The invention relates to a vacuum microcavity interferometer
chip, a manufacturing method and a wide-range optical
pressure sensor. Comprising a first substrate and a second substrate, the second substrate and the first substrate are bonded into a whole, a
pressure sensitive film is manufactured on the first substrate, a first reflecting surface is deposited on the
pressure sensitive film, and a second reflecting surface corresponding to the first reflecting surface is deposited on the second substrate. After the two substrates are bonded, the first reflecting surface and the second reflecting surface form an F-P optical interference cavity, at least one
getter cavity is arranged on the first substrate and / or the second substrate, a
getter film is arranged on the surface of the
getter cavity, and the getter cavity and the F-P optical interference cavity are separated and connected through an
air channel, so that the size of the
air channel can be made to be very small, and the size of the getter cavity is smaller than that of the F-P optical interference cavity. A small amount of particles generated after the getter is activated are prevented from polluting an
optical film to cause
device failure; the whole sensor is of a sealed structure and is not provided with a structure externally connected with the
chip, so that the overall airtightness of the
chip is ensured, and the vacuum degree requirement of subsequent shell packaging is reduced.