376 results about "Micro cavities" patented technology

The invention discloses an organic light-emitting device and a light-emitting device, one side of the organic light-emitting device close to an anode is provided with two hole transport layers which are arranged according to a high-low refractive index relationship, the material of the first hole transport layer is as shown in a formula 1, and the material of the second hole transport layer is as shown in a formula 2. According to the organic light-emitting device and the light-emitting device, through matching optimization of device film layer materials and structural combination of film layers with different refractive indexes, the stability of the materials and transmission of current carriers are guaranteed, meanwhile, light field distribution is improved through optimization of an optical microcavity structure, the photon extraction efficiency of the device is improved, and the light-emitting efficiency of the device is improved. The ineffective loss of photon energy in the organic layer is reduced, so that the performance of the organic light-emitting device and the light-emitting device comprising the organic light-emitting device is improved in the aspects of light-emitting efficiency, starting voltage, light-emitting service life and the like. Formula 1 and Formula 2.

The invention provides a method and a system for realizing a weak measurement enhanced chip-level microcavity gyroscope. The method comprises the following steps of: 1, providing a coherent state input by a system by using a single-frequency laser; 2, the output of the single-frequency laser is switched between a first path and a second path through an optical switch, the laser beam is transmitted to the first path in the first half part of the period, and the laser beam is transmitted to the second path in the second half part of the period; 3, the light transmitted along the first path and the second path respectively passes through an optical resonant cavity to sense the rotation angular speed, and a weak value amplification effect is achieved by setting front and back selection states; and step 4, weak measurement enhanced output results transmitted along the first path and the second path are respectively received by a photoelectric detector, and the value of the rotation angular velocity is demodulated according to the obtained output results. According to the invention, the optical microcavity is used as a sensing unit of the gyroscope, the sensing performance of the integrated optical gyroscope is greatly enhanced through a weak measurement technology, and the whole set of system can realize chip-level integration.

The invention discloses a high-sensitivity double Fabry-Perot interference hydrogen sensor resistant to temperature and humidity interference, and belongs to the technical field of optical fiber sensing. A modular integrated design is adopted, and the core comprises double Fabry-Perot interferometers which are connected in series and are respectively a temperature compensation unit FPI-1 and a hydrogen sensing unit FPI-2, and a matched software controllable vernier processing module; the FPI-1 realizes temperature real-time compensation by filling PDMS in an open microcavity, and the FPI-2 adopts a PDMS / Pd-WO3 composite material as a hydrogen sensitive layer, and has wide humidity range anti-interference capability through structural optimization; the weak hydrogen signal is amplified through Fourier transform filtering, sine function fitting, twin interference spectrum construction and vernier effect. According to the invention, precise detection of ultra-trace hydrogen in a complex temperature and humidity environment is realized, and the temperature and humidity interference resistance is high.

The invention belongs to the related technical field of sensors, and provides a multi-parameter integrated acquisition optical fiber sensor and a monitoring system thereof in order to solve the problem that high-precision monitoring of a static signal and a dynamic signal is difficult to consider by an existing sensor at the same time, a sensing cavity is sequentially divided into a static signal sensing area and a dynamic signal sensing area in the axial direction; the static signal sensing area adopts a multi-core fiber, fiber gratings are respectively engraved on the multi-core fiber, and the wavelength demodulation of the static signal is realized through the central wavelength drift distance of the fiber gratings; the dynamic signal sensing area is provided with a dynamic signal sensing unit, the dynamic signal sensing unit comprises F-P air microcavities formed between the dynamic signal sensing unit and the end faces of all fiber cores of the multi-core optical fiber, and intensity demodulation of dynamic signals is achieved through cavity length changes of the F-P air microcavities. According to the invention, a wavelength modulation and intensity modulation parallel composite demodulation mechanism is adopted, and decoupling acquisition of static strain, temperature and dynamic vibration is realized in a single sensor.

