Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Micrometer-nanometer transmission platform

A platform, micro-nano technology, applied in the direction of workbench, manufacturing tools, etc., can solve the problems of limited freedom of movement, difficult to control, complex mechanism, etc., to achieve the elimination of inter-axis displacement coupling, easy to manufacture and control, high displacement resolution Effect

Active Publication Date: 2010-07-28
CHONGQING UNIV
View PDF0 Cites 10 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] At present, the devices used for nano-processing and operation include magnetic levitation workbench and Stewart platform. Although these two devices can meet the requirements of large strokes, they are difficult to meet the requirements of nano-level precision. control and other disadvantages
In the field of nanofabrication, platforms based on piezoelectric ceramic actuators are current research hotspots. They have the advantages of high precision, compact structure, and fast response. However, it has the disadvantages of complex mechanism and difficult control, and the all-piezoelectric drive platform is limited to two-dimensional micron-scale movement, does not have the function of rotation and swing, and has limited freedom of movement. It is difficult to meet the requirements of complex processing and operation

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Micrometer-nanometer transmission platform
  • Micrometer-nanometer transmission platform
  • Micrometer-nanometer transmission platform

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0024] figure 1 It is a structural schematic diagram of the present invention, figure 2 is a top view structural diagram of the lower platform assembly, image 3 It is a schematic diagram of the structural principle of the lower platform components, Figure 4 Schematic diagram of the structure of four stacked parallel arrangements of displacement amplification mechanisms, Figure 5 for Figure 4 left view of Image 6 It is a schematic diagram of the principle of the displacement amplification mechanism, as shown in the figure: the micro-nano transmission platform of this embodiment includes a square base 1, a lower platform assembly and an upper platform assembly arranged sequentially from bottom to top, and the center of the upper surface of the base 1 is taken as the origin. Establish a space Cartesian coordinate system X-Y-Z with the upper surface of the base 1 as the XY plane; the X-axis and the Y-axis are respectively parallel to the adjacent two sides of the base; ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention discloses a micrometer-nanometer transmission platform. The transmission platform comprises a base, a lower platform component and an upper platform component, wherein by the piezoelectric effect, the lower platform component can perform straight-line movements along the X and Y directions of a coordinate system, the upper platform component can perform straight-line movements along the Z direction of the coordinate system and rotation around the X and Y directions of the coordinate system, and the travels are increased by a displacement magnifying mechanism; an orientating mechanism relatively arranged on the lower platform component can effectively eliminate the displacement coupling between shafts; and simultaneously, the transmission platform is manufactured in one piece, all components are hinged by flexible hinges, the no-gap and no-friction platform transmission is completely realized, the transmission accuracy of the platform is effectively improved; in addition, the piezoelectric ceramic pipe is high in displacement resolution and rapid in response speed; and thus, the micrometer-nanometer transmission platform has the advantages of high accuracy, large travel, big rotation, more degree of freedom, high resolution, high frequency response and the like.

Description

technical field [0001] The invention relates to an ultra-high-precision transmission platform for micro-nano processing, micro-nano operation and micro-nano positioning in the fields of microelectronics, aerospace, bioengineering, medical equipment, etc., in particular to a micro-nano transmission platform. Background technique [0002] Nano-processing, operation and positioning are the limits of micro-nano technology, that is, micro-nano-level precision can be achieved through "micro-nano processing, operation and positioning". [0003] In recent years, with the rapid development of microelectronics technology, aerospace, bioengineering and other disciplines, the application of ultra-precision machining technology is no longer limited to a few cutting-edge fields such as national defense, aviation, and aerospace, and various civilian fields have also begun to use ultra-precision machining. Processing technology, its application is more and more extensive, at the same time, ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): B25H1/14
Inventor 林超俞松松程凯
Owner CHONGQING UNIV
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com