Modularization moving-iron type six-freedom-degree maglev motion platform

A motion platform, moving iron technology, applied in the field of ultra-precision machining and testing equipment, can solve the problems that the motion platform cannot be integrated and cannot be assembled and used, and achieves installation and maintenance to achieve large-scale production, simple structure, and mature motion control technology. Effect

Active Publication Date: 2013-12-11
TSINGHUA UNIV +1
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In ultra-precision machine tools, the ultra-precision micro-motion table is used to compensate the error of the feed system, so as to realize ultra-precision machining; at present, the design and manufacture of ultra-precision micro-motion table are all non-standard ultra-precision micro-motion table , cannot be assembled and used, and cannot be directly integrated according to different load requirements for the same type of motion platform

Method used

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  • Modularization moving-iron type six-freedom-degree maglev motion platform
  • Modularization moving-iron type six-freedom-degree maglev motion platform
  • Modularization moving-iron type six-freedom-degree maglev motion platform

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Embodiment Construction

[0016] figure 1 A three-dimensional structure diagram of an embodiment of a modular moving iron six-degree-of-freedom maglev motion platform provided for the invention, the maglev motion platform includes a base 1, at least one maglev plane motor module and a somatosensory controller 8; each maglev The planar motor module is composed of a maglev planar motor mover 4 and a maglev planar motor stator 3, the maglev planar motor stator includes a coil module 5 and an integrated driver module 6, and the coil module 5 and the integrated driver module 6 are fixed On the base 1; the magnetic levitation planar motor mover 4 includes a group of permanent magnet arrays 15 and a permanent magnet module backplane 19, the permanent magnet array 15 and the permanent magnet module backplane 19 are fixed together, and Located above the stator 3 of the maglev planar motor; the somatosensory controller 8 is located directly above the mover 4 of the maglev planar motor, and at least three infrare...

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Abstract

The invention discloses a modularization moving-iron type six-freedom-degree maglev motion platform and is mainly applied to semiconductor lithography equipment. The motion platform comprises a pedestal, at least one maglev planar motor module and a somatosensory controller. Each maglev planar motor module is composed of a maglev planar motor rotor and a maglev planar motor stator so that a micro moving workbench can rotate in an X direction, in a Y direction and around a Z axis. Compared to the prior art, the motion platform provided by the invention has the following advantages: coils are optimized and the coils with different specifications can be adaptive to a certain thrust range so that combination can be carried out according to different carrying capacity requirements; and the provided motion platform also has the advantages of simple structure, high-efficient integration, saved production cost and the like.

Description

technical field [0001] The invention relates to a six-degree-of-freedom maglev motion platform, in particular to a moving-iron type six-degree-of-freedom maglev motion platform, which is mainly used in semiconductor photolithography equipment and belongs to the technical field of ultra-precision processing and testing equipment. Background technique [0002] The micro-motion table with high precision and fast response has an extremely important position in modern manufacturing technology, and is regarded as an important symbol of a country's high-tech development level. In ultra-precision machine tools, the ultra-precision micro-motion table is used to compensate the error of the feed system, so as to realize ultra-precision machining; at present, the design and manufacture of ultra-precision micro-motion table are all non-standard ultra-precision micro-motion table , cannot be assembled and used, and the same type of motion platform cannot be directly integrated according t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H02N15/00G03F7/20
Inventor 张鸣朱煜刘召成荣杨开明徐登峰张利秦慧超赵彦坡胡清平田丽叶伟楠张金尹文生穆海华胡金春
Owner TSINGHUA UNIV
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