The invention relates to a Raman activated cell sorting system coupled with micro-fluidic and Raman optical tweezers and a method thereof, and relates to the technical field of cell sorting, the system comprises a micro-fluidic chip with low Raman and fluorescence background noise and a pneumatic micro-valve; in the micro-fluidic chip, a sample channel and a micro-cavity are connected with a main channel, and a flow guide channel is connected with the micro-cavity; the flow guide channel and the collecting channel are connected through a pneumatic micro valve. After the pneumatic micro valve is closed, the fluid in the micro cavity is static, and a narrow sample flow is formed in the main channel. And when the Raman collection time is less than the time difference of two adjacent cells flowing through the capturing point of the optical tweezers in the narrow sample flow, high-flux Raman detection can be performed in the narrow sample flow. On the contrary, the target cells can be moved out of the narrow sample flow, and high-precision Raman detection in a long Raman collection scene can be realized. After sorting is completed, fluid flowing of the main channel is stopped, the pneumatic micro valve is opened, the cells stored in the micro cavity are released and collected in a unified mode, the cell suspension volume is more stable and uniform, and follow-up experiment operation is facilitated.

The invention provides a dual-mode resonance optical fiber microcavity air pressure measurement system and method, and relates to the technical field of optical fiber microcavity air pressure measurement, and the system specifically comprises a sensing probe preparation module, a two-parameter sensitivity matrix calibration module, an optical fiber laser sensing system construction module, a real-time change monitoring module and a decoupling and output module. Femtosecond laser etching is combined with high-temperature tapering, an open type microcavity is manufactured on a single-mode optical fiber, a micro-nano cone area is formed, and the sensing probe with two resonance valleys with different temperature and air pressure response characteristics is obtained. A sensitivity coefficient matrix is obtained through calibration, a probe serves as a filter to be embedded into an annular optical fiber laser cavity, and an optical fiber laser with the laser wavelength locked by a resonance valley is constructed. Laser wavelength drift is caused by environmental change, real-time synchronous measurement of temperature and air pressure is realized by utilizing inverse matrix decoupling, and the method is suitable for high-precision and anti-interference monitoring of harsh industrial environments such as aero-engines and power transformers.

The invention discloses a micro-through-hole structure polymer metallization method for guided wave transmission, and belongs to the technical field of photoelectric device processing, a polymer substrate is used for replacing a traditional all-metal material, and the micro-through-hole structure polymer metallization method for guided wave transmission is achieved through the multi-stage processes of plasma activation, chemical coarsening, sensitization, chemical plating, electroplating and the like. And forming a compact and high-adhesion metal layer on the inner surface of the through hole of the polymer substrate. In the process, a microfluid pump or a peristaltic pump is adopted to drive the solution to circularly flow in the through hole and the microcavity. According to the micro-through-hole structure polymer metallization method for guided wave transmission, dynamic flowing of a chemical plating solution in a micro-through hole and an internal cavity is achieved by introducing a micro-fluid pump or a peristaltic pump, and therefore a uniform, compact and firmly-attached metal layer is obtained.

The invention provides a terahertz frequency comb generation verification method and system based on an optical fiber microcavity optical frequency comb, and the method comprises the steps: injecting a continuous wave laser into an optical fiber microcavity resonator to generate a stable Kerr optical frequency comb, enabling the Kerr optical frequency comb to work in a single soliton state or a soliton crystal state, and obtaining an optical frequency reference with low phase noise. Furthermore, spectrum selection is performed on the optical frequency comb, multiple groups of optical comb tooth pairs comprising comb teeth of different orders are actively selected, and the optical frequency difference of each group of comb tooth pairs is directly converted into an electric signal in a terahertz frequency band by utilizing a beat frequency effect of a photoelectric detector. A plurality of terahertz electric signals generated by different comb tooth pairs are integrated to form a multi-channel terahertz frequency comb. The method allows a plurality of discrete and frequency-controllable terahertz signal channels to be generated in parallel on a single optical platform through one-time optical processing and photoelectric conversion, so that multichannel terahertz frequency comb generation is realized.

