44results about "Capacitor with electrode distance variation" patented technology

In one embodiment, a variable capacitor includes a first elongate member including a first conductive portion disposed toward a first distal end of the first elongate member and a second conductive portion disposed toward a second distal end of the first elongate member, the first elongate member is configured to pivot on a first fulcrum disposed between the first conductive portion and the second conductive portion, a first distance between the first fulcrum and a first conductive portion of the first elongate member is different from a second distance between the first fulcrum and a second conductive portion of the first elongate member; a second elongate member including a first conductive portion disposed toward a first distal end of the second elongate member and a second conductive portion disposed toward a second distal end of the second elongate member, where: one of the first elongate member and the second elongate member is a cathode; one of the first elongated member and the second elongated member is a cathode, and the other of the first elongated member and the second elongated member is an anode, the cathode and a respective first conductive portion of the anode forming a first capacitor, where a capacitance of the first capacitor is a function of a first pivot angle of the first elongated member on a first fulcrum, the capacitance of the second capacitor is a function of a first pivot angle of the first elongate member on the first fulcrum, the first conductive portion of the cathode and the second conductive portion of the anode are connected to a positive voltage of the first circuit, and the second conductive portion of the cathode and the second conductive portion of the anode are connected to a negative voltage of the second circuit. The first conductive portion and the second conductive portion of the anode are connected to a negative voltage of the first circuit such that the first capacitor and the second capacitor are connected in parallel. And wherein: the application of the potential difference by the first circuit results in pivoting of the first elongate member, a corresponding change in capacitance of the first capacitor proportional to the potential difference, and a corresponding change in capacitance of the second capacitor inversely proportional to the potential difference, and wherein the amplitudes of the capacitance changes of the first capacitor and the second capacitor are different, the sum of the capacitance of the first capacitor and the second capacitor varies with the potential difference.

The variable capacitor includes an enclosure having a first conductive collar and a second conductive collar separated by an electrically insulating intermediate element. A movable capacitor plate assembly is electrically coupled to the first conductive collar, and a stationary capacitor plate assembly is electrically coupled to the second conductive collar. An actuator extends into the enclosure to advance and retract the movable capacitor plate assembly relative to the stationary capacitor plate assembly. A hermetically sealed volume within the enclosure includes a fluid dielectric that acts as a dielectric between the capacitor plates of the movable capacitor plate assembly and the capacitor plates of the stationary capacitor plate assembly. A flexible structure is provided to accommodate the displaced fluid dielectric when the movable capacitor plate assembly is advanced relative to the stationary capacitor plate assembly.

In some implementations, a superconducting integrated circuit has a tunable parallel-plate capacitor, and a magnetic field generator operable to apply a magnetic field to the tunable parallel-plate capacitor to tune a capacitance of the tunable parallel-plate capacitor. The tunable parallel-plate capacitor includes a first capacitor plate having a plane, a second capacitor plate having a plane, and a dielectric interposed between the first capacitor plate and the second capacitor plate. The plane of the second capacitor plate is geometrically parallel to the plane of the first capacitor plate. In some implementations, a superconducting integrated circuit has a tunable parallel-plate capacitor, and an electric field generator operable to apply an electric field to the tunable parallel-plate capacitor to tune a capacitance of the tunable parallel-plate capacitor. The tunable parallel-plate capacitor includes a pair of capacitor plates, and a dielectric interposed between the pair of plates.

A variable capacitor comprising: a first elongate member comprising a first electrically conductive portion positioned towards a first distal end of the first elongate member and a second electrically conductive portion positioned towards a second distal end of the first elongate member, wherein the first elongate member is configured to pivot on a first fulcrum positioned between the first and second electrically conductive portions, wherein a first distance between the first fulcrum and the first electrically conductive portion of the first elongate member is different to a second distance between the first fulcrum and the second electrically conductive portion of the first elongate member; a second elongate member comprising a first electrically conductive portion positioned towards a first distal end of the second elongate member and a second electrically conductive portion positioned towards a second distal end of the second elongate member, wherein: one of the first and second elongate members is a cathode and the other of the first and second elongate members is an anode, a first capacitor is formed by the respective first electrically conductive portions of the cathode and anode, wherein a capacitance of the first capacitor is a function of a first pivoting angle of the first elongate member on the first fulcrum, and a second capacitor is formed by the respective second electrically conductive portions of the cathode and anode, wherein a capacitance of the second capacitor is a function of the first pivoting angle of the first elongate member on the first fulcrum, the first and second electrically conductive portions of the cathode are connected to a positive voltage of a first electric circuit, the first and second electrically conductive portions of the anode are connected to a negative voltage of the first electric circuit, such that the first and second capacitors are connected in parallel, and wherein: application of an electrical potential difference by the first electric circuit causes pivoting of the first elongate member and a corresponding variation in the capacitance of the first capacitor that is proportional to the electrical potential difference and a corresponding variation in a capacitance of the second capacitor that is inversely proportional to the electrical potential difference, wherein the magnitude of the variations in capacitances of the first and second capacitors are different such that a sum of the capacitances of the first and second capacitor varies as a function of the electrical potential difference.

