminum oxide AAO by spin coating method, and finally obtains Au-PMO / AAO hetero thin film with rich mesoporous structure and adjustable thickness.The gold nanoparticles loaded thereon are uniform in size and uniformly distributed, so that the thin film exhibits peroxidase-like activity.In addition, PMO / AAO thin film with different metal nanoparticles loaded can also be constructed using this method, paving the way for subsequent sensing, gating and catalytic applications.

This invention discloses a superlattice multiplication layer avalanche diode and its fabrication method. The single-photon avalanche diode includes a graphene transparent electrode and, from bottom to top, an InP substrate, an n-type buffer layer, a superlattice absorption region, a p-type charge layer, a superlattice gradient region, a superlattice multiplication region, a p-type contact layer with a p-type contact window, and a passivation layer. The graphene transparent electrode is grown on the passivation layer and the p-type contact window, forming an ohmic contact with the p-type contact region. Magnetic metal nanoparticles that generate a local magnetic field are embedded in the superlattice multiplication region. The magnetic metal nanoparticles are uniformly distributed in-plane within a depth range of 5-400 nm from the interface in the light-gathering direction of the superlattice multiplication region. This invention combines the internal bandgap optimization of the superlattice with the external limiting pump capability of graphene to produce a synergistic effect, providing a single-photon avalanche diode with low dark count rate, weak afterpulse effect, high detection efficiency, and the ability to operate at relatively high temperatures.

This invention discloses a material with high photothermal conversion efficiency, its preparation method, and its application in neural modulation, belonging to the field of biomedical technology. In this method, liquid metal is ultrasonically spun into nanoscale particles. Using these liquid metal nanoparticles as templates, hollow nanoshells composed of ultra-small metal nanoparticles can be prepared through an electrocoupling reaction with a metal salt. This method is simple, easy to operate, and applicable to various metals. The prepared material with high photothermal conversion efficiency has a hollow structure, a rough surface, and pores. This unique structure endows it with a strong photon trapping ability, significantly enhancing light absorption and exhibiting ultra-high photothermal conversion efficiency. This invention allows for the injection of this material into the nerve, utilizing its excellent photothermal effect for rapid and precise neural modulation, thereby achieving effective prevention and treatment of autonomic nervous system-related diseases, and showing promising application prospects.

The present application relates to the technical field of supported metal nanoparticle catalysts, in particular to a supported nickel-based carbide acetylene selective hydrogenation catalyst, a preparation method and application thereof. The catalyst is formed by supporting a bimetallic carbide active component on a nanometer gallium oxide carrier, the bimetallic carbide is Ni3GaC 0.7 , and the loading amount of Ni in the catalyst is 1-40 wt.%. A nickel salt is loaded on a nanometer gallium oxide material by an impregnation method, then a NiO / Ga2O3 catalyst is obtained by calcining in air; then the catalyst is treated by heating in a mixed gas of carbon dioxide and hydrogen, and a supported Ni3GaC 0.7 / Ga2O3 catalyst is obtained. The acetylene selective hydrogenation reaction performance test results show that the Ni3GaC 0.7 / Ga2O3 catalyst exhibits excellent selectivity (about 85%) in the hydrogenation reaction, and long-term performance test also shows that the supported catalyst has good stability.

The invention belongs to the field of composite material preparation, and relates to a preparation method of a flexible vegetation-imitating green leaf camouflage material, which comprises the following steps: doping chrome green Cr2O3 particles in a polydimethylsiloxane (PDMS) matrix to form a bottom film with the appearance color similar to that of green vegetation, and then coating a layer of film doped with Au or Ag and other metal nanoparticles on the bottom film to obtain the flexible vegetation-imitating green leaf camouflage material. Therefore, the wave modulation method based on surface plasmon enhanced absorption is realized, the material can imitate the reflectivity of green vegetation in a near-infrared band, PDMS is taken as a matrix and doped with chrome green particles, so that the color of the film is similar to that of a green plant macroscopically, Ag nanorods doped in the upper PDMS coating can enable the chrome green coating to imitate a red edge effect, and the reflectivity of the green vegetation can be simulated in a near-infrared band. Vegetation is simulated in a near-infrared band. The two layers of films are compounded, so that the camouflage material and the vegetation green leaves have the same color and spectrum, and the preparation method and the material have very wide application prospects.

In order to improve the long-term cycling stability of a lithium metal negative electrode and inhibit dendritic crystal growth of lithium, the invention provides a lithium metal negative electrode and a preparation method thereof, the lithium metal negative electrode comprises a lithium metal and a lithium-loving skeleton, and the lithium-loving skeleton is used for loading the lithium metal; the lithium-loving framework comprises a three-dimensional metal framework, a nano metal structure and a MnOx layer, and the nano metal structure is attached to the surface of the three-dimensional metal framework; the MnOx layer is attached to the surface of the nano metal structure; the nano metal structure comprises at least one of metal nanowires and metal nanoparticles; and the MnOx layer comprises at least one of MnO2, Mn2O3 and MnO.

Disclosed are polymer compositions incorporating metal nanoparticles, and medical devices or other products made therefrom. The disclosed polymer compositions can be used to form medical devices, including implantable medical devices, that have effective antimicrobial properties. The disclosed polymer compositions incorporate metal nanoparticles that function without releasing metal (e.g., silver) ions. The polymer compositions may have anti-UV properties conferred by the metal nanoparticles.

The application discloses a solar cell and a photovoltaic device, an electric device and a power generation device. The solar cell comprises a first electrode and a first charge transport layer. The first electrode comprises a first metal oxide layer, a second metal oxide layer, a metal layer and metal nanoparticles. The metal layer is arranged between the first metal oxide layer and the second metal oxide layer. The metal nanoparticles are located between the second metal oxide layer and the first charge transport layer. The application utilizes the metal nanoparticles to improve the photoelectric conversion efficiency of the solar cell.

A method for preparing a nano-titanate, a nano-titanic acid and a nano-TiO2 containing embedded A nanoparticles is provided respectively. In this method, a Ti-T alloy with a A-group element solidly dissolved therein is used as a titanium source, and reacted with an alkali solution under a certain condition. In combination with subsequent treatment, the preparation of a titanate nanotube, a titanic acid nanotube, and a TiO2 nanotube / rod containing embedded A nanoparticles, respectively, is further achieved with high efficiency and low cost. Moreover, a method for preparing metal nanoparticles is also provided by removing the matrix of the composites. The present preparation methods is characterized by simple process, easy operation, high efficiency, low cost. The product is of promising application in polymer-based nanocomposites, ceramic materials, catalytic materials, photocatalytic materials, hydrophobic materials, effluent degrading materials, bactericidal coatings, anticorrosive coatings, marine coatings.

The present invention relates to a gene carrier including a nucleic acid molecule containing a gene of interest conjugated to the surface of a metal nanoparticle, which is delivered into cells and expressed, a use thereof, a gene expression method using the same, and a method of preparing the same.

The invention discloses a photoresist composition based on metal nanoparticles and application of the photoresist composition. The photoresist composition comprises metal nanoparticles, a photosensitizer, an anti-diffusion agent and a photoresist solvent, wherein the metal nanoparticles are silver nanoparticles, copper nanoparticles and gold nanoparticles. The photoresist composition has good film-forming property and excellent patterning imaging capability, photoetching patterns with different resolutions can be obtained through ultraviolet, electron beam or extreme ultraviolet exposure, and the formed patterns have good conductivity after being subjected to heat treatment and can be directly used for processing micro-nano devices.