The invention discloses a wafer bearing structure, a preparation method, a processing device, a control system and a method for compensating wafer morphology, the structure is characterized in that a CMOS (Complementary Metal Oxide Semiconductor) control circuit is integrated on a semiconductor substrate, micro-cavities arranged in an array are manufactured in an interlayer insulating layer above the CMOS control circuit, and the micro-cavities are filled with micro-driving units consisting of conductive layers and piezoelectric material layers; and a supporting body for supporting the wafer is arranged above the unit. And the micro-driving unit is connected with the CMOS circuit through the metal interconnection layer exposed at the bottom of the cavity. The manufacturing method comprises the steps of photoetching and trepanning in the insulating layer, depositing a functional material, planarizing and the like. The control system is composed of an external height detection module, a main control module, a digital-to-analog conversion module and a CMOS driving circuit in the structure in a cooperative manner, and can independently and accurately control each micro-driving unit to generate nanoscale deformation through the CMOS circuit according to real-time morphology data of a wafer, so that local micro fluctuation of the wafer is compensated in real time, and photoetching defocus is effectively prevented.

The present disclosure relates to an aerosol-generating article for use with an aerosol-generating device to generate an aerosol. There is provided an aerosol-generating article (100) for use with an aerosol-generating device to generate an aerosol. The aerosol-generating article (100) comprises a plurality of micro-cavities (113). Sensorial media is disposed within at least some of the plurality of micro-cavities (113).

The application provides a method for widening the effective bandwidth of a wave-absorbing material, and comprises a preparation method of a composite material: mixing magnetic metal hydrotalcite and expanded graphite into a multiphase fluid, then introducing the multiphase fluid into a high-speed shearing microcavity in a circulation mode, using the high-speed fluid boundary layer shearing force to realize the interlayer peeling of the magnetic metal hydrotalcite and the expanded graphite, and self-assembling into a two-dimensional / two-dimensional stacked sheet-shaped magnetic particle / few-layer graphite electromagnetic wave absorbing powder. The application proposes a two-dimensional / two-dimensional structure formed by sheet-shaped magnetic nanoparticles and few-layer graphite for a carbon-based magnetic particle composite material. The two-dimensional electron gas is easy to form at the interface, and the resonance loss different from the interface relaxation can be realized by the resonance of the plasmon and the incident microwave. On the other hand, the magnetic performance of the sheet-shaped magnetic nanoparticles can be secondarily regulated, the mode of Aharoni exchange resonance is changed, the dielectric loss and the magnetic loss are improved in an integrated manner, and the effective bandwidth of the material for absorbing electromagnetic waves is widened.

The invention relates to the technical field of semiconductor devices, in particular to a novel electric pump AlGaN-based deep ultraviolet laser diode and a preparation method thereof. The structure comprises a stacking structure, a passivation layer, an n-type metal electrode layer and a p-type metal electrode layer, a substrate, a template layer, a bottom DBR layer, a step-shaped n-type AlGaN layer, a micro-cavity LED active region layer, a p-type AlGaN layer, a step-shaped p-type AlGaN contact layer, a top DBR layer, a lower waveguide layer, an LD multi-quantum well layer and an upper waveguide layer are stacked on the stacking structure in sequence. The ridge surface width of the p-type AlGaN contact layer is greater than or equal to 100 microns; the passivation layer covers the surface and the side wall of the stacked structure, and electrode layer growth channels are formed in the step surfaces of the n-type AlGaN layer and the p-type AlGaN contact layer respectively; and the n-type metal electrode layer and the p-type metal electrode layer respectively penetrate through the corresponding electrode layer growth channels. The advantages are that the wide ridge design improves the light output power, the performance is excellent, and the etching damage is reduced.