Provided is a sensing fiber member which can be processed in long lengths, which excels in mass production, which is supple and has an excellent texture, and which is much less costly than a contact sensing fiber member (a piezoelectric yarn) for which a conventional piezoelectric material is used. This sensing fiber member has at least two covering yarns for which covering is achieved by wrapping an insulating fiber serving as a covering material in one direction around a linear conductor constituting a core material, two of the covering yarns being arranged close to each other. The sensing fiber member is characterized by reading changes in resistance and / or changes in capacitance between the linear conductors of the two covering yarns arranged close to each other.

A vibration-driven energy harvester includes: a base; a movable assembly that includes a first movable electrode and a second movable electrode; a first fixed electrode disposed so as to face opposite the first movable electrode; a second fixed electrode disposed so as to face opposite the second movable electrode; an elastic support member having a fixed end fixed to the base, the elastic support member supporting the movable assembly; a first electret formed at least at one of the first movable electrode and the first fixed electrode; and a second electret formed at least at one of the second movable electrode and the second fixed electrode, wherein: a gap distance between a front end of the second movable electrode and a facing surface of the second fixed electrode facing the front end of the second movable electrode is different from a gap distance between a front end of the first movable electrode and a facing surface of the first electrode facing the front end of the first movable electrode.

The variable capacitor includes first and second movable capacitor plate assemblies disposed inside the housing and including first and second movable capacitor plates. A first fixed capacitor plate and a second fixed capacitor plate are disposed proximal to the first and second movable capacitor plates, respectively. The plurality of capacitor plates may comprise concentric cylindrical blades that are variably interengaged, and the first movable capacitor plate and the first fixed capacitor plate may be coaxial with the second movable capacitor plate and the second fixed capacitor plate. A plurality of actuators may be provided to move the first and second movable capacitor plate assemblies forward and backward independently relative to the first and second fixed capacitor plate assemblies, changing the capacitance of the variable capacitor by independently adjusting the amount of interengagement of the capacitor plates of each pair of capacitor plate assemblies.

The utility model discloses a protection device for preventing a micro-capacitor from being damaged, which belongs to the technical field of micro-capacitor protection, and comprises a micro-capacitor body and a wiring terminal arranged on the micro-capacitor body, the bottom of the micro-capacitor body is detachably connected with a base, and the wiring terminal is arranged on the micro-capacitor body. The base is provided with a placing groove which forms an embedded structure with the bottom end of the micro-capacitor body, the outer side of the base is provided with a ring sleeve, the inner wall of the ring sleeve is provided with an internal thread, the outer side of the micro-capacitor body is detachably connected with a protective cover, the inner diameter of the bottom end of the protective cover is matched with the outer diameter of the micro-capacitor body, and the inner diameter of the bottom end of the protective cover is matched with the outer diameter of the micro-capacitor body. And the root part of the outer wall of the protective cover is provided with an external thread which is in threaded connection with the internal thread, so that the micro capacitor body can be effectively prevented from being extruded and damaged in the transportation process, the wiring terminal can be prevented from being bent and falling off, and a very good protection effect on the micro capacitor body is achieved.

