High steepness convex quadric aspherical aberration-free point Sub-Aperture Stitching measurement method

Abstract

The invention discloses a measuring method of non-aberration-point sub-aperture stitching for a high and steep convex second non-spherical surface, which divides the measured second non-spherical surface into a plurality of sub-apertures so that the test beam emitted by a surface wave interferometer roughly irradiates a divided first sub-aperture region thereof, measures the surface error of the sub-aperture with the surface wave interferometer under the test condition of non-aberration-point and saves the data, measures the second sub-aperture region and all the remaining sub-apertures in the same way and inputs all the measured data of the sub-apertures to process, and reconstructs the all-caliber face through non-aberration-point stitching algorithm so as to obtain the surface error of the measured second non-spherical surface. The invention needs no non-spherical surface compensator, and is a measuring method for high and steep convex second non-spherical surface with low cost and high precision.

Description

technical field [0001] The invention belongs to the technical field of optical testing, and mainly relates to an aberration-free point method sub-aperture splicing measurement method of a high-steep convex quadratic aspheric surface. Background technique [0002] Aspheric surface has outstanding advantages such as correcting aberrations, improving image quality, expanding field of view, and simplifying system structure, etc., and has been widely used in modern optical systems. In recent years, as the optical system has gradually moved towards high-end applications and the optical design software has been continuously enhanced, various new, special-shaped, and complex-shaped optical mirrors have emerged, the most representative of which is the high-steep aspheric surface. [0003] The conformal optical surface is a typical high-steep aspheric surface. Its outstanding feature is that in the design process, in addition to meeting the imaging requirements, it focuses more on imp...

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Problems solved by technology

[0007] Su Xianyu and others proposed in the Chinese patent application number "200710048201.9" "a large-aperture aspheric mirror full-field detection method" that the mobile interferometer continuously scans along the symmetry axis of the aspheric surface to obtain the three-dimensional interference fringes of the whole field that change with time, and then reprocess the data. Construct the full-field information of the measured aspheric surface without the need for aspheric compensators and sub-aperture splicing, but the measurement resolution is not high, and the measurement accuracy is limited by the scanning motion accuracy, and for high-steep convex quadratic aspheric surfaces difficult to realize

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