The invention relates to a matching
system capable of automatically adjusting impedance, a
radio frequency system and an
impedance matching method, an inverted L-shaped matching network circuit in which an
inductor is connected in series with a second adjustable
capacitor and a first adjustable
capacitor is connected in parallel is adopted to replace a traditional impedance matcher, the number of series elements is reduced to two (the
inductor and the second adjustable
capacitor), and only one parallel element (the first adjustable capacitor) is adopted. The
circuit complexity is remarkably reduced, the adjustable capacitor is used for replacing a
fixed capacitor /
inductor,
dynamic impedance adjustment is achieved, and debugging redundancy caused by traditional multi-element combination is avoided; a
signal acquisition unit, a
signal processing unit and a
signal execution unit are integrated on a main control board, a data interaction path is shortened (for example,
voltage and current signals are directly converted by an analog-to-
digital converter and then processed by the
processing unit), communication
delay in a traditional separated design is eliminated, and the
processing unit calculates and generates a
capacitance adjustment amount instruction. And the
execution unit respectively adjusts the
capacitance values of the first adjustable capacitor and the second adjustable capacitor, so that
impedance matching between the
radio frequency source and the load is realized.