The invention provides a radio frequency (RF) micro electro mechanical system (MEMS) switch. The switch comprises a substrate; a first signal conductor on the substrate; a ground conductor supported on the substrate on either side of the first signal conductor; and a MEMS bridge, at least one end of which is mechanically connected to the substrate through at least one anchor point, the MEMS bridge comprising a variable capacitor region disposed over the first signal conductor, the variable capacitor region comprising a first dielectric layer and a first conductive layer, the first conductive layer is located on a surface of the first dielectric layer facing the substrate and is divided into at least a first longitudinal conductive portion and a second longitudinal conductive portion, the first longitudinal conductive portion and the second longitudinal conductive portion being spaced apart in a direction perpendicular to a longitudinal length of the MEMS bridge, wherein the substrate comprises one or more pull-down substrate conductors, and the MEMS bridge comprises one or more actuatable conductors located between the anchor point and the variable capacitor region and disposed above the one or more pull-down substrate conductors, wherein at least one of the one or more actuatable conductors includes an embedded portion extending longitudinally along the MEMS bridge and between the first and second longitudinal conductive portions.

The present invention discloses a reactive power compensation device for eliminating harmonics in a power transmission system, comprising a main support, an adjusting capacitor fixedly mounted on the bottom of the main support, and an inductor fixedly mounted on the upper end of the main support; a base is provided at the lower end of the main support, and a bottom line groove is provided at the lower end of the base, a bottom line with three-way branches is fixedly connected in the middle of the bottom line groove; a lower support plate with a plate-like structure is fixedly connected to the upper end of the base, and three capacitor mounting holes are evenly distributed in the middle of the lower support plate; by adjusting the capacitance value of the adjusting capacitor, the adjusting capacitor, the inductor and the fixed capacitor can be made into harmonic filters of different sizes, without the need to use multiple harmonic filters for assembly, thereby reducing the increase in reactive power and improving the effect of reactive power compensation; by adjusting the adjusting capacitor, the entire device is set within a high-voltage or low-voltage usage range, thereby increasing the applicability of the entire device.

The application provides a tunable capacitor, comprising a cylinder, a high-voltage electrode, a low-voltage electrode, a tunable electrode and a plurality of shielding mechanisms; the high-voltage electrode and the low-voltage electrode are partially arranged in the cylinder, and the high-voltage electrode and the low-voltage electrode are partially arranged outside the cylinder; the part of the high-voltage electrode arranged in the cylinder and the part of the low-voltage electrode arranged in the cylinder are alternately arranged along the height direction of the cylinder; each shielding mechanism is arranged in the cylinder, and each shielding electrode is arranged between adjacent high-voltage electrodes and low-voltage electrodes; the tunable electrode is arranged in the cylinder and is used for adjusting the distance between the high-voltage electrode and the low-voltage electrode to adjust the capacitance. In the application, the shielding mechanism can block the leakage current flow path between the high-voltage electrode and the low-voltage electrode, reduce the equivalent resistance between the high-voltage electrode and the low-voltage electrode, reduce the dielectric loss of the capacitor, the tunable electrode can smoothly adjust the capacitance of the capacitor, and the difference between the capacitance of the capacitor and the rated capacitance is reduced.

A noise filter includes a first terminal, a second terminal, and a housing accommodating the first terminal and the second terminal. The first terminal includes a mounting portion and an extension portion extending from the mounting portion, and the second terminal includes a mounting portion and an extension portion extending from the mounting portion. The housing accommodates the first terminal and the second terminal such that an extension portion of the first terminal and an extension portion of the second terminal are arranged side by side with a gap between the extension portion of the first terminal and the extension portion of the second terminal. The housing includes an adjustment mechanism that adjusts a gap between the extension portion of the first terminal and the extension portion of the second terminal.

A noise filter includes a first terminal, a second terminal, and a housing accommodating the first terminal and the second terminal. The first terminal includes a mounting portion and an extending portion extending from the mounting portion, and the second terminal includes a mounting portion and an extending portion extending from the mounting portion. The housing houses the first terminal and the second terminal such that the extending portion of the first terminal and the extending portion of the second terminal are arranged side by side with an interval between the extending portion of the first terminal and the extending portion of the second terminal. The housing includes an adjustment mechanism that adjusts the interval between the extending portion of the first terminal and the extending portion of the second terminal.