The invention relates to the technical field of organic light emitting, and discloses a display panel and a preparation method thereof, the display panel comprises pixel units arranged in an array, and each pixel unit comprises a reflection electrode, a transparent electrode, an organic layer and a cathode which are laminated; the reflecting electrode is arranged on one side, close to the substrate, of the transparent electrode; the transparent electrode comprises at least one transparent conducting layer; the refractive index of at least one transparent conductive layer is larger than that of the organic layer. According to the invention, the transparent electrode comprises at least one transparent conductive layer with the refractive index higher than that of the organic layer, and preferably, the transparent conductive layers in different sub-pixel areas have specific refractive index difference and lamination patterns, so that the micro-cavity effects of red, green and blue sub-pixels can be independently optimized in a targeted manner. This design effectively enhances light output of a specific wavelength and suppresses light of a non-resonant wavelength, thereby significantly narrowing the full width at half maximum of each color of light.

The present application relates to laser frequency stabilization technology, in order to solve the contradiction between chip and long-term frequency stability of on-chip frequency stabilization technology, provide a kind of long time laser frequency stabilization system based on on-chip optical reference microcavity, including: two lasers, on-chip optical reference microcavity;Two frequency locking modules are used for locking two lasers to two different modes of on-chip optical reference microcavity respectively;Dual-mode beat frequency measurement and control module is used for real-time measurement of the dual-mode frequency difference between the two different modes locked to on-chip optical reference microcavity;In-cavity temperature slow feedback control loop is used for generating temperature fine control feedback signal based on dual-mode frequency difference, and the fine temperature of on-chip optical reference microcavity is adjusted according to temperature fine control feedback signal, to compensate the optical cavity length change caused by thermo-optic effect and thermal expansion effect, so as to stabilize the resonant frequency of on-chip optical reference microcavity, reduce the long-term drift of on-chip laser light frequency, improve the long time frequency stability of laser single frequency output.

The invention provides an ultrasonic microcavity reactor which comprises a reactor main body and an ultrasonic wave generating device, and the reactor main body is installed in an ultrasonic wave radiating surface of the ultrasonic wave generating device; at least one micro-cavity unit is arranged in the reactor main body, the micro-cavity unit is of a hollow pipeline structure extending in the horizontal axial direction, and the inner diameter of a cavity of the micro-cavity unit sequentially comprises an axial divergent section with the cross section area continuously increasing from the inlet end of the axial divergent section to the outlet end of the axial divergent section in the fluid flowing direction; and the axial gradually-shrinking section is positioned at the downstream of the axial gradually-expanding section, and the cross sectional area of the axial gradually-shrinking section is continuously reduced from the inlet end of the axial gradually-shrinking section to the outlet end of the axial gradually-shrinking section. The micro-cavity unit is designed into a rotational flow cavity which is gradually expanded and gradually shrunk in the axial direction; therefore, a hurricane type cavitation bubble group can be formed in the reaction cavity of the ultrasonic microcavity reactor. Compared with a conventional ultrasonic cavitation reactor, hurricane type cavitation bubbles can be generated, the sound field distribution is concentrated, the shearing capacity is high, and the mixing and emulsifying effects are good.

Disclosed herein is a microcavity and patterns thereof comprising a photoluminescent material positioned between two reflectors, wherein the photoluminescent material comprises a cationic molecular dye, a macrocyclic anion receptor host, and an anion embedded within the macrocyclic anion receptor host and methods of making and using the same.

The invention provides electronic paper, a preparation method and a display device.A display layer of the electronic paper is arranged between a first electrode layer and a second electrode layer, the display layer comprises a plurality of microcavity structures, electrophoretic liquid is arranged in the microcavity structures, and at least one microcavity structure corresponds to one pixel region; the color resistance layer is arranged on the side, away from the first electrode layer, of the display layer, a plurality of color resistance areas are arranged on the color resistance layer, and the color resistance areas are arranged corresponding to the microcavity structures; wherein a cavity wall structure is arranged between two adjacent microcavity structures, the cavity wall structure is provided with at least two barrier layers along the thickness direction of the display layer, the at least two barrier layers and the color resistance layer are made of color resistance materials, and the at least two barrier layers are made of different color resistance materials; the cavity wall structure is made of a color resistance material and can be manufactured by adopting a partially same process with a color resistance layer, the preparation cost is reduced, and at least two barrier layers with different color resistances are arranged, so that a shielding area is formed to shield a switching device in the electronic paper.

