1results about How to "Achieving Reliability Requirements" patented technology

The utility model relates to wafer defect detection technical field especially a kind of wafer surface defect detection equipment, it includes second fixed frame, and install detection light source, wafer support mechanism and surface detection device on second fixed frame, wafer support mechanism is used to place wafer to be detected, the light illumination direction of detection light source is towards wafer to be detected, surface detection device includes primary inspection camera, re-inspection camera and depth detection sensor sequentially acting and along X direction arrangement;Wafer support mechanism includes second sliding rail and second sliding frame, the second sliding rail extends along X direction, second sliding frame is slidably arranged on the second sliding rail, and wafer is carried sequentially into the shooting range of primary inspection camera, re-inspection camera and depth detection sensor.This utility model integrates primary inspection camera, re-inspection camera and depth detection sensor in the same set of equipment, so that wafer can complete three rounds of detection of rapid rough detection, fine re-inspection and defect depth detection on a set of equipment.