The present application relates to the technical field of matcher device, especially to a matcher device suitable for high pressure working environment, which aims at the problem that the existing radio frequency matcher cannot be adapted and optimized for the high pressure environment formed by the injection of sulfur hexafluoride into a sealed tank, is prone to abnormal operation or even stoppage failure under the action of high pressure in the tank, and cannot meet the use requirements of special experimental scenes, and proposes the following technical scheme: a matcher shell is provided with two groups of baffles; two groups of capacitors are arranged between the two groups of baffles, and adjusting mechanisms are arranged at two ends of the capacitors respectively, the adjusting mechanisms are used for adjusting the capacitance value of the capacitors to dynamically adjust the self impedance of the matcher; and a circuit board is installed in the matcher shell. The matcher can be used in high pressure working environment, is safe and convenient, and has good social and economic benefits.

This invention discloses a variable vacuum capacitor capable of rapidly switching large capacitance values, comprising a first capacitor, a second capacitor, an intermediate electrode disk, and a driving device. The first capacitor includes a first electrode group A and a first electrode group C, and the second capacitor includes a second electrode group B and a second electrode group C. The intermediate electrode disk is disposed between the first and second capacitors, and the first and second electrode groups C are respectively fixed on opposite sides of the intermediate electrode disk. The second electrode group B is electrically connected to a moving disk. Conductive protrusions are provided on the intermediate electrode disk and / or the moving disk. The driving device drives the moving disk to reciprocate relative to the intermediate electrode disk, thereby switching the second capacitor between an open-circuit state and a short-circuit state. In the short-circuit state, the moving disk and the intermediate electrode disk are connected and conductive through the conductive protrusions. This invention achieves rapid switching of large capacitance values ​​by changing the short-circuit and open-circuit states of the second capacitor.

The invention discloses a combined broadband chip capacitor with adjustable capacity and a preparation method thereof, the combined broadband chip capacitor comprises a dielectric ceramic body, an inner electrode is printed on the dielectric ceramic body, and the inner electrode extends to the middle part from one side of the dielectric ceramic body; the bottom end of the dielectric ceramic body is provided with a lower electrode, and the top end is provided with a first upper electrode and a second upper electrode. The first upper electrode, the inner electrode and the lower electrode form a first capacitor, the second upper electrode and the lower electrode form a second capacitor, and the first capacitor and the second capacitor form a combined broadband chip capacitor. The circuit access mode of the capacitor comprises the following steps of: randomly selecting one capacitor from the first capacitor and the second capacitor to access the circuit, and switching the other capacitor and adjusting the capacitance value according to the circuit requirement; or the first capacitor and the second capacitor are connected to the circuit at the same time after being bonded and combined through gold wires; or the circuit is accessed in a mode of leading in the first upper electrode and leading out the second upper electrode. According to the invention, the parasitic inductance is small, the use frequency is wide, and large capacitance and adjustable capacity can be realized.

The variable capacitor includes an enclosure having a first conductive collar and a second conductive collar separated by an electrically insulating intermediate element. A movable capacitor plate assembly is electrically coupled to the first conductive collar, and a stationary capacitor plate assembly is electrically coupled to the second conductive collar. An actuator extends into the enclosure to advance and retract the movable capacitor plate assembly relative to the stationary capacitor plate assembly. A hermetically sealed volume within the enclosure includes a fluid dielectric that acts as a dielectric between the capacitor plates of the movable capacitor plate assembly and the capacitor plates of the stationary capacitor plate assembly. A flexible structure is provided to accommodate the displaced fluid dielectric when the movable capacitor plate assembly is advanced relative to the stationary capacitor plate assembly.

An apparatus includes a circuit board (440) having a first conductive pad (420) on a circuit board surface and a conductive overlay (410B) having a first surface and a second surface opposite the first surface and configured to deflect in response to a touch on the first surface. A protrusion (490) protrudes from the second surface and is configured as a second conductive pad. The circuit board, the conductive overlay, and the protrusion are arranged such that the second surface faces the circuit board surface and is spaced apart from the first conductive pad by a first distance (d1). The protrusion is spaced apart from the first conductive pad by a second distance (d2) and has an overlap region. The apparatus can also include spacers (450A, 450B) configured to space the first conductive pad apart from the second surface by the first distance and to space the protrusion apart from the second surface by the second distance.

A reverse force mechanism includes a main shaft, a main link, a movable shaft, an actuating link, a slider, an actuating shaft, a spring link, and a spring shaft. A reverse force spring is attached to the spring link. The spring shaft is fixed to a position a dimension away in a direction parallel to the slider from a base point on an extension of a line segment from the main shaft to the movable shaft when in an inserted state in which the movable shaft is farthest from a line connecting the main shaft and the actuating shaft. The dimension is set such that a resultant operating force is constant at a non-zero value. An angle between the actuating link and the slider is set to be variable within a range of 25° to 85° during operation.

