Glass-metal-blown miniature hemispherical resonant gyroscope and manufacturing method thereof

A technology of hemispherical resonant gyroscope and glass metal, which is applied in the direction of gyroscope/steering sensing equipment, steering sensing equipment, measuring device, etc., can solve the problems of limiting the development and application of micro-spherical resonant gyroscope and the low level of micromachining technology, and achieve good results. Impact resistance, low cost, high performance effect

Active Publication Date: 2014-12-10
SHANGHAI JIAO TONG UNIV
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Problems solved by technology

However, due to the low level of micro-machining technology in our country, this limits the develop

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  • Glass-metal-blown miniature hemispherical resonant gyroscope and manufacturing method thereof
  • Glass-metal-blown miniature hemispherical resonant gyroscope and manufacturing method thereof
  • Glass-metal-blown miniature hemispherical resonant gyroscope and manufacturing method thereof

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Embodiment Construction

[0033] The present invention will be described in detail below in conjunction with specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but do not limit the present invention in any form. It should be noted that those skilled in the art can make several modifications and improvements without departing from the concept of the present invention. These all belong to the protection scope of the present invention.

[0034] Such as figure 1 As shown, the present embodiment provides a glass-metal blowing micro-hemispherical resonator gyroscope, comprising:

[0035] A cuboid silicon substrate 1;

[0036] A hemispherical shell-type central harmonic oscillator 2;

[0037] Eight hemispherical shell electrodes 3 evenly distributed around the hemispherical shell central resonator 2, including four driving electrodes and four detecting electrodes, are connected to the glass metal pins 10 through leads;

[0038] Amo...

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Abstract

The invention provides a glass-metal-blown miniature hemispherical resonant gyroscope and a manufacturing method thereof. The gyroscope comprises a cuboidal silicon base, a hemispherical shell type central resonator and eight electrodes, wherein the eight electrodes are uniformly distributed around the central resonator, consist of four drive electrodes and four detection electrodes and are connected to pins through leads; the drive electrodes and the detection electrodes can achieve electrostatic drive and detection through applying positive and negative voltage to corresponding pins; the central resonator and the hemispherical shell type electrodes are manufactured by adopting a glass metal blowing process. The gyroscope adopts an MEMS (Micro-Electromechanical Systems) process for processing, is simple in structure, small in volume and relatively high in accuracy, and has great development prospects.

Description

technical field [0001] The invention relates to a solid wave mode matching gyroscope in the field of micro-electromechanical technology, in particular to a glass-metal blown micro hemispherical resonant gyroscope and a preparation method thereof. Background technique [0002] Gyroscope is an inertial device that can be sensitive to the angle or angular velocity of the carrier, and it plays a very important role in the fields of attitude control, navigation and positioning. With the development of national defense technology and aviation and aerospace industries, the requirements of inertial navigation systems for gyroscopes are also developing in the direction of low cost, small size, high precision, multi-axis detection, high reliability, and adaptability to various harsh environments. The micro gyroscope based on MEMS technology is processed by batch manufacturing technology, its cost, size, and power consumption are very low, and its environmental adaptability, working li...

Claims

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Application Information

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IPC IPC(8): G01C19/56
CPCG01C19/5642G01C19/5663
Inventor 张卫平刘亚东唐健汪濙海成宇翔孙殿竣陈文元
Owner SHANGHAI JIAO TONG UNIV
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