Capacitance sensing probe and precise spring shift-measurement instrument
A capacitive sensing and precision technology, applied in the direction of material capacitance, instruments, measuring devices, etc., can solve quantitative research problems, slow physical changes and other problems, achieve high displacement resolution, improve measurement accuracy, improve process level and production efficiency Effect
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[0030] The present invention will be described in detail below in conjunction with the accompanying drawings.
[0031] The structure of the capacitive displacement sensing probe provided by the present invention is as follows: figure 1As shown, it includes at least a cylindrical electromagnetic shielding cover 8, a variable parallel plate capacitor, a moving plate connecting piece 6 and a moving plate locking mechanism for controlling the electric moving plate. The variable parallel-plate capacitor has a symmetrical structure, and the variable parallel-plate capacitor includes an upper capacitor fixed plate 9 , a lower capacitor fixed plate 11 , and a capacitor moving plate 10 . In this embodiment, both the upper capacitor stator 9 and the lower capacitor stator 11 are hollow cylinders, the upper capacitor stator 9 is open at the bottom, the lower capacitor stator 11 is open at the top, and the capacitor moving plate 10 is disc-shaped. The upper capacitor stator 9 and the low...
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