A brazing structure for a vacuum container is provided. The vacuum container includes: a fixed conductor on which a fixed electrode is supported; a movable conductor on which a movable electrode is supported; a flange pipe which is bonded to the movable conductor coaxially with the fixed electrode and the movable electrode; and a ceramic pipe which is provided coaxially therewith. One end of the ceramic pipe is bonded to the fixed conductor by brazing, with a linking flange pipe therebetween, and the other end thereof is bonded to the flange pipe by brazing, with a linking flange pipe therebetween. The linking flange pipe includes a bonding portion that is bonded to the ceramic pipe by active metal brazing using an AgCuTi-based, AgCuInTi-based, or AgCuSnTi-based metal.

A device for monitoring a battery (30), in particular a lithium-ion battery, to prevent thermal runaway, comprising the battery (30) having a plurality of cells (6) arranged next to one another within a housing (16) under a prestress in a transverse direction (8), wherein a measuring arrangement (36) is provided for detecting an expansion of at least one of the cells in the transverse direction (8), and the measuring arrangement (36) has a plurality of sensors (12) and an evaluation unit (18, 34), characterized in that the sensors (12) are each arranged between two cells (6) adjacent in the transverse direction (8) and are connected to the evaluation unit (18, 34), so that an expansion of one of the cells (6) in the transverse direction (8) is detected by the measuring arrangement (36) and monitored with regard to exceeding a critical value for the expansion, wherein the critical value indicates a potential occurrence of a thermal runaway,characterized in that a detection unit (40) is provided for detecting a current operating temperature of the battery (30) and the evaluation unit (18, 34) is arranged such that the critical value is set as a function of the current operating temperature.

The invention discloses a sensing device, which comprises two sensors, the first sensor (1) comprises a first cavity (Q1), a first electrode layer (11) and a first thermal deformation structure (12), the first electrode layer (11) is arranged on the side, away from the isolation layer (3), of the first cavity (Q1), and the first thermal deformation structure (12) is arranged in the first cavity (Q1) and makes contact with the two opposite inner walls of the first cavity (Q1); the second sensor (2) comprises a second cavity (Q2), a second electrode layer (21) and a second thermal deformation structure (22), the second electrode layer (21) is arranged on the side, away from the first cavity, of the isolation layer (3), and the second thermal deformation structure (22) is arranged in the second cavity (Q2) and makes contact with the two opposite inner walls of the second cavity (Q2). The sensing device can measure the temperature and the pressure at the same time or measure the temperature and the acceleration at the same time, and is high in integration level, small in size, high in detection precision and wide in application.

A variable capacitor comprising: a first elongate member comprising a first electrically conductive portion positioned towards a first distal end of the first elongate member and a second electrically conductive portion positioned towards a second distal end of the first elongate member, wherein the first elongate member is configured to pivot on a first fulcrum positioned between the first and second electrically conductive portions, wherein a first distance between the first fulcrum and the first electrically conductive portion of the first elongate member is different to a second distance between the first fulcrum and the second electrically conductive portion of the first elongate member; a second elongate member comprising a first electrically conductive portion positioned towards a first distal end of the second elongate member and a second electrically conductive portion positioned towards a second distal end of the second elongate member, wherein: one of the first and second elongate members is a cathode and the other of the first and second elongate members is an anode, a first capacitor is formed by the respective first electrically conductive portions of the cathode and anode, wherein a capacitance of the first capacitor is a function of a first pivoting angle of the first elongate member on the first fulcrum, and a second capacitor is formed by the respective second electrically conductive portions of the cathode and anode, wherein a capacitance of the second capacitor is a function of the first pivoting angle of the first elongate member on the first fulcrum, the first and second electrically conductive portions of the cathode are connected to a positive voltage of a first electric circuit, the first and second electrically conductive portions of the anode are connected to a negative voltage of the first electric circuit, such that the first and second capacitors are connected in parallel, and wherein: application of an electrical potential difference by the first electric circuit causes pivoting of the first elongate member and a corresponding variation in the capacitance of the first capacitor that is proportional to the electrical potential difference and a corresponding variation in a capacitance of the second capacitor that is inversely proportional to the electrical potential difference, wherein the magnitude of the variations in capacitances of the first and second capacitors are different such that a sum of the capacitances of the first and second capacitor varies as a function of the electrical potential difference.

