An on-
chip accelerometer based on integrated optical
waveguide, the lens
optical fiber and mechanical structure
assembly are compounded, and the interferometric
optical fiber sensor based on spring-
mass push-pull structure is formed. Wherein, the spring
cantilever beam increases the intermediate vertical beam and the semicircular small
bending beam on the basis of the serpentine folding beam, connects the external frame and the
mass, and jointly constitutes the spring-
mass oscillator structure. The application effectively reduces the cross-axis sensitivity of the
accelerometer and suppresses the cross-axis
crosstalk. The mass contains two convex structures, the top surface of which is used as a reflecting surface, and a layer of
metal film is sputtered during
processing to increase the
reflectivity. The
air cavity formed by the two mode spot
converters and the mass forms a balanced interferometer structure, which adopts the design of
Michelson interferometer combined with push-pull structure, further improves the sensitivity, can be compatible with various
demodulation schemes, and effectively suppresses the
common mode noise. The application directly etches the integrated optical
waveguide on the
chip as the sensing
optical path, which effectively suppresses the polarization
fading problem while reducing the
package size. The highly symmetrical design of the sensing
optical path makes the
noise characteristics of the two arms of the sensor nearly consistent, greatly reduces the
environmental noise during interference, and improves the
signal-to-
noise ratio. The
accelerometer structure is compact, the manufacturing process is simple, and is suitable for
aerospace and other scenes with requirements of light weight and high performance.