The invention provides a point
diffraction phase-shifting interference measurement
system and method based on polarization focusing light splitting, and the
system comprises a polarization focusing light splitting unit which is used for separating an incident
light beam according to a
circular polarization state and focusing the incident
light beam to different space focusing positions; the
wavefront modulation unit is arranged at the spatial focusing position, the
wavefront modulation unit comprises a
first light through hole and a second light through hole, the
first light through hole is used for converting one separated incident
light beam into a reference light beam, and the second light through hole is used for allowing the other separated incident light beam to pass through and is recorded as a
test light beam; and the polarization phase-shifting detection unit is used for acquiring interference intensity information of a combined light beam of the reference light beam and the
test light beam in different polarization directions. The technical problems that an existing point
diffraction interference measurement technology cannot achieve synchronous phase shifting and the
contrast ratio of interference fringes is low are solved, the
contrast ratio and the resolving precision of the fringes in the point
diffraction interference measurement technology are greatly improved, and the resolving speed is higher.