The present invention discloses an adjustable mica sheet capacitor, which relates to the field of electrical component technology. The capacitor comprises a mounting base, the upper side of which is provided with a groove, a positive electrode notch and a negative electrode notch, and two symmetrically arranged fixing notches. A plurality of capacitor plates are mounted in the groove, and a first mica sheet is mounted between each two adjacent capacitor plates. The capacitor plates comprise metal plates, one side of which is provided with an electrode contact, and two symmetrically arranged fixing plates are mounted on opposite sides of the metal plates. The present invention accumulates electrical energy by using multiple staggered arc-shaped capacitor plates, and the curvature of the arc-shaped capacitor plates is controlled by bolts and a pressure plate. By changing the curvature between adjacent capacitor plates, the maximum capacity of the capacitor can be increased or decreased.

A variable capacitor includes: a first conductive layer; a second conductive layer; and a capacitance layer sandwiched between the first conductive layer and the second conductive layer. Each of the first conductive layer and the second conductive layer is a ferromagnetic layer containing a ferromagnetic material. The first conductive layer has a first magnetic domain and a second magnetic domain having magnetization oriented in a direction different from the first magnetic domain. In the variable capacitor, a domain wall which is a boundary between the first magnetic domain and the second magnetic domain is configured to be movable within at least an area of the first conductive layer overlapping the capacitance layer in a laminating direction in a first direction within a plane of the first conductive layer.

A variable capacitor includes an enclosure having first and second conductive collars separated by an intermediate electrically insulating element. A movable capacitor plate assembly is electrically coupled to the first conductive collar, and a fixed capacitor plate assembly is electrically coupled to the second conductive collar. An actuator extends into the enclosure for advancing and retracting the movable capacitor plate assembly relative to the fixed capacitor plate assembly. A hermetically sealed volume within the enclosure contains a dielectric fluid serving as a dielectric between a capacitor plate of the movable capacitor plate assembly and a capacitor plate of the fixed capacitor plate assembly. A flexible structure is provided to contain the dielectric fluid displaced when the movable capacitor plate assembly is advanced toward the fixed capacitor plate assembly.

The present invention relates to a radio frequency (RF) microelectromechanical system (MEMS) switch comprising a substrate, a first signal conductor on the substrate, ground conductors supported on both sides of the first signal conductor on the substrate, and a MEMS bridge having at least one end mechanically connected to the substrate by at least one anchor, wherein the MEMS bridge comprises a variable capacitor region provided on the first signal conductor, the variable capacitor region comprising a first dielectric layer and a first conductive layer, the first conductive layer positioned on the surface of the first dielectric layer facing the substrate. The RF MEMS switch is provided, comprising a substrate comprising one or more pull-down substrate conductors, the MEMS bridge comprising one or more operable conductors located between an anchor and a variable capacitor region and provided on one or more pull-down substrates, at least one of the one or more operable conductors comprising an embedded portion extending longitudinally along the MEMS bridge between the first and second longitudinal conductive portions.

The invention relates to a microelectromechanical MEMS component (100) for determining ambient pressure and / or sound pressure, with a parallel capacitance plate structure (101), wherein the capacitance plate structure (101) comprises a static electrode (103) and a movable electrode (105) mounted to be deflectable relative to the static electrode (103) along a deflection direction (D), wherein the static electrode (103) comprises a first static electrode plate (107) and a second static electrode plate (109), wherein the movable electrode (105) comprises a first movable electrode plate (111) and a second movable electrode plate (113) connected to the first movable electrode plate (111), wherein the first static electrode plate (107) and the second static electrode plate (109) are spaced apart from each other along the deflection direction (D).wherein the first static electrode plate (107) defines a first functional layer (F1) and the second static electrode plate (109) defines a second functional layer (F2) of the MEMS component (100), wherein the first movable electrode plate (111) is arranged in the second functional layer (F2) and is positioned opposite the first static electrode plate (107), wherein the second movable electrode plate (113) is arranged in the first functional layer (F1) and is positioned opposite the second static electrode plate (109), and wherein the first and second movable electrode plates (111, 113) can be deflected together from the first and second functional layers (F1, F2) by deflecting the movable electrode (105).