The invention discloses a high-performance infrared focal plane detector based on a super-structure lens effect, and belongs to the technical field of photoelectric detection. The core of the invention lies in providing a novel detector architecture which carries out integrated collaborative design on metal microcavity resonance and a super-structure lens condensation effect at a pixel level. Multi-physical field collaborative optimization is carried out on a quantum well material, a metal microcavity structure and an array period, so that periodically arranged detector pixels simultaneously have dual functions of microcavity resonance frequency selection and microlens wavefront regulation and control. On one hand, incident infrared light is converged through a super-structure lens effect induced by an array period, and the energy density of a light field is enhanced; on the other hand, incident light coupled into the metal microcavity can excite a resonance mode in the microcavity, and the active area light field is further locally strengthened. According to the invention, additional optical elements are not needed, the process is completely compatible with the existing focal plane technology, and a brand new technical approach is provided for high-performance narrow-band infrared detection.

The invention discloses a micro-cavity optical frequency comb and a structural parameter determination method thereof, relates to the technical field of optical frequency combs, and aims to solve the problems that in the prior art, a traditional optical frequency comb is limited in structural regulation dimension, and an existing design method is difficult to efficiently and accurately achieve matching of spectrum requirements and structural parameters. The micro-cavity optical frequency comb comprises an input / output waveguide and a grating-assisted nested micro-ring cavity. The input / output waveguide is coupled with the grating-assisted nested micro-ring cavity; the grating auxiliary nested micro-ring cavity comprises an outer micro-ring, an inner micro-ring and a grating; the grating is formed on the outer micro-ring or the inner micro-ring; the outer micro-ring and the inner micro-ring are coupled to form a nested resonant structure; structural parameters corresponding to the grating-assisted nested micro-ring cavity are obtained through light field steady-state verification based on trained reverse neural network prediction; the trained reverse neural network is obtained based on the forward neural network. The method is used for realizing efficient and accurate design of the microcavity optical frequency comb and meeting the target spectrum requirement.

This application provides a self-injection-locked narrow-linewidth laser with a quasi-continuous locking region, comprising: a semiconductor laser source for generating an initial linewidth laser and outputting it via end-face coupling; a photonic integrated microcavity chip including a bus waveguide and a microring resonator coupled to it via an evanescent wave, for receiving the initial linewidth laser and providing feedback light to the semiconductor laser through Rayleigh backscattering of the microring resonator to excite a self-injection-locking effect; the microring resonator is a compact folded waveguide microcavity with an ultra-low free spectral range, the free spectral range of which is less than a preset threshold, so that when the driving current of the semiconductor laser is changed for wavelength tuning, the self-injection-locking regions of adjacent resonant modes in the cavity physically overlap or are closely spliced ​​in the current tuning parameter space, so that the semiconductor laser can continuously transition between adjacent modes without experiencing permanent unlocking during continuous current tuning, forming a quasi-continuous locking region.

The application provides a TC4 titanium alloy-based light-heat interface material and method and an interface evaporator. The TC4 titanium alloy has a micro-nano net array structure on the surface, and the micro-nano net array structure has protruding micro-cavities and recessed micro-grooves. The TC4 titanium alloy is used as raw material of the light-heat interface material, the raw material is easy to obtain and low in cost, the micro-nano net array structure is formed on the surface of the TC4 titanium alloy through laser etching, the evaporation surface area is significantly increased, the micro-protruding structure of the micro-nano net array structure on the surface can realize continuous supplement of the liquid to be evaporated, the continuity of the light-heat evaporation process is ensured, and the light-heat conversion efficiency is improved.

The application relates to a full-quartz-encapsulated doped quartz whispering gallery microsphere sensor and a preparation method thereof, and belongs to the technical field of microcavity lasers. The full-quartz-encapsulated doped quartz whispering gallery microsphere sensor comprises a quartz substrate, a T-shaped groove is engraved on the quartz substrate, a fiber taper is transversely placed in the T-shaped groove of the quartz substrate, a doped quartz whispering gallery microsphere is vertically placed in the T-shaped groove of the quartz substrate, and the doped quartz whispering gallery microsphere is directly in contact with the fiber taper for coupling. The full-quartz-encapsulated doped quartz whispering gallery microsphere sensor provided by the application encapsulates the fiber taper-microsphere coupling system in the groove of the quartz substrate, has the characteristics of miniaturization, high integration and stable structure, and has good reliability in high-temperature, high-pressure and corrosive environments, and is suitable for various high-temperature measurement and detection scenes.

