The invention discloses a three-dimensional 1S1C memory and a preparation method thereof, and relates to the technical field of memorizers, the three-dimensional 1S1C memory comprises a
peripheral electrode layer and a memory unit, the
peripheral electrode layer is formed on a substrate, first
dielectric layers and first
metal electrode layers are sequentially and alternately stacked from bottom to top, and a plurality of grooves penetrating in the vertical direction are formed in the
peripheral electrode layer; the grooves are parallel to each other, and the grooves are used for segmenting the first
metal electrode layer; the storage unit comprises a second
metal electrode layer, a second
dielectric layer, a third metal electrode layer and a gate tube function layer, the top of a fourth metal electrode layer extends to the surface of the first
dielectric layer on the topmost layer to form a
bit line electrode, and the storage unit is formed in the area, right opposite to the first metal electrode layer, of the fourth metal electrode layer. By introducing the second metal electrode layer, a columnar
capacitor structure is realized, the effective contact area of the
capacitor electrode is increased, and the reliability and the capacity stability of the storage
capacitor are improved.