Method for rapidly estimating film thickness uniformity of hemispherical harmonic oscillator based on optical simulation

A hemispherical oscillator and optical simulation technology, applied in the direction of using optical devices, measuring devices, instruments, etc., can solve the problems of complex process, affecting oscillator performance, long experimental period, etc., achieving high timeliness, improved efficiency, and easy readability. sexual effect
CN109458940AActive Publication Date: 2019-03-12CHINA ELECTRONICS TECH GRP NO 26 RES INST
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
CHINA ELECTRONICS TECH GRP NO 26 RES INST
Publication Date
2019-03-12

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Abstract

The invention belongs to the field of hemispherical resonant gyroscopes, particularly relates to a hemispherical resonant gyroscope harmonic oscillator metallizing process in a satellite inertial navigation system, and particularly provides a method for rapidly estimating the film thickness uniformity of a hemispherical harmonic oscillator based on optical simulation. The method includes the stepsthat cavity measuring and sample measuring are carried out in a vacuum cavity of coating equipment, and parameter data is acquired; three-dimensional models of a coating cavity and a coating sample are established according to the measured parameter data; in the three-dimensional models, the relative positions of the coating samples and targets are at least adjusted, the illumination parameter irradiance of the surface of the coating sample, namely the hemispherical harmonic oscillator is acquired through optical simulation, and the film thickness uniformity is estimated according to the irradiance. By means of the method, the film thickness uniformity can be effectively estimated, machine losses caused by repeated trials are avoided, and the cost is greatly reduced.
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Description

technical field

[0001] The invention belongs to the field of hemispherical resonant gyroscopes, in particular to a metallization process of hemispherical resonant gyroscope resonators in satellite inertial navigation systems; specifically, it is a method for quickly estimating the film thickness uniformity of hemispherical resonant gyroscopes based on optical simulation. Background technique

[0002] Hemispherical Resonator Gyro (Hemispherical Resonator Gyro, referred to as HRG) is a kind of high-precision gyroscope with inertial navigation performance in the Costa Rica vibratory gyroscope. Hemispherical Resonator Gyro is a vibration rotation sensor with high precision, long life and high reliability. , low noise, anti-nuclear radiation, high impact resistance, etc., the random drift can reach the order of 10-4° / hr, can work continuously for more than 15 years and maintain the required performance, and is ideal for satellites, strategic weapons, and space aircraft. The most ...

Claims

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