This application discloses an aflatoxin B1 sensor and detection method based on a hydrogel whispering-gallery mode microcavity enhanced by liquid crystal droplets, comprising the following steps: A1: preparing a hydrogel-glass microbubble enhanced by liquid crystal droplets; A2: stretching a single-mode fiber by flame heating to obtain a tapered fiber, adjusting the relative position of the tapered fiber and the hydrogel-glass microbubble enhanced by liquid crystal droplets, and incident a laser emitted by a scanning laser, which enters the first single-mode fiber through the tapered fiber to achieve optical field coupling, resulting in an optically coupled hydrogel-glass microbubble enhanced by liquid crystal droplets. The laser then enters the second single-mode fiber through the tapered fiber. The aflatoxin B1 solution to be detected is added to the optically coupled hydrogel-glass microbubble enhanced by liquid crystal droplets, and the concentration of the aflatoxin B1 solution is calculated by recording the optical information. This application solves the problem of low sensitivity caused by visual observation or broadband monitoring commonly used in hydrogel sensors and liquid crystal sensors.

This application discloses a single droplet generation device based on piezoelectric ceramics, including a microcavity liquid chamber, a piezoelectric driving component, a micro-orifice nozzle, a hydraulic adjustment system, and an electronically controlled driving module. The microcavity liquid chamber has a nozzle interface at its bottom, and its internal cavity volume is adapted to store a small amount of liquid and transmit pressure. The piezoelectric driving component includes a piezoelectric ceramic element, which is connected to the microcavity liquid chamber by bonding and is used to generate deformation under the drive of an electrical signal to apply pulse pressure to the liquid in the liquid chamber. The micro-orifice nozzle is detachably connected to the bottom of the liquid chamber, and its nozzle diameter is adjustable to control the initial size of the droplet. The electronically controlled driving module includes a power supply, a driving circuit, and a controller, which outputs an adjustable electrical signal to coordinately control the voltage amplitude, pulse width, and trigger frequency of the piezoelectric driving component, and is linked with the hydraulic adjustment system to achieve multi-parameter control of the droplet size. This application achieves high-precision droplet control through the coordination of the piezoelectric driving component and the electronically controlled module.

The invention relates to an intermediate infrared micro comb generation system and method, in particular to an intermediate infrared micro comb key starting type generation system and method based on a negative thermo-optic effect. In order to solve the problems that a traditional mid-infrared light frequency comb is limited in size, weight, power consumption and repetition frequency, and the mid-infrared band faces the defects that the light source tuning rate is low, the micro-cavity quality factor is low and the key device performance is poor, the invention provides the mid-infrared light frequency comb. The intermediate infrared micro comb key starting type generation system based on the negative thermo-optic effect comprises a pumping unit used for providing pumping light, a microcavity unit used for generating a nonlinear four-wave mixing process and the negative thermo-optic effect, and a detection unit used for receiving an intermediate infrared micro comb and recording time domain information and frequency domain information of the intermediate infrared micro comb. Meanwhile, the invention provides a key-starting type generation method of the mid-infrared micro comb based on the negative thermo-optical effect, which is self-starting, wide in spectral bandwidth, high in repetition frequency and high in stability based on the system.

