Micrometer-nanometer transmission platform

Abstract

The invention discloses a micrometer-nanometer transmission platform. The transmission platform comprises a base, a lower platform component and an upper platform component, wherein by the piezoelectric effect, the lower platform component can perform straight-line movements along the X and Y directions of a coordinate system, the upper platform component can perform straight-line movements along the Z direction of the coordinate system and rotation around the X and Y directions of the coordinate system, and the travels are increased by a displacement magnifying mechanism; an orientating mechanism relatively arranged on the lower platform component can effectively eliminate the displacement coupling between shafts; and simultaneously, the transmission platform is manufactured in one piece, all components are hinged by flexible hinges, the no-gap and no-friction platform transmission is completely realized, the transmission accuracy of the platform is effectively improved; in addition, the piezoelectric ceramic pipe is high in displacement resolution and rapid in response speed; and thus, the micrometer-nanometer transmission platform has the advantages of high accuracy, large travel, big rotation, more degree of freedom, high resolution, high frequency response and the like.

Description

technical field [0001] The invention relates to an ultra-high-precision transmission platform for micro-nano processing, micro-nano operation and micro-nano positioning in the fields of microelectronics, aerospace, bioengineering, medical equipment, etc., in particular to a micro-nano transmission platform. Background technique [0002] Nano-processing, operation and positioning are the limits of micro-nano technology, that is, micro-nano-level precision can be achieved through "micro-nano processing, operation and positioning". [0003] In recent years, with the rapid development of microelectronics technology, aerospace, bioengineering and other disciplines, the application of ultra-precision machining technology is no longer limited to a few cutting-edge fields such as national defense, aviation, and aerospace, and various civilian fields have also begun to use ultra-precision machining. Processing technology, its application is more and more extensive, at the same time, ...

AI Technical Summary

Problems solved by technology

[0004] At present, the devices used for nano-processing and operation include magnetic levitation workbench and Stewart platform. Although these two devices can meet the requirements of large strokes, they are difficult to meet the requirements of nano-level precision. control and other disadvantages

In the field of nanofabrication, platforms based on piezoelectric ceramic actuators are current research hotspots. They have the advantages of high precision, compact structure, and fast response. However, it has the disadvantages of complex mechanism and difficult control, and the all-piezoelectric drive platform is limited to two-dimensional micron-scale movement, does not have the function of rotation and swing, and has limited freedom of movement. It is difficult to meet the requirements of complex processing and operation

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