The invention relates to the technical field of material surface
mechanical property detection and characterization, in particular to a modulus scanning device and
system and a measuring method. The modulus scanning device comprises a probe, a modulus conversion module, a load applying module, a
liquid metal sensor and a
signal acquisition module; the modulus conversion module is arranged between the probe and the load applying module, and the
liquid metal sensor is arranged on the modulus conversion module; the load applying module is used for applying a load to the probe through the modulus conversion module; the probe is used for generating up-and-down displacement in the vertical direction under the action of the change of the
elastic modulus on the surface of the tested sample and the load; the modulus conversion module is used for converting the up-down displacement of the probe in the vertical direction into the rotary motion of the
liquid metal sensor; and the
signal acquisition module determines the surface
elastic modulus of the tested sample. According to the invention, the reliability, stability and
measurement precision of
elastic modulus scanning are provided, and micron-order modulus difference identification can be realized.