The embodiment of the invention discloses a display panel, a preparation method thereof and a display device. The display panel comprises a microcavity organic light-emitting element with multiple light-emitting colors. The microcavity lengths of the microcavity organic light-emitting elements with different light-emitting colors are different; the microcavity organic light-emitting element includes an anode structure; in the direction perpendicular to the plane where the substrate is located, the anode structure comprises a reflection anode, a transparent insulating layer and a transparent anode which are sequentially stacked, and the transparent anode is located on the side, away from the driving layer, of the reflection anode; the reflecting anode comprises a first surface in contact with the transparent insulating layer, and the transparent insulating layer covers the first surface; the transparent insulating layer comprises a second surface in contact with the transparent anode, and the transparent anode covers the second surface and the side wall of the transparent insulating layer and is in direct contact with the side wall of the reflecting anode; and the reflection anode is electrically connected with the pixel circuit through the via hole. According to the technical scheme, the light emitting efficiency of the light emitting element in the display panel can be improved.

Light-emitting component (100), comprising: • a first electrode (104); • an organic electroluminescent layer structure (106) on or above the first electrode (104); • a second translucent electrode (112) on or above the organic electroluminescent layer structure (106); • a mirror layer structure (116) on or above the second electrode (112), wherein the mirror layer structure (116) has a lateral thermal conductivity of at least 1 * 10 -3 exhibits W / K; and • an optically translucent layer structure (114) between the second translucent electrode (112) and the mirror layer structure (116), wherein • the optically translucent layer structure (114) and the mirror layer structure (116) together form a cavity that is optically coupled to a microcavity of the light-emitting component (100).

This application provides a quantum optical microcavity device modified with fluorinated organophosphonic acid and its fabrication method, relating to the fields of organic chemistry and optical engineering. The quantum optical microcavity device includes a microcavity body and a fluorinated organophosphonic acid monolayer attached to the surface of the microcavity body. A hydrophobic fluorinated organophosphonic acid monolayer is formed on the surface of the microcavity body through a chemical reaction between a mixed solution containing fluorinated organophosphonic acid molecules and the surface of the microcavity body. Since the active head groups of the fluorinated organophosphonic acid can form chemical bonds with –OH and Si–O–Si on the surface of silica through reaction, the adsorption of water molecules from the air onto the –OH and Si–O–Si on the surface of the silica microcavity body can be effectively suppressed, thus improving the Q-value stability of the whispering-gallery mode quantum optical microcavity device.

The invention discloses an annular micro-cavity quantum cascade laser. The laser comprises substrates which are sequentially arranged from bottom to top; the annular microcavity is arranged on the substrate, the annular microcavity is an elliptical resonator with a notch, and a groove is formed in the central area of the annular microcavity; the semi-insulating InP: Fe filling layer is arranged in the groove in the central area of the annular microcavity, and the difference between the resistivity of the semi-insulating InP: Fe filling layer and the refractive index of the upper cladding and the contact layer is less than 1%; the supporting ridges are arranged on the substrate, and the two supporting ridges are arranged on the two sides of the annular microcavity and are as high as the annular microcavity; the coplanar electrode comprises a central electrode arranged on the upper surface of the annular microcavity and grounding electrodes symmetrically arranged on the outer surface of the supporting ridge structure, and the central electrode and the grounding electrodes are the same in height. The quantum cascade laser has high-frequency modulation performance, improves heat dissipation performance, and has high response rate.

The invention discloses a high-power micro-cavity optical frequency comb generation device and method, and solves the problems that an existing optical frequency comb system needs to adopt a high-speed tunable laser to carry out precise scanning locking on micro-cavity resonance, or depends on distributed feedback type semiconductor laser with extremely narrow linewidth to carry out optical injection feedback on an ultra-high-quality micro-cavity; in order to solve the problems of complex system structure and operation due to the fact that the existing optical frequency comb has the advantages of high repetition frequency, high comb power and wide spectral range, pumping is carried out by a pumping unit, optical frequency comb generation and synchronous power amplification are carried out through an active gain microcavity, and the channel interval (100GHz) of the optical frequency comb meets the international communication standard. The power of a single comb tooth reaches a hundred mu W level and is improved by 2-3 orders of magnitude compared with a common Kerr microcavity optical frequency comb scheme (a typical value is a hundred nW level), so that weak signal power amplification is not needed, and the Kerr microcavity optical frequency comb has important application value in the field of optical communication.