Glass-metal-blown miniature hemispherical resonant gyroscope and manufacturing method thereof
A technology of hemispherical resonant gyroscope and glass metal, which is applied in the direction of gyroscope/steering sensing equipment, steering sensing equipment, measuring device, etc., can solve the problems of limiting the development and application of micro-spherical resonant gyroscope and the low level of micromachining technology, and achieve good results. Impact resistance, low cost, high performance effect
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[0033] The present invention will be described in detail below in conjunction with specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but do not limit the present invention in any form. It should be noted that those skilled in the art can make several modifications and improvements without departing from the concept of the present invention. These all belong to the protection scope of the present invention.
[0034] Such as figure 1 As shown, the present embodiment provides a glass-metal blowing micro-hemispherical resonator gyroscope, comprising:
[0035] A cuboid silicon substrate 1;
[0036] A hemispherical shell-type central harmonic oscillator 2;
[0037] Eight hemispherical shell electrodes 3 evenly distributed around the hemispherical shell central resonator 2, including four driving electrodes and four detecting electrodes, are connected to the glass metal pins 10 through leads;
[0038] Amo...
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