Astigmatic compensation type interference detecting device and method for optic free curved surfaces

An interference detection, free technology, applied in the direction of using optical devices, measuring devices, instruments, etc., to achieve the effect of easy processing

Active Publication Date: 2017-06-13
NANJING UNIV OF SCI & TECH
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Problems solved by technology

[0004] The purpose of the present invention is to provide an astigmatism-compensated interference detection device and detection method suitable for a class of optical free-form surfaces with astigmatism as the main surface error, which solves the problem of one-to-many high-precision detection of some optical free-form surfaces

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  • Astigmatic compensation type interference detecting device and method for optic free curved surfaces
  • Astigmatic compensation type interference detecting device and method for optic free curved surfaces
  • Astigmatic compensation type interference detecting device and method for optic free curved surfaces

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Embodiment 1

[0038] Combine figure 1 , The present invention is an optical free-form surface astigmatism compensation type interference detection device and detection method, including He-He laser 1, beam expansion system 2, 1 / 2 wave plate 3, polarization beam splitting prism 4, first quarter wave Plate 5 and second quarter wave plate 8, standard plane mirror 6, phase shifter 7, first converging lens 9, free-form surface to be tested 10, second converging lens 11, plane mirror 12, polarizing plate 13, Rotating ground glass screen 14, imaging objective lens 15, detector 16, display 17, computer 18. The beam expansion system 2 is a Kepler telescope structure, composed of a first lens 2-1, a small aperture stop 2-2, and a second lens 2-3, the first lens 2-1 and the second lens 2-3 The focal points of are coincident, and the aperture stop 2-2 is placed on the focal points of the first lens 2-1 and the second lens 2-3. The linearly polarized light emitted by the He-Ne laser 1 forms a collimate...

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Abstract

The invention discloses an astigmatic compensation type interference detecting device and method for optic free curved surfaces. The device comprises He-He lasers, a beam expander, a 1 / 2 wave plate, a polarized beam splitter, a first 1 / 4 wave plate, a second 1 / 4 wave plate, a standard plane reflector, a phase shifter, a first convergent lens, a to-be-tested free curved surface, a second convergent lens, a plane reflector, a polarizer, a rotating frosted glass screen, an imaging objective lens, a detector, a displayer and a computer. The method comprises the steps of placing the to-be-tested free curved surface in an inclined state to make test beams come in a specific angle in an inclined mode to compensate for main surface shape astigmatic error components of the to-be-tested free curved surface, therefore reducing the degree of divergence of the subsequent test beams, and making the stripes discernable on the detector. The detector collects a series of phase-shifting interferograms which are treated with a wave front reconstruction algorithm to obtain a surface shape of the to-be-tested free curved surface. According to the astigmatic compensation type interference detecting device and method for optic free curved surfaces, the astigmatic compensation method is used for testing optic free curved surfaces for which the main surface shape error components are astigmatism, the stability is high, and the cost is low.

Description

Technical field [0001] The invention relates to an interference detection device and a detection method, in particular to an astigmatism compensation type interference detection device suitable for an optical free surface with astigmatism as the main surface error component. Background technique [0002] In order to meet the increasing requirements for high image quality and miniaturization at the same time, optical free-form surfaces appear in imaging optical systems, especially off-axis reflective systems. The application of free-form surface elements improves the degree of freedom of optical design and can better correct off-axis aberrations caused by non-coaxiality. Compared with the design and processing technology of optical free-form surfaces, the high-precision detection of optical free-form surfaces is a technical bottleneck restricting the application of optical free-form surfaces in the imaging field. [0003] At present, the detection methods for optical free-form surf...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/24G01B9/02
CPCG01B9/02029G01B9/02058G01B9/02096G01B11/2441
Inventor 袁群窦沂蒙霍霄殷慧敏陈露姚艳霞高志山
Owner NANJING UNIV OF SCI & TECH
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